Metrology marks for bidirectional grating superposition patterning processes
Cut spacer reference marks, targets having such cut spacer reference marks, and methods of making the same by forming spacer gratings around grating lines on a first layer, and fabricating a template mask that extends across and perpendicular to such spacer gratings. Cut spacer gratings are etched into a second layer using the template mask to superimpose at least a portion of the spacer gratings of the first layer into the second layer.
1. A method of fabricating reference marks for lithography comprising:
providing grating lines on a first layer;
forming spacer gratings on the first layer around said grating lines so that said spacer gratings surround and double the frequency of said grating lines on said first layer;
forming a template mask extending across and perpendicular to said spacer gratings residing around said grating lines; and
etching a second layer using said template mask to superimpose at least a portion of said spacer gratings having double the frequency of said grating lines of said first layer into said second layer, thereby forming cut spacer gratings in said second layer.
2. The method of claim 1 wherein the template mask comprises a unidirectional mask extending in an x-direction respect to the grating lines.
3. The method of claim 2 wherein the template mask comprises a positive or negative tone template mask.
4. The method of claim 1 wherein the template mask comprises a unidirectional mask extending in a y-direction with respect to the grating lines.
5. The method of claim 4 wherein the template mask comprises a positive or negative tone template mask.
6. The method of claim 1 further including covering the first layer with one or more films, the upper most film comprising a resist layer, the resist layer having said template mask.
7. The method of claim 1 wherein the template mask comprises a bi-directional template mask extending in both an x-direction and y-direction with respect to the grating lines.
8. The method of claim 7 wherein the bi-directional template mask extends at 90° angles in both the x-direction and y-direction with respect to the grating lines.
9. The method of claim 7 wherein the bi-directional template mask comprises a cross pattern bi-directional template mask.
10. The method of claim 9 wherein the cross pattern bi-directional template mask comprises a positive or negative tone template mask.
11. The method of claim 7 wherein the bi-directional template mask comprises a pinwheel pattern bi-directional template mask.
12. The method of claim 11 wherein the pinwheel pattern bi-directional template mask comprises a positive or negative tone template mask.
13. The method of claim 1 further the steps:
forming one or more additional template masks extending across and perpendicular to one or more additional spacer gratings of one or more additional layers; and
etching other cut spacer gratings in still further other layers by using said one or more additional template masks to superimpose at least a portion of said one or more additional spacer gratings into said still further other layers.
14. A method of determining positioning error between lithographically produced integrated circuit fields comprising:
providing grating lines on a first layer;
forming rectangular shaped spacer gratings on the first layer around said grating lines, said rectangular shaped spacer gratings surrounding and at least double the frequency of said grating lines on said first layer;
forming a template mask extending across and perpendicular to said spacer gratings surrounding said grating lines;
etching a second layer using said template mask to superimpose at least a portion of said spacer gratings having double the frequency of said grating lines of said first layer into said second layer, thereby forming cut spacer gratings in said second layer; and
measuring a position of the cut spacer gratings in said second layer relative to the grating lines on the first layer to determine any alignment error.
15. The method of claim 14 further including using any detected alignment error for processing subsequent layers.
16. The method of claim 14 further including aligning a third layer to said cut spacer gratings in said second layer to form third layer spacer gratings, and further determining alignment error between said third layer spacer gratings and said cut spacer gratings in said second layer.
17. The method of claim 14 further including the steps:
providing other grating lines on a third layer;
forming other spacer gratings on the third layer around said other grating lines so that said other spacer gratings surround and double or quadruple, the frequency of said other grating lines on said third layer;
forming a second template mask extending across and perpendicular to said other spacer gratings on said third layer; and
etching a fourth layer using said second template mask to superimpose at least a portion of said other spacer gratings of said third layer into said fourth layer, thereby forming other cut spacer gratings in said fourth.
18. The method of claim 17 further including the step of measuring positioning of the other cut spacer gratings in said fourth layer relative to the grating lines on the first layer to determine any alignment error.
19. The method of claim 17 further including the step of measuring positioning of the other cut spacer gratings in said fourth layer relative to the other grating lines on the third layer to determine any alignment error.