Method of making semiconductor structure having contact plug
The present invention provides a method of forming a semiconductor structure including a substrate, a transistor, a first ILD layer, a second ILD layer, a first contact plug, second contact plug and a third contact plug. The transistor is disposed on the substrate and includes a gate and a source/drain region. The first ILD layer is disposed on the transistor. The first contact plug is disposed in the first ILD layer and a top surface of the first contact plug is higher than a top surface of the gate. The second ILD layer is disposed on the first ILD layer. The second contact plug is disposed in the second ILD layer and electrically connected to the first contact plug. The third contact plug is disposed in the first ILD layer and the second ILD layer and electrically connected to the gate.
1. A method of forming a semiconductor structure having at least a contact plug, comprising:
providing a substrate; forming a transistor on the substrate, wherein the transistor comprises a gate and a source/drain region;
forming a dielectric layer on the substrate, wherein the transistor is disposed in the dielectric layer;
forming a first inter-layer dielectric (ILD) layer on the dielectric layer and the transistor, wherein a bottom surface of the first ILD is leveled with a top surface of the gate;
forming a first contact plug in the first ILD layer to electrically connect the source/drain region, wherein a top surface of the first contact plug is higher than a top surface of the gate, and wherein the top surface of the first contact plug is level with a top surface of the first ILD layer;
forming a second ILD layer on the first ILD layer; and
forming a second contact plug in the second ILD layer to electrically connect the first contact plug, and a third contact plug in the first ILD layer and the second ILD layer to electrically connect the gate, wherein a portion of the first ILD layer contacts the top surface of the gate between the first contact plug and the third contact plug, and wherein the first ILD layer is a single layer structure.
2. The method of forming the semiconductor structure having the at least a contact plug as in claim 1 , wherein the step of forming the second contact plug and the third contact plug comprises:
forming a second opening in the second ILD layer to expose the first contact plug;
forming a third opening in the second ILD layer and the first ILD layer to expose the gate; and
filling a second metal layer in the second opening and the third opening.
3. The method of forming the semiconductor structure having the at least a contact plug as in claim 2 , wherein the second opening is formed and then the third opening is formed.
4. The method of forming the semiconductor structure having the at least a contact plug as in claim 2 , wherein the third opening is formed and then the second opening is formed.
5. The method of forming the semiconductor structure having the at least a contact plug as in claim 1 , wherein step of forming the first contact plug comprises:
forming a first opening in the first ILD layer to expose the source/drain region;
filling a first metal layer in the first opening; and
performing a planarization process.
6. The method of forming the semiconductor structure having the at least a contact plug as in claim 5 , wherein after the planarization process, there is still the first ILD layer having a predetermined thickness on the top surface of the gate.
7. The method of forming the semiconductor structure having the at least a contact plug as in claim 6 , wherein the predetermined thickness is greater than 100 angstroms.
8. The method of forming the semiconductor structure having the at least a contact plug as in claim 5 , wherein before filling the first metal layer in the first opening, further comprises performing a salicidation process to form a silicide layer on the source/drain region exposed by the first opening.
9. The method of forming the semiconductor structure having the at least a contact plug as in claim 1 , wherein the first contact plug has a stress.
10. The method of forming the semiconductor structure having the at least a contact plug as in claim 1 , further comprises forming an etch stop layer between the first ILD layer and the second ILD layer.
11. The method of forming the semiconductor structure having the at least a contact plug as in claim 1 , wherein a bottom surface of the second contact plug is level with a top surface of the first ILD layer.
12. The method of forming the semiconductor structure having the at least a contact plug as in claim 1 , wherein a top surface of the dielectric layer is leveled with a top surface of the gate.