Dummy fin formation by gas cluster ion beam
FinFET structures with dielectric fins and methods of fabrication are disclosed. A gas cluster ion beam (GCIB) tool is used to apply an ion beam to exposed fins, which converts the fins from a semiconductor material such as silicon, to a dielectric such as silicon nitride or silicon oxide. Unlike some prior art techniques, where some fins are removed prior to fin merging, in embodiments of the present invention, fins are not removed. Instead, semiconductor (silicon) fins are converted to dielectric (nitride/oxide) fins where it is desirable to have isolation between groups of fins that comprise various finFET devices on an integrated circuit (IC).
1. A semiconductor structure comprising:
a semiconductor substrate;
an insulator layer disposed on the semiconductor substrate;
a plurality of fins disposed on the insulator layer;
wherein a first subset of the plurality of fins are comprised of a semiconductor material and wherein a second subset of the plurality of fins are comprised of a dielectric material; and
wherein the second subset of the plurality of fins is comprised of silicon nitride and interleaved with the first subset of the plurality of fins; and
wherein groups of fins from the first subset of the plurality of fins are merged with epitaxially grown silicon, and wherein at least one group of fins from the first subset of the plurality of fins is merged with n-doped epitaxially grown silicon, and wherein at least another one group of fins from the first subset of the plurality of fins is merged with p-type doped epitaxially grown silicon.
2. A semiconductor structure comprising:
a semiconductor substrate;
a plurality of fins formed on the semiconductor substrate;
wherein a first subset of the plurality of fins are comprised of a semiconductor material and wherein a second subset of the plurality of fins are comprised of a dielectric material; and
wherein the second subset of the plurality of fins is comprised of silicon nitride and interleaved with the first subset of the plurality of fins; and
wherein groups of fins from the first subset of the plurality of fins are merged with epitaxially grown semiconductor material, and wherein at least one group of fins from the first subset of the plurality of fins is merged with n-doped epitaxially grown semiconductor material, and wherein at least another one group of fins from the first subset of the plurality of fins is merged with p-type doped epitaxially grown semiconductor material.