Power wall integration for multiple stacked devices
A first transistor tier is formed over a substrate, positioned in a first tier of the semiconductor device and includes bottom transistors extending along a horizontal direction parallel to the substrate. A first segment of a first conductive plane is formed in the first tier and adjacent to a first side of the first transistor tier, spans a height of the first transistor tier, and is connected to the first transistor tier. A second transistor tier is formed over the first transistor tier, positioned in a second tier of the semiconductor device and includes top transistors extending along the horizontal direction. A second segment of the first conductive plane is formed in the second tier and adjacent to a first side of the second transistor tier, positioned over and connected to the first segment of the first conductive plane, and spans a height of the second transistor tier.
1. A semiconductor device, comprising:
a first transistor tier over a substrate, the first transistor tier being positioned in a first tier of the semiconductor device and including bottom transistors that are arranged along a horizontal direction parallel to the substrate, a first bottom transistor of the bottom transistors including a first bottom source/drain (S/D) region, a first bottom gate structure, and a second bottom S/D region that are arranged along the horizontal direction;
a first segment of a first conductive plane adjacent to a first side of the first transistor tier, the first segment of the first conductive plane being positioned over the substrate and disposed in the first tier, spanning a height of the first transistor tier, and connected to one of the first bottom S/D region and the second bottom S/D region of the first bottom transistor of the bottom transistors;
a second transistor tier over the first transistor tier, the second transistor tier being disposed in a second tier of the semiconductor device and including top transistors that are arranged along the horizontal direction, a first top transistor of the top transistors including a first top S/D region, a first top gate structure, and a second top S/D region that are arranged along the horizontal direction and; and
a second segment of the first conductive plane adjacent to a first side of the second transistor tier and in the second tier, the second segment of the first conductive plane being positioned over and connected to the first segment of the first conductive plane, and spanning a height of the second transistor tier.
2. The semiconductor device of claim 1 , further comprising:
a first segment of a second conductive plane positioned in the first tier and adjacent to a second side of the first transistor tier that is opposite to the first side of the first transistor tier, the first segment of the second conductive plane spanning the height of the first transistor tier; and
a second segment of the second conductive plane in the second tier and adjacent to a second side of the second transistor tier that is opposite to the first side of the second transistor tier, the second segment of the second conductive plane being positioned over the first segment of the second conductive plane, spanning the height of the second transistor tier, and connected to one of the first top S/D region and the second top S/D region of the first top transistor of the top transistors, wherein:
the first transistor tier and the second transistor tier are arranged between the first conductive plane and the second conductive plane.
3. The semiconductor device of claim 2 , further comprising:
a first bottom S/D local interconnect that is connected to the first bottom S/D region of the first bottom transistor of the bottom transistors, and
a second bottom S/D local interconnect that is connected to the second bottom S/D region of the first bottom transistor of the bottom transistors, wherein:
one of the first bottom S/D local interconnect and the second bottom S/D local interconnect is in contact with the first segment of the first conductive plane so that the first segment of the first conductive plane is connected to the one of the first bottom S/D region and the second bottom S/D region of the first bottom transistor through the one of the first bottom S/D local interconnect and the second bottom S/D local interconnect.
4. The semiconductor device of claim 3 , further comprising:
a first top S/D local interconnect that is connected to the first top S/D region of the first top transistor of the top transistors; and
a second top S/D local interconnect that is connected to the second top S/D region of the first top transistor of the top transistors, wherein:
one of the first top S/D local interconnect and the second top S/D local interconnect is in contact with the second segment of the second conductive plane so that the second segment of the second conductive plane is connected to the one of the first top S/D region and the second top S/D region of the first top transistor through the one of the first top S/D local interconnect and the second top S/D local interconnect.
5. The semiconductor device of claim 4 , wherein:
the first conductive plane has a continuous profile that extends along the first side of the first transistor tier and the first side of the second transistor tier, and
the second conductive plane has a continuous profile that extends along the second side of the first transistor tier and the second side of the second transistor tier.
6. The semiconductor device of claim 4 , wherein:
the first conductive plane has a discontinuous profile in that the first conductive plane is positioned at the first side of the first transistor tier and the first side of the second transistor tier and disposed between gate structures of the first transistor tier and the second transistor tier, and
the second conductive plane has a discontinuous profile in that the second conductive plane is positioned at the second side of the first transistor tier and the second side of the second transistor tier and disposed between the gate structures of the first transistor tier and the second transistor tier.