Borderless contacts for semiconductor devices
In one exemplary embodiment of the invention, a method (e.g., to fabricate a semiconductor device having a borderless contact) including: forming a first gate structure on a substrate; depositing an interlevel dielectric over the first gate structure; planarizing the interlevel dielectric to expose a top surface of the first gate structure; removing at least a portion of the first gate structure; forming a second gate structure in place of the first gate structure; forming a contact area for the borderless contact by removing a portion of the interlevel dielectric; and forming the borderless contact by filling the contact area with a metal-containing material.
1. A semiconductor device comprising:
a substrate;
a borderless contact comprised of a metal;
a gate structure on the substrate;
a first spacer disposed between the gate structure and the borderless contact and comprised of a first spacer material;
an interlevel dielectric that at least partially overlies the gate structure;
a second spacer disposed between at least a portion of the gate structure and the interlevel dielectric and comprised of a second spacer material that is different from the first spacer material, where the first spacer and the second spacer are on different sides of the gate structure, where the second spacer comprises a nitride and the first spacer comprises a low-K dielectric material; and
a third spacer between the interlevel dielectric and the borderless contact, where the third spacer is spaced from the first spacer and comprises a low-K dielectric material,
wherein the third spacer is comprised of the same first spacer material as the first spacer.
2. The semiconductor device of claim 1 , further comprising a fourth spacer disposed between the gate structure and the first spacer, where the fourth spacer comprises an inner spacer and the first spacer comprises an outer spacer.
3. The semiconductor device of claim 1 , where the semiconductor device comprises a metal oxide semiconductor field effect transistor.
4. The semiconductor device of claim 1 , where the first spacer and the second spacer are on opposite sides of the gate structure.
5. The semiconductor device of claim 1 , where the first spacer and the second spacer have a different thickness relative to each other.
6. The semiconductor device of claim 5 , where the first spacer is thinner than the second spacer.
7. The semiconductor device of claim 4 , where the first spacer is thinner than the second spacer.
8. The semiconductor device of claim 1 , where the borderless contact contacts the gate structure between the first and third spacers.
9. The semiconductor device of claim 1 , where the borderless contact separates the first and third spacers from each other.
10. The semiconductor device of claim 1 , where low-K dielectric material of the first spacer is the same material as the low-K dielectric material of the third spacer.