Microelectronic assemblies
View Patent ↗Various embodiments of fanout packages are disclosed. A method of forming a microelectronic assembly is disclosed. The method can include bonding a first surface of at least one microelectronic substrate to a surface of a carrier using a direct bonding technique without an intervening adhesive, the microelectronic substrate having a plurality of conductive interconnections on at least one surface of the microelectronic substrate. The method can include applying a molding material to an area of the surface of the carrier surrounding the microelectronic substrate to form a reconstituted substrate. The method can include processing the microelectronic substrate. The method can include singulating the reconstituted substrate at the area of the surface of the carrier and at the molding material to form the microelectronic assembly.
1. A method of forming a microelectronic structure, comprising:
bonding a first surface of a microelectronic substrate to a carrier using a direct bonding technique such that a non-conductive field region of the first surface is directly bonded to the carrier without an intervening adhesive;
applying an insulating material laterally adjacent the microelectronic substrate to at least partially form a reconstituted substrate, the insulating material comprising silicon oxide;
after applying the insulating material, thinning the microelectronic substrate from a second surface of the microelectronic substrate opposite the first surface to form a thinned microelectronic substrate having a post-thinning surface opposite the first surface;
removing the carrier from the thinned microelectronic substrate; and
singulating the reconstituted substrate through the insulating material to form the microelectronic structure.
2. The method of claim 1 , wherein bonding the first surface of the microelectronic substrate to the carrier comprises bonding a known good die (KGD) to the carrier.
3. The method of claim 1 , further comprising exposing a plurality of conductive interconnections at a surface of the thinned microelectronic substrate.
4. The method of claim 1 , wherein bonding the first surface of the microelectronic substrate to the carrier comprises bonding an active side of the microelectronic substrate to the carrier.
5. The method of claim 1 , further comprising:
forming an interconnection layer over the at least partially formed reconstituted substrate including over the post-thinning surface of the thinned microelectronic substrate.
6. The method of claim 5 , further comprising hybrid bonding a second microelectronic substrate to the interconnection layer without an intervening adhesive.
7. The method of claim 6 , further comprising applying a second insulating material over the interconnection layer laterally adjacent the second microelectronic substrate.
8. The method of claim 7 , wherein singulating the reconstituted substrate comprises singulating through the second insulating material.
9. The method of claim 1 , wherein the thinned microelectronic substrate comprises through substrate vias.
10. The method of claim 1 , wherein bonding the first surface of the microelectronic substrate to the carrier comprises bonding a first integrated device die to the carrier, the method further comprising bonding a second integrated device die to the carrier without an intervening adhesive.
11. The method of claim 10 , wherein applying the insulating material comprises applying the insulating material between the first integrated device die and the second integrated device die.
12. The method of claim 4 , further comprising, after removing the carrier, electrically connecting the active side of the thinned microelectronic substrate to a packaging structure.
13. A method of forming a microelectronic structure, comprising:
directly bonding a first surface of an element to a carrier such that a non-conductive field region of the first surface is directly bonded to the carrier without an intervening adhesive;
applying an insulating material over a second surface of the element and along a side edge of the element;
after applying the insulating material, thinning the element from the second surface of the element to form a thinned element having a post-thinning surface opposite the first surface;
after the thinning, providing an interconnection layer over the insulating material and the post-thinning surface of the thinned element;
removing the carrier from the thinned element; and
singulating through the interconnection layer and the insulating material to form the microelectronic structure.
14. The method of claim 13 , further comprising exposing a plurality of conductive interconnections at a surface of the thinned element.
15. The method of claim 13 , wherein bonding the first surface of the element to the carrier comprises bonding an active side of the element to the carrier.
16. The method of claim 13 , further comprising hybrid bonding a second element to the interconnection layer without an intervening adhesive.
17. The method of claim 16 , further comprising applying a second insulating material over the interconnection layer laterally adjacent the second element.
18. The method of claim 17 , wherein singulating comprises singulating through the second insulating material.
19. The method of claim 13 , wherein directly bonding the first surface of the element to the carrier comprises directly bonding a known good die (KGD) to the carrier.
20. The method of claim 15 , further comprising, after removing the carrier, electrically connecting the active side of the thinned element to a packaging structure.
21. A method of forming a microelectronic structure, comprising:
attaching a first surface of an element to a carrier;
applying an insulating material over a second surface of the element and adjacent a side edge of the element;
after applying the insulating material, thinning the element from the second surface of the element to form a thinned element having a post-thinning surface opposite the first surface;
after the thinning, providing an interconnection layer over the insulating material and the post-thinning surface of the thinned element;
hybrid bonding a second element to the interconnection layer without an intervening adhesive;
removing the carrier from the thinned element; and
singulating through the interconnection layer and the insulating material to form the microelectronic structure.
22. The method of claim 21 , wherein attaching the first surface of the element to the carrier comprises directly bonding the first surface of the element to the carrier such that a non-conductive field region of the first surface is directly bonded to the carrier without an intervening adhesive.
23. The method of claim 21 , wherein attaching the first surface of the element to the carrier comprises bonding an active side of the element to the carrier.
24. The method of claim 21 , further comprising applying a second insulating material over the interconnection layer laterally adjacent the second element.
25. The method of claim 24 , wherein singulating comprises singulating through the second insulating material.
26. The method of claim 21 , wherein attaching the first surface of the element to the carrier comprises attaching a known good die (KGD) to the carrier.