Flattened substrate surface for substrate bonding
Methods for bonding substrate surfaces, bonded substrate assemblies, and design structures for a bonded substrate assembly. Device structures of a product chip are formed using a first surface of a device substrate. A wiring layer of an interconnect structure for the device structures is formed on the product chip. The wiring layer is planarized. A temporary handle wafer is removably bonded to the planarized wiring layer. In response to removably bonding the temporary handle wafer to the planarized first wiring layer, a second surface of the device substrate, which is opposite to the first surface, is bonded to a final handle substrate. The temporary handle wafer is then removed from the assembly.
1. A bonded substrate assembly comprising:
a device substrate including a first surface, a second surface opposite to the first surface, a plurality of device structures on the first surface, and an interconnect structure for the device structures, the interconnect structure including a first wiring layer and a second wiring layer between the first wiring layer and the first surface of the device substrate, the second wiring layer of the interconnect structure including an interlayer dielectric layer with a top surface, and the first wiring layer including a first conductive feature projecting above the top surface of the interlayer dielectric layer and a second conductive feature projecting above the top surface of the interlayer dielectric layer, the first and second conductive features each having a height measured relative to the top surface of the interlayer dielectric layer of the second wiring layer;
a final handle substrate bonded to the second surface of the device substrate; and
at least one insulator layer on the top surface of the interlayer dielectric layer, the at least one insulator layer having a planar top surface and a thickness greater than the height of the first and second conductive features,
wherein the first wiring layer of the interconnect structure is a top wiring layer, and the first conductive feature of the interconnect structure is a bond pad.
2. The bonded substrate assembly of claim 1 wherein the second conductive feature is separated by a gap from the first conductive feature, and the at least one insulator layer fills the gap.
3. The bonded substrate assembly of claim 2 wherein the at least one insulator layer comprises a first insulator layer comprised of a first dielectric material and a second insulator layer comprised of a second dielectric material, the first insulator layer fills the gap, and at least one of the first and second conductive features is disposed between a portion of the first dielectric material and the top surface of the interlayer dielectric layer.
4. The bonded substrate assembly of claim 2 wherein the at least one insulator layer comprises a first insulator layer comprised of a first dielectric material and a second insulator layer comprised of a second dielectric material, the first insulator layer including a portion that fills the gap, and the first and second insulator layers include portions that define a composite layer that covers the first and second conductive features and the portion of the first insulator layer.
5. The bonded substrate assembly of claim 1 further comprising:
a temporary handle substrate removably bonded to the planar top surface of the at least one insulator layer.
6. The bonded substrate assembly of claim 5 further comprising:
an adhesive layer between the temporary handle substrate and the planar top surface of the at least one insulator layer.
7. The bonded substrate assembly of claim 1 wherein the at least one insulator layer is comprised of a dielectric material, and further comprising:
a layer comprised of a dielectric material compositionally different from the dielectric material of the at least one insulator layer, the layer directly contacting the planar top surface of the at least one insulator layer and having a uniform thickness.
8. The bonded substrate assembly of claim 1 wherein at least one of the first and second conductive features is disposed between the planar top surface of the at least one insulator layer and the top surface of the interlayer dielectric layer.
9. The bonded substrate assembly of claim 1 wherein the device substrate includes a device layer and a buried insulator layer each extending laterally to a perimeter of the device substrate, and the second surface of the device substrate is a surface comprising the buried insulator layer.
10. The bonded substrate assembly of claim 1 wherein the final handle substrate is comprised of sapphire, and the second surface of the device substrate is a surface comprising an insulator layer.
11. A bonded substrate assembly comprising:
a device substrate including a first surface, a second surface opposite to the first surface, a plurality of device structures on the first surface, and an interconnect structure for the device structures, the interconnect structure including an interlayer dielectric layer with a top surface, a first conductive feature projecting above the top surface, and a second conductive feature projecting above the top surface, the first and second conductive features each having a height measured relative to the top surface of the interlayer dielectric layer;
a final handle substrate bonded to the second surface of the device substrate; and
at least one insulator layer on the top surface of the interlayer dielectric layer, the at least one insulator layer having a planar top surface and a thickness greater than the height of the first and second conductive features,
wherein the device substrate includes a first product chip, a second product chip, and a kerf street between the first product chip and the second product chip, the device structures and the interconnect structure are on the first product chip, and the at least one insulator layer fills the kerf street to provide the planar top surface.
12. The bonded substrate assembly of claim 11 further comprising:
a test pad having a height measured relative to the top surface of the interlayer dielectric layer,
wherein the thickness of the at least one insulator layer is greater than the height of the test pad.
13. The bonded substrate assembly of claim 11 wherein the second conductive feature is separated by a gap from the first conductive feature, and the at least one insulator layer fills the gap.
14. The bonded substrate assembly of claim 13 wherein the at least one insulator layer comprises a first insulator layer comprised of a first dielectric material and a second insulator layer comprised of a second dielectric material, the first insulator layer fills the gap, and at least one of the first and second conductive features is disposed between a portion of the first dielectric material and the top surface of the interlayer dielectric layer.
15. The bonded substrate assembly of claim 13 wherein the at least one insulator layer comprises a first insulator layer comprised of a first dielectric material and a second insulator layer comprised of a second dielectric material, the first insulator layer including a portion that fills the gap, and the first and second insulator layers include portions that define a composite layer that covers the first and second conductive features and the portion of the first insulator layer.
16. The bonded substrate assembly of claim 11 further comprising:
a temporary handle substrate removably bonded to the planar top surface of the at least one insulator layer.
17. The bonded substrate assembly of claim 11 wherein the at least one insulator layer is comprised of a dielectric material, and further comprising:
a layer comprised of a dielectric material compositionally different from the dielectric material of the at least one insulator layer, the layer directly contacting the planar top surface of the at least one insulator layer and having a uniform thickness.
18. The bonded substrate assembly of claim 11 wherein at least one of the first and second conductive features is disposed between the planar top surface of the at least one insulator layer and the top surface of the interlayer dielectric layer.
19. The bonded substrate assembly of claim 11 wherein the device substrate includes a device layer and a buried insulator layer each extending laterally to a perimeter of the device substrate, and the second surface of the device substrate is a surface comprising the buried insulator layer.
20. The bonded substrate assembly of claim 11 wherein the final handle substrate is comprised of sapphire, and the second surface of the device substrate is a surface comprising an insulator layer.