Bonding of substrates including metal-dielectric patterns with metal raised above dielectric and structures so formed
Bonding of substrates including metal-dielectric patterns on a surface with the metal raised above the dielectric, as well as related structures, are disclosed. One method includes providing a first substrate having a metal-dielectric pattern on a surface thereof; providing a second substrate having a metal-dielectric pattern on a surface thereof; performing a process resulting in the metal being raised above the dielectric; cleaning the metal; and bonding the first substrate to the second substrate. A related structure is also disclosed. The bonding of raised metal provides a strong bonding medium, and good electrical and thermal connections enabling creation of three dimensional integrated structures with enhanced functionality.
1. A structure comprising:
a first substrate having a metal-dielectric pattern on a surface thereof, the metal-dielectric pattern including:
a metal having a convex-dome shape; and
a dielectric having a substantially uniform upper surface,
wherein the metal on the first substrate is raised above the dielectric on the first substrate; and
a second substrate bonded with the first substrate, the second substrate including:
a dielectric; and
a metal positioned substantially below the dielectric of the second substrate,
wherein the first substrate and the second substrate are bonded at the metal from the first substrate and the metal from the second substrate,
wherein the first substrate and the second substrate are bonded only by the metal of the first substrate and the metal of the second substrate.
2. The structure of claim 1 , wherein the metal positioned substantially below the dielectric on the second substrate includes a concave upper surface.
3. The structure of claim 2 , wherein the bonded metals of the first substrate and the second substrate are bonded substantially seamlessly.
4. The structure of claim 1 , wherein the bonded metal of the first substrate and the metal of the second substrate are bonded at a temperature less than approximately 400 degrees Celsius.
5. The structure of claim 1 , wherein the metal from the first substrate directly contracts the metal from the second substrate.
6. A structure comprising:
a first substrate having a metal-dielectric pattern on a surface thereof, the metal-dielectric pattern including:
a metal having a concave upper surface; and
a dielectric having a substantially uniform upper surface,
wherein the metal on the first substrate is raised above the dielectric on the first substrate; and
a second substrate bonded with the first substrate, the second substrate including:
a dielectric; and
a metal positioned substantially below the dielectric of the second substrate,
wherein the metal positioned substantially below the dielectric of the second substrate is wider than the metal on the first substrate that is raised above the dielectric on the first substrate,
wherein the first substrate and the second substrate are bonded at the metal from the first substrate and the metal from the second substrate.
7. The structure of claim 6 , further comprising a gap between the dielectric of the first substrate and the dielectric of the second substrate.
8. The structure of claim 7 , wherein the first substrate is bonded to the second substrate at only the metal from the first substrate and the metal from the second substrate.
9. The structure of claim 8 , wherein the metal from the first substrate directly contacts the metal from the second substrate.