Semiconductor device, electronic module and electronic apparatus each having stacked embedded active components in a multilayer wiring board
To provide a semiconductor device further reduced in size. A semiconductor device including: a multilayer wiring board one surface of which is provided with an external connection terminal; and a plurality of active components that are provided to be stacked inside the multilayer wiring board and are connected to the external connection terminal via a connection via. The plurality of active components include a first active component provided on another surface side that is opposite to the one surface, and a second active component that is provided closer to the one surface than the first active component is and has a smaller planar area than the first active component.
1. A semiconductor device comprising:
a multilayer wiring board, wherein an external connection terminal is provided on a first surface of the multilayer wiring board; and
a plurality of active components that are stacked inside the multilayer wiring board and are connected to the external connection terminal via a connection via,
wherein the plurality of active components include a first active component and a second active component,
wherein the first active component is bonded to a first interlayer insulating film via a first bonding layer,
wherein the connection via penetrates at least one interlayer insulating film and is provided completely in a projection region of the first active component, and
wherein at least one or more of the plurality of active components is a processor.
2. The semiconductor device according to claim 1 , wherein metal wiring is provided between the first active component and the second active component, and wherein the metal wiring electromagnetically shields the first active component and the second active component from each other.
3. The semiconductor device according to claim 2 , wherein the metal wiring is embedded in one or more interlayer insulating films.
4. The semiconductor device according to claim 1 , wherein the at least one or more of the plurality of active components that is the processor performs an active operation comprising at least one of: amplification or rectification of supplied electric power.
5. The semiconductor device according to claim 1 , wherein the at least one or more of the plurality of active components that is the processor comprises a micro processing unit (MPU).
6. The semiconductor device according to claim 1 , wherein the at least one or more of the plurality of active components that is the processor comprises a power management integrated circuit (PMIC).
7. The semiconductor device according to claim 1 , wherein the at least one or more of the plurality of active components that is the processor comprises an authentication chip.
8. The semiconductor device according to claim 1 , wherein the at least one or more of the plurality of active components that is the processor comprises synchronized dynamic random-access memory (SDRAM).
9. The semiconductor device according to claim 1 , wherein the external connection terminal comprises a Copper (Cu) core solder ball.
10. The semiconductor device according to claim 1 , wherein the external connection terminal comprises a Copper (Cu) pillar bump.
11. The semiconductor device according to claim 1 , wherein the external connection terminal comprises an electrode terminal.
12. The semiconductor device according to claim 1 , wherein the second active component is bonded to a second interlayer insulating film via a second bonding layer.
13. The semiconductor device according to claim 1 , wherein an electrode pad is between the external connection terminal and the connection via.
14. The semiconductor device according to claim 1 , further comprising:
a first electrode that performs input/output to the first active component.
15. The semiconductor device according to claim 14 , further comprising:
a second electrode that performs input/output to the second active component.
16. An electronic module comprising:
a semiconductor device including:
a multilayer wiring board, wherein an external connection terminal is provided on a first surface of the multilayer wiring board; and
a plurality of active components that are stacked inside the multilayer wiring board and are connected to the external connection terminal via a connection via,
wherein the plurality of active components include a first active component and a second active component,
wherein the first active component is bonded to a first interlayer insulating film via a first bonding layer,
wherein the connection via penetrates at least one interlayer insulating film and is provided completely in a projection region of the first active component, and
wherein at least one or more of the plurality of active components is a processor.
17. The electronic module according to claim 16 , wherein a bump terminal is further provided, and wherein an electronic component is provided on the bump terminal.
18. The electronic module according to claim 17 , further comprising:
a sealing material layer that seals the electronic component.
19. An electronic apparatus comprising:
a semiconductor device including:
a multilayer wiring board, wherein an external connection terminal is provided on a first surface of the multilayer wiring board; and
a plurality of active components that are stacked inside the multilayer wiring board and are connected to the external connection terminal via a connection via,
wherein the plurality of active components include a first active component and a second active component,
wherein the first active component is bonded to a first interlayer insulating film via a first bonding layer,
wherein the connection via penetrates at least one interlayer insulating film and is provided completely in a projection region of the first active component, and
wherein at least one or more of the plurality of active components is a processor.