Highly scalable trench capacitor
An improved trench structure, and method for its fabrication are disclosed. Embodiments of the present invention provide a trench in which the collar portion has an air gap instead of a solid oxide collar. The air gap provides a lower dielectric constant. Embodiments of the present invention can therefore be used to make higher-performance devices (due to reduced parasitic leakage), or smaller devices, due to the ability to use a thinner collar to achieve the same performance as a thicker collar comprised only of oxide (with no air gap). Alternatively, a design choice can be made to achieve a combination of improved performance and reduced size, depending on the application.
1. A trench structure comprising:
a cavity within a semiconductor substrate, said cavity filled with a trench conductor; and
a collar disposed around the trench conductor, said collar comprising:
a lower region comprising a first dielectric material comprised of oxide;
an upper region comprising a second dielectric material disposed over the lower region, said upper region comprising an inner wall and an outer wall and an air gap, wherein the second dielectric material is different than the first dielectric material, said air gap comprised of a single large void contained within the upper region, disposed between the inner wall and outer wall of said collar.
2. The trench structure of claim 1 , further comprising a capacitor disposed at a base of the cavity.
3. The trench structure of claim 1 , wherein the trench conductor is comprised of a material selected from the group consisting of polysilicon, tungsten, titanium, ruthenium, titanium nitride, tantalum nitride, and tungsten silicide.
4. The trench structure of claim 1 , wherein the collar has a thickness that ranges from about 5 nanometers to about 30 nanometers.
5. The trench structure of claim 1 , further comprising an oxide liner disposed on the outer wall of said collar.
6. The trench structure of claim 5 , wherein the oxide liner is disposed on the trench conductor.
7. The method of claim 1 , wherein the second dielectric material is comprised of silicon oxynitride.
8. The method of claim 1 , wherein the second dielectric material is comprised of silicon nitride.
9. An integrated circuit comprising:
a transistor, said transistor comprising a buried strap;
a trench structure, said trench structure comprising a capacitor formed at a base of the trench structure;
a first trench conductor disposed within said trench structure, said first trench conductor forming an electrical connection with said capacitor;
a second trench conductor disposed within said trench structure, said second trench conductor forming an electrical connection with said first trench conductor;
a collar disposed around the second trench conductor, said collar comprising an inner wall and an outer wall, said collar comprised of:
a lower region comprising a first dielectric material comprised of oxide;
an upper region disposed over the lower region, said upper region comprising a second dielectric material, and said upper region comprising a single cavity within said collar, wherein the single cavity is not disposed in the lower region and wherein the second dielectric material is different than the first dielectric material;
a third trench conductor disposed within said trench structure, said third trench conductor forming an electrical connection with said second trench conductor, wherein said third trench conductor also forms an electrical connection with said buried strap of said transistor, thereby providing an electrical connection from the transistor to the capacitor, whereby the cavity within the collar reduces parasitic leakage currents.
10. The integrated circuit of claim 9 , wherein the first trench conductor is comprised of a material selected from the group consisting of polysilicon, tungsten, titanium, ruthenium, titanium nitride, tantalum nitride, and tungsten silicide.
11. The integrated circuit of claim 9 , wherein the collar has a thickness that ranges from about 5 nanometers to about 30 nanometers.
12. The integrated circuit of claim 9 , further comprising an oxide liner disposed on the outer wall of said collar.
13. The integrated circuit of claim 12 , wherein the oxide liner is further disposed on the second trench conductor.
14. The method of claim 9 , wherein the second dielectric material is comprised of silicon oxynitride.
15. The method of claim 9 , wherein the second dielectric material is comprised of silicon nitride.