Magnetoresistive stack/structure and method of manufacturing same
A method of manufacturing a magnetoresistive stack/structure comprising (a) etching through a second magnetic region to (i) provide sidewalls of the second magnetic region and (ii) expose a surface of a dielectric layer, (b) depositing a first encapsulation layer on the sidewalls of the second magnetic region and over a surface of the dielectric layer, (c) thereafter: (i) etching the first encapsulation layer which is disposed over the dielectric layer using a first etch process, and (ii) etching re-deposited material using a second etch process, wherein, after such etching, a portion of the first encapsulation layer remains on the sidewalls of the second magnetic region, (d) etching (i) through the dielectric layer to form a tunnel barrier and provide sidewalls thereof and (ii) etching the first magnetic region to provide sidewalls thereof, and (e) depositing a second encapsulation layer on the sidewalls of the tunnel barrier and first magnetic region.
1. A method of manufacturing a magnetoresistive structure including an intermediate layer disposed between a first magnetic region and a second magnetic region, comprising:
(a) etching through the second magnetic region to form exposed surfaces, wherein (i) the exposed surfaces include at least a portion of the intermediate layer, and (ii) after the etching, at least a portion of the exposed surfaces includes re-deposited material;
(b) forming a first encapsulation layer on the exposed surfaces after step (a);
(c) removing at least a portion of the re-deposited material after step (b);
(d) etching through the intermediate layer after step (c); and
(e) forming a second encapsulation layer after step (d).
2. The method of claim 1 , wherein the intermediate layer is a dielectric layer.
3. The method of claim 1 , wherein step (a) includes etching using a physical etch process.
4. The method of claim 1 , wherein step (a) and step (c) include etching using a physical etch process.
5. The method of claim 4 , wherein the physical etch process includes ion beam etching.
6. The method of claim 1 , wherein step (a) includes etching through a portion of the intermediate layer.
7. The method of claim 1 , further including terminating the etching in step (a) at the top of the intermediate layer.
8. The method of claim 1 , wherein step (b) includes forming an oxide or a nitride layer.
9. The method of claim 1 , wherein step (b) includes depositing one or more of a silicon oxide, a silicon nitride, or a tetraethylorthosilicate (TEOS).
10. The method of claim 1 , wherein step (e) includes depositing one or more of a silicon oxide, a silicon nitride, or a tetraethylorthosilicate (TEOS).
11. The method of claim 1 , wherein the first magnetic region and the second magnetic region include at least one of a synthetic antiferromagnetic structure (SAF) or a synthetic ferromagnetic structure (SyF).
12. The method of claim 1 , wherein the first magnetic region is a fixed magnetic region and the second magnetic region is a tree magnetic region.
13. The method of claim 1 , wherein the first magnetic region is a free magnetic region and the second magnetic region is a fixed magnetic region.
14. The method of claim 1 , wherein the intermediate layer includes magnesium oxide (MgO).
15. A method of manufacturing a magnetoresistive structure including an intermediate layer disposed between a first magnetic region and a second magnetic region, comprising:
(a) etching through the second magnetic region to form exposed surfaces, wherein (i) the exposed surfaces include at least a portion of the intermediate layer, and (ii) after the etching, at least a portion of the exposed surfaces includes re-deposited material;
(b) depositing a first encapsulation layer on the exposed surfaces after step (a);
(c) etching at least a portion of the re-deposited material after step (b); and
(d) etching the intermediate layer after step (c).
16. The method of claim 15 , wherein the first encapsulation layer is one or more of a silicon oxide, a silicon nitride, or a tetraethylorthosilicate (TEOS).
17. The method of claim 15 , further including depositing a second encapsulation layer after step (d).
18. The method of claim 16 , wherein the second encapsulation layer is one or more of a silicon oxide, a silicon nitride, or a tetraethylorthosilicate (TEOS).
19. The method of claim 15 , wherein step (a), step (c), and step (d) include the same or different physical etch processes.
20. The method of claim 15 , further including terminating the etching in step (a) at the top of the intermediate layer.