Source material for electronic device applications
Various embodiments include methods and apparatuses comprising methods for formation of and apparatuses including a source material for electronic devices. One such apparatus includes a vertical string of memory cells comprising a plurality of alternating levels of conductor and dielectric material, a semiconductor material extending through the plurality of alternating levels of conductor material and dielectric material, and a source material coupled to the semiconductor material. The source material includes a titanium nitride layer and a source polysilicon layer in direct contact with the titanium nitride layer. Other methods and apparatuses are disclosed.
1. An apparatus, comprising:
multiple levels of alternating conductor material and dielectric material, with memory cells formed at least partially within the alternating levels of conductor material;
semiconductor material extending vertically through the multiple alternating levels of conductor material and dielectric material and adjacent vertically spaced memory cells to provide a channel for vertically adjacent memory cells, forming a vertical string of memory cells;
a source including a titanium nitride material, and source polysilicon having a first side coupled directly to the semiconductor channel material, and having a second side opposite the first side that is directly coupled to the titanium nitride material.
2. The apparatus of claim 1 , wherein the titanium nitride material has a resistivity in the range of about 60 μOhm-cm to about 100 μOhm-cm.
3. The apparatus of claim 1 , wherein the titanium nitride material has a resistivity in the range of about 85 μOhm-cm to about 100 μOhm-cm.
4. The apparatus of claim 1 , wherein the titanium nitride material has a thickness range from about 100 Å to about 2000 Å.
5. The apparatus of claim 1 , wherein the source polysilicon material has a thickness range from about 100 Å to about 2000 Å.
6. The apparatus of claim 1 , wherein the titanium nitride material has a surface roughness range of about 0.4 nm to about 0.6 nm when measured at a spatial bandwidth of about 0.5 μm −1 to about 38.0 μm −1 .
7. The apparatus of claim 1 , wherein the titanium nitride material has a titanium-to-nitrogen ratio of approximately one-to-one.
8. The apparatus of claim 1 , wherein the titanium nitride material has a substantially cubic titanium nitride crystal structure with a {220} orientation.
9. The apparatus of claim 1 , wherein the titanium nitride material has a substantially cubic titanium nitride crystal structure with a {200} orientation.
10. The apparatus of claim 1 , wherein the titanium nitride material is a barrier for dopant migration from the source polysilicon.
11. A memory structure, comprising:
titanium nitride source material;
source polysilicon material extending above the titanium nitride source material, the source polysilicon material having a first side directly coupled to the titanium nitride source material, and having a second side opposite the first side; and
multiple strings of memory cells over the second side of the source polysilicon material, the string of memory cells having a semiconductor material forming a channel for the string of memory cells, the semiconductor channel material formed directly on the second side of the source polysilicon material.
12. The memory structure of claim 11 , wherein the titanium nitride material acts as a barrier for dopant migration from the source polysilicon material.
13. The memory structure of claim 11 , wherein the titanium nitride source material has a surface roughness range of about 0.4 nm to about 0.6 nm when measured at a spatial bandwidth of about 0.5 μm −1 to about 38.0 μm −1 .
14. The memory structure claim 11 , wherein the titanium nitride source material has a titanium-to-nitrogen ratio of approximately one-to-one.
15. The memory structure of claim 11 , wherein the titanium nitride source material has a substantially cubic titanium nitride crystal structure with a {220} orientation.
16. The memory structure of claim 11 , wherein the titanium nitride source material has a substantially cubic titanium nitride crystal structure with a {200} orientation.
17. The memory structure of claim 11 , wherein the source polysilicon material provides a dopant reservoir for the semiconductor channel material.
18. A memory device, comprising:
multiple levels of alternating conductor material and dielectric material extending above a source, with memory cells formed at least partially within the alternating levels of conductor material;
semiconductor material extending vertically through the multiple alternating levels of conductor material and dielectric material and adjacent vertically spaced memory cells to provide a channel for vertically adjacent memory cells, forming a vertical string of memory cells;
the source including a titanium nitride material and source polysilicon material, the source polysilicon material extending above the titanium nitride material and having a first side directly coupled to the titanium nitride material, the source polysilicon material having a second side opposite the first side and directly contacting the semiconductor channel material.
19. The memory device of claim 18 , wherein the source polysilicon is configured to serve as a dopant reservoir for the semiconductor channel material.