Three-dimensional memory device including locally thickened electrically conductive layers and methods of manufacturing the same
Fabricating a three-dimensional memory device may include forming an alternating stack of insulating layers and sacrificial material layers over a substrate. Stepped surfaces are formed by patterning the alternating stack. Sacrificial pads are formed on physically exposed horizontal surfaces of the sacrificial material layers. A retro-stepped dielectric material portion is formed over the sacrificial pads. After memory stack structures extending through the alternating stack are formed, the sacrificial material layers and the sacrificial pads can be replaced with replacement material portions that include electrically conductive layers. The electrically conductive layers can be formed with thicker end portions. Contact via structures can be formed on the thicker end portions.
1. A three-dimensional memory device, comprising:
an alternating stack of insulating layers and electrically conductive layers located over a substrate;
memory stack structures extending through the alternating stack, wherein each of the memory stack structures comprises a memory film and a vertical semiconductor channel;
a staircase region including stepped surfaces of the alternating stack, wherein the electrically conductive layers have lateral extents that decrease with a vertical distance from the substrate within the staircase region; and
dielectric pillar structures having different heights, located in the staircase region, and extending through a respective subset of layers within the alternating stack
wherein at least one of the electrically conductive layers has a first thickness in a first area that underlies an overlying one of the insulating layers of the alternating stack, a second thickness in a distal segment of a second area that laterally protrudes farther than the overlying one of the insulating layers of the alternating stack, and a third thickness in a proximal segment of the second area located between the distal segment of the second area and the first area, wherein the second thickness is greater than the first thickness, and the third thickness is different from the second thickness; and
wherein the at least one of the electrically conductive layers has a planar bottom surface located within a first horizontal plane within the first area and within the distal segment of the second area, and has an elevated bottom surface within a second horizontal plane that is located above the first horizontal plane within the proximal segment of the second area.
2. The three-dimensional memory device of claim 1 , wherein the elevated bottom surface overlies a top surface of one of the dielectric pillar structures.
3. A three-dimensional memory device of, comprising:
an alternating stack of insulating layers and electrically conductive layers located over a substrate;
memory stack structures extending through the alternating stack, wherein each of the memory stack structures comprises a memory film and a vertical semiconductor channel; and
a staircase region including stepped surfaces of the alternating stack, wherein the electrically conductive layers have lateral extents that decrease with a vertical distance from the substrate within the staircase region;
wherein at least one of the electrically conductive layers has a first thickness in a first area that underlies an overlying one of the insulating layers of the alternating stack, a second thickness in a distal segment of a second area that laterally protrudes farther than the overlying one of the insulating layers of the alternating stack, and a third thickness in a proximal segment of the second area located between the distal segment of the second area and the first area, wherein the second thickness is greater than the first thickness, and the third thickness is different from the second thickness; and
wherein each insulating layer that underlies a respective electrically conductive layer within the alternating stack is laterally recessed relative to a sidewall of the respective electrically conductive layer toward a memory array region in which the memory stack structures are located.
4. A method of forming a three-dimensional memory device, comprising:
forming an alternating stack of insulating layers and sacrificial material layers over a substrate;
forming dielectric pillar structures through the alternating stack;
forming stepped surfaces by patterning the alternating stack in a staircase region, wherein the sacrificial material layers have lateral extents that decrease with a vertical distance from the substrate in the staircase region;
vertically recessing top surfaces of the dielectric pillar structures below the stepped surfaces to form recess cavities;
forming sacrificial pads by depositing a sacrificial pad material in the recess cavities and over the stepped surfaces;
forming a retro-stepped dielectric material portion over the sacrificial pads;
forming memory stack structures extending through the alternating stack, wherein each of the memory stack structures comprises a memory film and a vertical semiconductor channel; and
replacing the sacrificial material layers and the sacrificial pads with replacement material portions that comprise electrically conductive layers.
5. The method of claim 4 , wherein at least one of the electrically conductive layers is formed with a first thickness in a first area that underlies an overlying one of the insulating layers of the alternating stack, a second thickness in a distal segment of a second area that laterally protrudes farther than the overlying one of the insulating layers of the alternating stack, and a third thickness in a proximal segment of the second area located between the first area and the distal segment of the second area, wherein the second thickness is greater than the first thickness, and the third thickness is different from the second thickness.
6. The method of claim 4 , further comprising:
forming a conformal insulating material layer over the stepped surfaces of the alternating stack; and
anisotropically etching the conformal insulating material layer using an anisotropic etch process, wherein insulating spacers are formed on sidewalls of the insulating layers, and top surfaces of the dielectric pillar structures are recessed below horizontal surfaces within the stepped surfaces.
7. The method of claim 6 , wherein:
the insulating layers and the conformal insulating material layer comprise materials selected from undoped silicate glass, doped silicate glasses, or organosilicate glass; and
the anisotropic etch process etches materials of the insulating layers and the conformal insulating material layer selective to a material of the sacrificial material layers.
8. The method of claim 6 , further comprising:
anisotropically depositing the sacrificial pad material in the recess cavities, physically exposed horizontal surfaces of the sacrificial material layers, and on outer sidewalls of the insulating spacers; and
isotropically recessing the sacrificial pad material, wherein remaining portions of the sacrificial pad material constitute the sacrificial pads.
9. The method of claim 4 , further comprising forming contact via structures through the retro-stepped dielectric material portion and on a top surface of a respective one of the electrically conductive layers.
10. The method of claim 4 , further comprising laterally recessing sidewalls of the insulating layers while vertically recessing top surfaces of the dielectric pillar structures by performing an isotropic etch process that etches a material of the insulating layers selective to a material of the sacrificial material layers, wherein undercut regions are formed underneath end portions of the sacrificial material layers, and the sacrificial pads are formed over the end portions of the sacrificial material layers.
11. The method of claim 10 , further comprising:
anisotropically depositing the sacrificial pad material in the recess cavities, physically exposed horizontal surfaces of the sacrificial material layers, and on sidewalls of the sacrificial material layers without depositing the sacrificial pad material in the undercut regions; and
isotropically recessing the sacrificial pad material, wherein remaining portions of the sacrificial pad material constitute the sacrificial pads.
12. The method of claim 4 , further comprising:
forming a backside trench through the alternating stack after formation of the memory stack structures;
forming backside recesses by removing the sacrificial material layers and the sacrificial pads selective to the insulating layers, wherein the replacement material portions are formed in the backside recesses.
13. The method of claim 12 , further comprising:
forming a backside blocking dielectric layer in the backside recesses on physically exposed portions of outer sidewalls of the memory stack structures; and
forming the electrically conductive layer in remaining volumes of the backside recesses after formation of the backside blocking dielectric layer.
14. The method of claim 13 , wherein the backside blocking dielectric layer is formed directly on top surfaces of the dielectric pillar structures.
15. The method of claim 14 , wherein the backside blocking dielectric layer is formed on physically exposed portions of sidewalls of the dielectric pillar structures and on top surfaces of the dielectric pillar structures.