IP Library › Granted Patent US 9,059,025
Granted Patent B2
US 9,059,025 · App. 14/015,493 · Granted Jun 16, 2015

Photonics device and CMOS device having a common gate

Inventors: Solomon Assefa (Ossining, NY); William M. J. Green (Astoria, NY); Steven M. Shank (Jericho, VT); Yurii A. Vlasov (Katonah, NY)
Assignee: International Business Machines Corporation
H01L27/0922H01L27/14H01L31/1808H01L21/823437H01L21/84H01L27/0617Y02E10/50H01L21/28255
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,059,025
App. No.
14/015,493
Granted
Jun 16, 2015
Kind
B2
Abstract

A semiconductor chip having a photonics device and a CMOS device which includes a photonics device portion and a CMOS device portion on a semiconductor chip; a metal or polysilicon gate on the CMOS device portion, the metal or polysilicon gate having a gate extension that extends toward the photonics device portion; a germanium gate on the photonics device portion such that the germanium gate is coplanar with the metal or polysilicon gate, the germanium gate having a gate extension that extends toward the CMOS device portion, the germanium gate extension and metal or polysilicon gate extension joined together to form a common gate; spacers formed on the germanium gate and the metal or polysilicon gate; and nitride encapsulation formed on the germanium gate.

Claims (38)

1. A semiconductor chip having a photonics device and a CMOS device on the same semiconductor chip comprising:

a photonics device portion and a CMOS device portion on a semiconductor chip;

a metal or polysilicon gate on the CMOS device portion, the metal or polysilicon gate having a gate extension that extends away from the CMOS device portion and toward the photonics device portion;

a germanium gate on the photonics device portion such that the germanium gate is coplanar with the metal or polysilicon gate, the germanium gate having a gate extension that extends away from the photonics device portion and toward the CMOS device portion, the germanium gate extension and metal or polysilicon gate extension joined together at a juncture to form a common gate wherein the juncture is not in contact with the photonics device portion and the juncture is not in contact with the CMOS device portion;

spacers formed on the germanium gate and the metal or polysilicon gate; and

nitride encapsulation formed on the germanium gate.

2. The semiconductor chip of claim 1 wherein the respective joined gate extensions that form a common gate between the photonics device portion and CMOS device portion are coplanar.

3. The semiconductor chip of claim 1 where the semiconductor chip comprises a semiconductor on insulator structure.

4. The semiconductor chip of claim 1 wherein the nitride encapsulation is only formed on the germanium gate.

5. The semiconductor chip of claim 1 wherein the spacers comprise first and second spacers formed on the germanium gate and the metal or polysilicon gate.

6. The semiconductor chip of claim 1 further comprising an isolation region between the photonics device portion and the CMOS device portion such that the common gate is on the isolation region.

7. A semiconductor chip having a photonics device and a CMOS device on the same semiconductor chip comprising:

a photonics device portion and a CMOS device portion on a semiconductor chip;

a metal or polysilicon gate on the CMOS device portion, the metal or polysilicon gate having a gate extension that extends toward the photonics device portion;

a germanium gate on the photonics device portion such that the germanium gate is coplanar with the metal or polysilicon gate, the germanium gate having a gate extension that extends toward the CMOS device portion, the germanium gate extension and metal or polysilicon gate extension joined together to form a common gate;

a bonding layer between the germanium gate extension and metal or polysilicon gate extension;

spacers formed on the germanium gate and the metal or polysilicon gate; and

nitride encapsulation formed on the germanium gate.

8. The semiconductor chip of claim 7 wherein the bonding layer is an oxynitride.

9. The semiconductor chip of claim 7 wherein the bonding layer has a thickness of about 10 angstroms.

10. A semiconductor chip having a photonics device and a CMOS device on the same semiconductor chip comprising:

a photonics device portion and a CMOS device portion on a semiconductor chip;

a metal or polysilicon gate on the CMOS device portion, the metal or polysilicon gate having a gate extension that extends toward the photonics device portion;

a germanium gate on the photonics device portion such that the germanium gate is coplanar with the metal or polysilicon gate, the germanium gate having a gate extension that extends toward the CMOS device portion, the germanium gate extension and metal or polysilicon gate extension joined together at a juncture to form a common gate;

nitride encapsulation formed only on the germanium gate; and

an isolation region between the photonics device portion and the CMOS device portion such that the juncture of the common gate is on the isolation region.

11. The semiconductor chip of claim 10 wherein the respective joined gate extensions that form a common gate between the photonics device portion and CMOS device portion are coplanar.

12. The semiconductor chip of claim 10 where the semiconductor chip comprises a semiconductor on insulator structure.

13. The semiconductor chip of claim 10 further comprising first and second spacers formed on the germanium gate and the metal or polysilicon gate.

14. A semiconductor chip having a photonics device and a CMOS device on the same semiconductor chip comprising:

a photonics device portion and a CMOS device portion on a semiconductor chip;

a metal or polysilicon gate on the CMOS device portion, the metal or polysilicon gate having a gate extension that extends toward the photonics device portion;

a germanium gate on the photonics device portion such that the germanium gate is coplanar with the metal or polysilicon gate, the germanium gate having a gate extension that extends toward the CMOS device portion, the germanium gate extension and metal or polysilicon gate extension joined together to form a common gate;

a bonding layer between the germanium gate extension and metal or polysilicon gate extension;

nitride encapsulation formed only on the germanium gate; and

an isolation region between the photonics device portion and the CMOS device portion such that the common gate is on the isolation region.

15. The semiconductor chip of claim 14 wherein the bonding layer is an oxynitride.

16. The semiconductor chip of claim 14 wherein the bonding layer has a thickness of about 10 angstroms.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2013
From: ASSEFA, SOLOMON; GREEN, WILLIAM M.J.; SHANK, STEVEN M.; VLASOV, YURII A.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 031130/0474 →
Continuity (2)
Continuation 13736672 · Jan 8, 2013
Related Publication 20140191326A1 · Jul 10, 2014