IP Library Granted Patent US 11,031,394
Granted Patent B1
US 11,031,394 · App. 17/169,511 · Granted Jun 8, 2021

3D semiconductor device and structure

Inventors: Zvi Or-Bach (Haifa, IL); Brian Cronquist (Klamath Falls, OR)
Assignee: MONOLITHIC 3D INC.
H01L27/0886H01L21/8221H01L27/0688H01L27/11898
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Quick Facts
Patent No.
US 11,031,394
App. No.
17/169,511
Granted
Jun 8, 2021
Kind
B1
Abstract

A 3D semiconductor device including: a first level, which includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; a plurality of connection paths, where the paths provide connections from a plurality of the first transistors to a plurality of second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions and metal to metal bond regions, where the second level includes at least one memory array, and where the third layer includes crystalline silicon; and a heat removal path from the first layer or the third layer to an external surface of the device.

Claims (94)

1. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array,

wherein said first level comprises a first die area,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree,

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree, and

wherein said third layer comprises crystalline silicon.

2. The device according to claim 1 ,

wherein said second level comprises at least one PLL circuit.

3. The device according to claim 1 ,

wherein said second level comprises at least one SerDes circuit.

4. The device according to claim 1 , further comprising:

a heat removal path from said third level to an external surface of said device.

5. The device according to claim 1 ,

wherein said second level comprises a second die area,

wherein said first die area is clearly larger than said second die area.

6. The device according to claim 1 ,

wherein said first level comprises at least one control circuit, and

wherein said control circuit controls read operations of said at least one memory array.

7. The device according to claim 1 ,

wherein at least one of said second transistors is a FinFET type transistor.

8. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections;

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array, and

wherein said third layer comprises crystalline silicon; and

a heat removal path from said first layer or said third layer to an external surface of said device.

9. The device according to claim 8 ,

wherein said second level comprises at least one PLL circuit.

10. The device according to claim 8 ,

wherein said second level comprises at least one SerDes circuit.

11. The device according to claim 8 ,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area, and

wherein said first die area is clearly larger than said second die area.

12. The device according to claim 8 ,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

13. The device according to claim 8 ,

wherein said first level comprises at least one control circuit, and

wherein said control circuit controls read operations of said memory array.

14. The device according to claim 8 ,

wherein at least one of said second transistors is a FinFET type transistor.

15. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array,

wherein said third layer comprises crystalline silicon, and

wherein said second level comprises at least one Phase Lock Loop (PLL) circuit.

16. The device according to claim 15 , further comprising:

a heat removal path from said third level to an external surface of said device.

17. The device according to claim 15 ,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area,

wherein said first die area is clearly larger than said second die area.

18. The device according to claim 15 ,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

19. The device according to claim 15 ,

wherein said first level comprises at least one control circuit, and

wherein said control circuit controls read operations of said memory array.

20. The device according to claim 15 ,

wherein at least one of said second transistors is a FinFET type transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 7, 2021
From: OR-BACH, ZVI; CRONQUIST, BRIAN
To: MONOLITHIC 3D INC.
Reel/Frame 055173/0708 →
Continuity (13)
Continuation In Part 17064504 · Oct 6, 2020
Continuation In Part 16846298 · Apr 11, 2020
Continuation In Part 16252825 · Jan 21, 2019
Continuation In Part 15990626 · May 26, 2018
Continuation In Part 15477106 · Apr 2, 2017
Continuation In Part 14642724 · Mar 9, 2015
Continuation In Part 15482787 · Apr 9, 2017
Continuation In Part 14607077 · Jan 28, 2015
Continuation In Part 14628231 · Feb 21, 2015
Provisional Application 62042229 · Aug 26, 2014
Provisional Application 62035565 · Aug 11, 2014
Provisional Application 62022498 · Jul 9, 2014
Provisional Application 61932617 · Jan 28, 2014
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