Acoustic wave filter
An acoustic wave filter includes acoustic wave resonators including a piezoelectric substrate and an IDT electrode including first and second electrode fingers. An intersecting region of the first and second electrode fingers includes a central region and first and second edge regions on outer side portions of the central region. An acoustic velocity in the first and second edge regions is lower than that in the central region, and the acoustic wave resonators include a first acoustic wave resonator with a width in the first and second edge regions larger than a width in the central region, and a second acoustic wave resonator including at least one of an acoustic velocity reducing film and an acoustic velocity increasing film in the central region, such that an acoustic velocity in the first and second edge regions is lower than acoustic velocity in the center region.
1. An acoustic wave filter, comprising:
a plurality of acoustic wave resonators including a piezoelectric substrate, and an IDT electrode on the piezoelectric substrate and including first and second electrode fingers interdigitated with each other; wherein
a region in which the first electrode fingers and the second electrode fingers overlap each other in an acoustic wave propagation direction is defined as an intersecting region;
the intersecting region includes a central region at a center or approximate center in a direction in which the first and second electrode fingers extend and first and second edge regions on respective outer side portions of the central region in a direction in which the first and second electrode fingers extend, and an acoustic velocity in the first and second edge regions is lower than an acoustic velocity in the central region; and
the plurality of acoustic wave resonators include:
a first acoustic wave resonator in which at least one of a width of the first electrode fingers and a width of the second electrode fingers in the first and second edge regions is larger than at least one of a width of the first electrode fingers and a width of the second electrode fingers in the central region; and
a second acoustic wave resonator including at least one of a configuration in which an acoustic velocity reducing film is laminated in the first and second edge regions and a configuration in which an acoustic velocity increasing film to increase the acoustic velocity is laminated in the central region.
2. An acoustic wave filter, comprising
a plurality of acoustic wave resonators including a piezoelectric substrate and an IDT electrode on the piezoelectric substrate and including first and second electrode fingers interdigitated with each other; wherein
a region in which the first electrode fingers and the second electrode fingers overlap each other in an acoustic wave propagation direction is defined as an intersecting region;
the intersecting region includes a central region at a center or approximate center in a direction in which the first and second electrode fingers extend and first and second edge regions on respective outer side portions of the central region in a direction in which the first and second electrode fingers extend, and an acoustic velocity in the first and second edge regions is lower than an acoustic velocity in the central region; and
the plurality of acoustic wave resonators include:
a first acoustic wave resonator in which at least one of a width of the first electrode fingers and a width of the second electrode fingers in the first and second edge regions is larger than at least one of a width of the first electrode fingers and a width of the second electrode fingers in the central region; and
a second acoustic wave resonator including at least one of a configuration in which an insulating film made of tantalum pentoxide, hafnium oxide, niobium pentoxide, tungsten oxide, and silicon oxide, or Al, Cu, Pt, Au, Ag, Ti, Ni, Cr, Mo, W, Ta, Mg, Fe, or Ru or alloy mainly including Al, Cu, Pt, Au, Ag, Ti, Ni, Cr, Mo, W, Ta, Mg, Fe, or Ru is laminated in the first and second edge regions and a configuration in which a film made of aluminum oxide, aluminum nitride, silicon nitride, or silicon oxide is laminated in the central region.
3. The acoustic wave filter according to claim 1 , wherein a duty in the central region of the IDT electrode in the second acoustic wave resonator is larger than a duty in the central region of the IDT electrode in the first acoustic wave resonator.
4. The acoustic wave filter according to claim 1 , wherein the plurality of acoustic wave resonators include a series arm resonator and a parallel arm resonator.
5. The acoustic wave filter according to claim 4 , wherein the series arm resonator includes a plurality of series arm resonators, and the parallel arm resonator includes a plurality of parallel arm resonators.
6. The acoustic wave filter according to claim 5 , wherein the acoustic wave filter is a ladder filter.
7. The acoustic wave filter according to claim 6 , wherein of a plurality of the series arm resonators having an anti-resonant frequency higher than a center frequency of a pass band of the ladder filter, a series arm resonator having a lowest anti-resonant frequency is the first acoustic wave resonator.
8. The acoustic wave filter according to claim 6 , wherein of a plurality of the parallel arm resonators having a resonant frequency lower than a center frequency of a pass band of the ladder filter, a parallel arm resonator having the highest resonant frequency is the first acoustic wave resonator.
9. The acoustic wave filter according to claim 5 , further comprising:
a common terminal; wherein
of a plurality of the series arm resonators, a series arm resonator closest to the common terminal is the first acoustic wave resonator.
10. The acoustic wave filter according to claim 1 , wherein
the acoustic wave filter is a transmission filter including an antenna terminal and a transmission terminal; and
of the plurality of acoustic wave resonators, an acoustic wave resonator farthest from the antenna terminal is the first acoustic wave resonator.
11. The acoustic wave filter according to claim 1 , wherein
the acoustic wave filter is a reception filter including an antenna terminal and a reception terminal; and
of the plurality of acoustic wave resonators, an acoustic wave resonator farthest from the antenna terminal is the first acoustic wave resonator.
12. The acoustic wave filter according to claim 1 , wherein the plurality of acoustic wave resonators further include an acoustic wave resonator having a structure different from that of the first acoustic wave resonator and the second acoustic wave resonator.
13. The acoustic wave filter according to claim 4 , further comprising a longitudinally coupled resonator acoustic wave filter electrically connected to the series arm resonator or the parallel arm resonator.
14. The acoustic wave filter according to claim 1 , wherein the first acoustic wave resonator and the second acoustic wave resonator are provided on one piezoelectric substrate.
15. The acoustic wave filter according to claim 1 , wherein
the piezoelectric substrate includes a high acoustic velocity material layer and a piezoelectric film directly or indirectly laminated on the high acoustic velocity material layer; and
the high acoustic velocity material layer is made of a high acoustic velocity material in which an acoustic velocity of a bulk wave propagating therethrough is higher than acoustic velocity of an acoustic wave propagating through the piezoelectric film.
16. The acoustic wave filter according to claim 15 , wherein
a low acoustic velocity film is laminated between the high acoustic velocity material layer and the piezoelectric film; and
an acoustic velocity of a bulk wave propagating through the low acoustic velocity film is lower than acoustic velocity of a bulk wave propagating through the piezoelectric film.
17. The acoustic wave filter according to claim 15 , wherein a support substrate is laminated on a side of the high acoustic velocity material layer opposite to the piezoelectric film.
18. The acoustic wave filter according to claim 15 , wherein the high acoustic velocity material layer is a support substrate made of a high acoustic velocity material.