Semiconductor device and manufacturing method thereof
The reliability of wirings, each of which includes a main conductive film containing copper as a primary component, is improved. On an insulating film including the upper surface of a wiring serving as a lower layer wiring, an insulating film formed of a silicon carbonitride film having excellent barrier properties to copper is formed; on the insulating film, an insulating film formed of a silicon carbide film having excellent adhesiveness to a low dielectric constant material film is formed; on the insulating film, an insulating film formed of a low dielectric constant material as an interlayer insulating film is formed; and thereafter a wiring as an upper layer wiring is formed.
1. A method for manufacturing a semiconductor integrated circuit device comprising steps of:
(a) forming a first insulating film over a semiconductor substrate;
(b) forming a first wiring trench in the first insulating film;
(c) filling a first metal film in the first wiring trench;
(d) forming a second insulating film over the first metal film and the first insulating film;
(e) forming a third insulating film over the second insulating film;
(f) forming a contact hole in the third and second insulating films;
(g) forming a second wiring trench formed in the third insulating film; and
(h) filling a second metal film in the second wiring trench and the contact hole as one combined unit, such that the second metal film is connected to the first metal film,
wherein the first and second metal films include copper as a primary component,
wherein each of the first and third insulating films has a greater thickness than the second insulating film, has a lower dielectric constant than a dielectric constant of a silicon oxide film and is comprised of a material including silicon, oxygen and carbon,
wherein the second insulating film is formed of a different material from the third insulating films and is comprised of a material including silicon, nitrogen and carbon, and
wherein a nitrogen concentration in the second insulating film disposed near the first metal film is larger than a nitrogen concentration in the second insulating film disposed near the third insulating film.
2. A method for manufacturing a semiconductor integrated circuit device according to claim 1 , further comprising a step of:
(i) between the steps (b) and (c), forming a first conductive barrier film over a side surface and a bottom surface of the first wiring trench,
wherein the first conductive barrier film is formed between the first metal film and the first insulating film and is formed of a different material form the first metal film.
3. A method for manufacturing a semiconductor integrated circuit device according to claim 2 , further comprising a step of:
(j) between the steps (c) and (d), performing a plasma treatment to an upper surface of the first metal film.
4. A method for manufacturing a semiconductor integrated circuit device according to claim 3 , further comprising a step of:
(k) between the steps (g) and (h), forming a second conductive barrier film over a side surface and a bottom surface of the second wiring trench and a side surface and a bottom surface of the contact hole,
wherein the second conductive barrier film is formed between the second metal film and the third insulating film, between the second metal film and the first metal film, and is formed of a different material than the second metal film.