Forming facet-less epitaxy with a cut mask
A method of forming a semiconductor structure on a substrate is provided. The method may include preparing a continuous active layer on a region of the substrate and depositing a first raised epitaxial layer on a first region of the continuous active layer. A second raised epitaxial layer is also deposited on a second region of the continuous active layer such that the first raised epitaxial layer is in close proximity to the second raised epitaxial layer. A mask may be used to etch a trench structure into the continuous active layer at both the first and the second raised epitaxial layer, whereby the etched trench structure is filled with isolation material for electrically isolating the first raised epitaxial layer from the second raised epitaxial layer.
1. A method of forming a semiconductor structure on a substrate, the method comprising:
preparing a continuous active layer on a region of the substrate;
depositing a first raised epitaxial layer on a first region of the continuous active layer;
depositing a second raised epitaxial layer on a second region of the continuous active layer, wherein the first raised epitaxial layer is in close proximity to the second raised epitaxial layer;
forming, prior to the depositing of the first and the second raised epitaxial layer, transistor gate structures associated with the first raised epitaxial layer and the second raised epitaxial layer on the continuous active layer;
etching, using a first cut mask, a dummy gate region associated with the formed transistor gate structures prior to the depositing of the first and the second raised epitaxial layer on a continuous active region within the continuous active layer;
etching, using a second cut mask, a trench structure into the continuous active layer at both the first and the second raised epitaxial layer; and
filling the trench structure with isolation material, the isolation material electrically isolating the first raised epitaxial layer from the second raised epitaxial layer.
2. The method of claim 1 , wherein the second cut mask overlaps the etched dummy gate region provided by the first cut mask.
3. The method of claim 1 , wherein depositing the first raised epitaxial layer comprises depositing a first raised source/drain layer of a first transistor.
4. The method of claim 3 , wherein depositing the second raised epitaxial layer comprises depositing a second raised source/drain layer of a second transistor next to said first transistor.
5. The method of claim 1 , wherein filling the trench structure with isolation material comprises filling the trench structure with high density plasma (HDP) oxide.
6. The method of claim 1 , wherein depositing the first raised epitaxial layer on a first region of the continuous active layer comprises forming a first facet-less raised epitaxial layer of a first transistor, wherein the first facet-less raised epitaxial layer is facet-less at a first edge of the trench structure filled with isolation material.
7. The method of claim 6 , wherein depositing the second raised epitaxial layer on a second region of the continuous active layer comprises forming a second facet-less raised epitaxial layer of a second transistor, wherein the second facet-less raised epitaxial layer is facet-less at a second edge of the trench structure filled with isolation material, the first and the second transistor being adjacent.
8. The method of claim 1 , further comprising:
covering, prior to the etching using the second cut mask, the deposited first and the deposited second raised epitaxial layer with an interlayer dielectric (ILD) layer of insulation material under the second cut mask; and
opening, using the second cut mask, the trench structure in the interlayer dielectric (ILD) layer of insulation material above the deposited first and the deposited second raised epitaxial layer.
9. The method of claim 8 , wherein:
depositing the first raised epitaxial layer on a first region of the continuous active layer comprises depositing a first facet-less raised epitaxial layer of a first transistor, wherein the first facet-less raised epitaxial layer is facet-less at a first edge of the trench structure filled with isolation material; and
depositing the second raised epitaxial layer on a second region of the continuous active layer comprises depositing a second facet-less raised epitaxial layer of a second transistor, wherein the second facet-less raised epitaxial layer is facet-less at a second edge of the trench structure filled with isolation material, the first and the second transistor being adjacent.
10. The method of claim 8 , further comprising, prior to the depositing of the first and the second raised epitaxial layer:
forming transistor gate structures associated with the first raised epitaxial layer and the second raised epitaxial layer on the continuous active layer; and
etching, using the first cut mask, a dummy transistor gate associated with the formed transistor gate structures.
11. The method of claim 8 , wherein depositing the first raised epitaxial layer comprises depositing a first raised source/drain layer of a first transistor.
12. The method of claim 11 , wherein depositing the second raised epitaxial layer comprises depositing a second raised source/drain layer of a second transistor.
13. The method of claim 8 , wherein filling the trench structure with isolation material comprises filling the trench structure with a silicon oxide insulator material.
14. The method of claim 8 , wherein the isolation material is different than the interlayer dielectric (ILD) material, and wherein the isolation material has a different etch-rate from that of the interlayer dielectric material (ILD).
15. A method of forming a semiconductor structure on a substrate, the method comprising:
preparing a continuous active layer on a region of the substrate;
depositing a first raised epitaxial layer on a first region of the continuous active layer, wherein the first raised epitaxial layer corresponds to a first device;
depositing a second raised epitaxial layer on a second region of the continuous active layer, the second raised epitaxial layer corresponding to a second device, wherein the first raised epitaxial layer is in close proximity to the second raised epitaxial layer;
forming, prior to the depositing of the first and the second raised epitaxial layer, transistor gate structures associated with the first raised epitaxial layer and the second raised epitaxial layer on the continuous active layer;
etching, using a first cut mask, a dummy gate region associated with the formed transistor gate structures prior to the depositing of the first and the second raised epitaxial layer on a continuous active region within the continuous active layer; and
electrically connecting the first raised epitaxial layer and the second raised epitaxial layer for connecting the first and the second device.