Semiconductor device and method for manufacturing the same
A highly reliable semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device is manufactured with a high yield, so that high productivity is achieved. In a semiconductor device including a transistor in which a source electrode layer and a drain electrode layer are provided over and in contact with an oxide semiconductor film, entry of impurities and formation of oxygen vacancies in an end face portion of the oxide semiconductor film are suppressed. This can prevent fluctuation in the electric characteristics of the transistor which is caused by formation of a parasitic channel in the end face portion of the oxide semiconductor film.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor film having an end face portion over a substrate having an insulating surface;
forming a conductive film over the oxide semiconductor film;
etching the conductive film with an etching gas comprising halogen to form a source electrode layer and a drain electrode layer each overlapping with the oxide semiconductor film and a part of the end face portion;
removing an element contained in the etching gas from the exposed rest of the end face portion after etching the conductive film;
adding oxygen to the exposed rest of the end face portion after etching the conductive film;
forming a gate insulating film over the oxide semiconductor film; and
forming a gate electrode layer over the gate insulating film.
2. The method for manufacturing the semiconductor device according to claim 1 , wherein the adding oxygen step is performed by a plasma treatment.
3. The method for manufacturing the semiconductor device according to claim 1 , further comprising the step of adding oxygen to the gate insulating film after forming the gate insulating film.
4. The method for manufacturing the semiconductor device according to claim 1 , further comprising the step of forming a protective insulating film over the gate insulating film.
5. The method for manufacturing the semiconductor device according to claim 4 , further comprising the step of performing heat treatment after forming the protective insulating film.
6. The method for manufacturing the semiconductor device according to claim 1 , wherein the oxide semiconductor film comprises indium, zinc and one or more metal elements selected from gallium, aluminum, manganese, cobalt, tin, hafnium, and zirconium.
7. The method for manufacturing the semiconductor device according to claim 1 , wherein the oxide semiconductor film is a c-axis aligned crystalline oxide semiconductor.
8. The method for manufacturing the semiconductor device according to claim 1 , wherein a chlorine concentration in the exposed rest of the end face portion is lower than or equal to 5×10 18 atoms/cm 3 .
9. The method for manufacturing the semiconductor device according to claim 1 ,
wherein a concentration of the element in the part of the end face portion is lower than a concentration of the element in the exposed rest of the end face portion, and
wherein the element is one of chlorine and fluorine.
10. A method for manufacturing a semiconductor device, comprising the steps of:
forming a first gate electrode layer over a substrate having an insulating surface;
forming a gate insulating film over the first gate electrode layer;
forming an oxide semiconductor film having an end face portion over the gate insulating film;
performing heat treatment;
forming a conductive film over the oxide semiconductor film;
etching the conductive film with an etching gas comprising halogen to form a source electrode layer and a drain electrode layer each overlapping with the first gate electrode layer and a part of the end face portion;
removing an element contained in the etching gas from the exposed rest of the end face portion after etching the conductive film;
adding oxygen to the exposed rest of the end face portion after etching the conductive film;
forming a first protective insulating film over the oxide semiconductor film, the source electrode layer, and the drain electrode layer; and
forming a second gate electrode layer over the first protective insulating film.
11. The method for manufacturing the semiconductor device according to claim 10 , wherein the adding oxygen step is performed by a plasma treatment.
12. The method for manufacturing the semiconductor device according to claim 10 , further comprising the step of adding oxygen to the first protective insulating film after forming the first protective insulating film.
13. The method for manufacturing the semiconductor device according to claim 10 , further comprising the step of forming a second protective insulating film over the first protective insulating film.
14. The method for manufacturing the semiconductor device according to claim 13 , further comprising the step of performing heat treatment after forming the second protective insulating film.
15. The method for manufacturing the semiconductor device according to claim 10 , wherein the oxide semiconductor film comprises indium, zinc, and one or more metal elements selected from gallium, aluminum, manganese, cobalt, tin, hafnium, and zirconium.
16. The method for manufacturing the semiconductor device according to claim 10 , wherein a chlorine concentration in the exposed rest of the end face portion is lower than or equal to 5×10 18 atoms/cm 3 .
17. The method for manufacturing the semiconductor device according to claim 10 ,
wherein a concentration of the element in the part of the end face portion is lower than a concentration of the element in the exposed rest of the end face portion, and
wherein the element is one of chlorine and fluorine.
18. The method for manufacturing the semiconductor device according to claim 10 , wherein the oxide semiconductor film is a c-axis aligned crystalline oxide semiconductor.
19. The method for manufacturing the semiconductor device according to claim 10 , further comprising the step of adding oxygen to the oxide semiconductor film after the performing heat treatment.