Magnetic random access memory structure and manufacturing method of the same
View Patent ↗The present disclosure provides a magnetic random access memory structure, including an array region, and a logic region adjacent to the array region. The logic region includes a bottom electrode via, a magnetic tunneling junction layer over the bottom electrode via, a top electrode over the MTJ, a conformable oxide layer over the MTJ and the top electrode, and a silicon oxide layer over the conformable oxide layer. The conformable oxide layer and the silicon oxide layer extend from the array region to the logic region.
1. A method for manufacturing a magnetic random access memory (MRAM) structure, the method comprising:
forming a magnetic tunneling junction (MTJ) structure in an array region;
forming a via etching stop layer over the MTJ structure in the array region and in a logic region adjacent to the array region;
removing the via etching stop layer in the logic region; and
forming a low-k dielectric layer in the array region and the logic region.
2. The method of claim 1 , further comprising:
forming a dielectric stack over the low-k dielectric layer in the array region and the logic region; and
performing an etch back operation and stopping the etch at the dielectric stack in the array region and the logic region.
3. The method of claim 2 , wherein the etch back operation stops at a first etch stop layer of the dielectric stack contacting the low-k dielectric layer.
4. The method of claim 3 , further comprising:
performing a planarization operation over the logic region and the array region, thereby exposing the low-k dielectric layer in the array region; and
stopping the planarization operation at the dielectric stack in the logic region.
5. The method of claim 4 , wherein the planarization operation stops at a second etch stop layer above the first etch stop layer of the dielectric stack.
6. The method of claim 2 , further comprising forming a spacer surrounding the MTJ structure, wherein a portion of an outer sidewall of the spacer is free from a coverage of the via etching stop layer.
7. The method of claim 6 , wherein the dielectric stack is above the spacer.
8. A method for manufacturing a magnetic random access memory (MRAM) structure, the method comprising:
forming a magnetic tunneling junction (MTJ) structure in an array region;
forming a low-k dielectric layer over the array region;
forming a dielectric stack over the low-k dielectric layer in the array region;
performing a planarization operation until the low-k dielectric layer and the dielectric stack are exposed; and
forming a via trench over the MTJ structure.
9. The method of claim 8 , wherein the via trench in the array region reaches a top surface of a top electrode over the MTJ structure.
10. The method of claim 8 , further comprising forming a via etching stop layer over the MTJ structure in the array region.
11. The method of claim 10 , further comprising forming a conformable oxide layer in the array region prior to forming the low-k dielectric layer.
12. The method of claim 11 , wherein forming the via trenches in the array region comprises removing a portion of the conformable oxide layer and a portion of the via etching stop layer.
13. A method for manufacturing a magnetic random access memory (MRAM) structure, the method comprising:
forming a magnetic tunneling junction (MTJ) structure in an array region;
forming a dielectric stack over the array region and a logic region adjacent to the array region, wherein forming the dielectric stack comprises:
forming a first etch stop layer; and
forming a second etch stop layer over the first etch stop layer, wherein the second etch stop layer is different from the first etch stop layer;
performing an etch back operation and stopping the etch at the first etch stop layer in the array region while preserving the second etch stop layer in the logic region.
14. The method of claim 13 , further comprising:
forming a spacer over the MTJ structure;
forming a via etching stop layer over the spacer; and
forming a conformable oxide layer over the protection layer and the array region.
15. The method of claim 14 , further comprising performing a planarization operation from above the MTJ structure.
16. The method of claim 15 , further comprising forming a via trench over the MTJ structure after the planarization operation.
17. The method of claim 16 , wherein forming the via trench comprises removing a portion of the conformable oxide layer, a portion of the via etching stop layer, and a portion of the spacer.
18. The method of claim 13 , wherein the first etch stop layer comprises oxide.
19. The method of claim 13 , wherein the second etch stop layer comprises oxynitrides.
20. The method of claim 8 , further comprising forming the dielectric stack in a logic region adjacent to the array region, and the dielectric stack is exposed in the logic region while the low-k dielectric layer is exposed in the array region after performing the planarization operation.