Memory device and method for forming thereof
View Patent ↗A semiconductor device includes a first memory cell and a dummy region adjacent to the first memory cell. The first memory cell includes a first transistor. The dummy region includes a cut-off transistor. The cut-off transistor has a first terminal electrically coupled to a second terminal of the first transistor. The cut-off transistor has a third terminal electrically coupled to ground.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a first memory cell, the first memory cell comprising a first transistor; and
forming a cut-off transistor in a dummy region, wherein the cut-off transistor comprises a first terminal electrically coupled to a second terminal of the first transistor, and wherein the cut-off transistor comprises a third terminal electrically coupled to ground;
electrically coupling a word line to the first memory cell; and
electrically coupling a control line to a gate of the cut-off transistor, wherein the control line is separate from the word line.
2. The method of claim 1 , further comprising electrically coupling a word line to the first memory cell and electrically coupling a gate of the cut-off transistor to the word line.
3. The method of claim 1 , wherein the forming the cut-off transistor comprises forming a two-fin FinFET.
4. The method of claim 1 , forming the dummy region to a width of three dummy gate pitches.
5. The method of claim 1 , wherein forming the dummy region comprises forming a first gate electrode and forming a second gate electrode, the first gate electrode being between the second gate electrode and the first memory cell, and wherein a portion of the first gate electrode is part of the cut-off transistor.
6. The method of claim 1 , wherein forming the dummy region comprises forming a first gate electrode and forming a second gate electrode, the first gate electrode being between the second gate electrode and the first memory cell, and wherein a portion of the second gate electrode is part of the cut-off transistor.
7. A method of manufacturing a semiconductor device, the method comprising:
forming a plurality of memory cells in a memory region, wherein a first memory cell of the plurality of memory cells comprises a first pull-down (PD) transistor and a second PD transistor, wherein the memory region has an outer periphery when viewed in a top-down view, and further wherein all transistors of the first memory cell are within the outer periphery of the memory region when viewed in the top-down view; and
forming a first cut-off transistor in a dummy region, the dummy region being adjacent to the memory region and outside the outer periphery of the memory region, the first cut-off transistor having a first terminal and a second terminal, wherein the first terminal is electrically coupled to a third terminal of the first PD transistor, and wherein the second terminal is electrically coupled to a first node of a power supply voltage.
8. The method of claim 7 , further comprising electrically coupling the first terminal of the first cut-off transistor to a fourth terminal of the second PD transistor.
9. The method of claim 8 , further comprising electrically coupling a fifth terminal of a third PD transistor of a second memory cell of the plurality of memory cells and a sixth terminal of a fourth PD transistor of the second memory cell of the plurality of memory cells to the first terminal of the first cut-off transistor.
10. The method of claim 7 , further comprising:
forming a first fin; and
forming a second fin, wherein the first fin and the second fin extend across an interface of the memory region with the dummy region, the second fin being separate from the first fin, wherein the first cut-off transistor comprises a first portion of the first fin and a second portion of the second fin.
11. The method of claim 10 , wherein the first PD transistor comprises a third portion of the first fin and a fourth portion of the second fin.
12. The method of claim 11 , further comprising:
electrically coupling a sixth terminal of the second PD transistor to the third terminal; and
electrically coupling a fifth terminal of a second cut-off transistor in the dummy region to a second node of the power supply voltage.
13. The method of claim 12 , further comprising:
forming a third fin; and
forming a fourth fin, wherein the third fin and the fourth fin extend across the interface between the memory region with the dummy region, the third fin being separate from the first fin and the second fin, the fourth fin being separate from the first fin, the second fin, and the third fin, wherein the second cut-off transistor comprises a fifth portion of the third fin and a sixth portion of the fourth fin.
14. The method of claim 13 , wherein the second PD transistor comprises a seventh portion of the third fin and an eighth portion of the fourth fin.
15. A method of forming a memory device, the method comprising:
forming a dummy region comprising a first cut-off transistor and a second cut-off transistor, wherein the first cut-off transistor is formed in a first portion of a first fin; and
forming a memory region adjacent to the dummy region, wherein the forming the memory region comprises:
forming a first memory cell comprising a first pull-down (PD) transistor and a first pass transistor, wherein the first PD transistor is formed in a second portion of the first fin and the first pass transistor is formed in a third portion of the first fin; and
forming a second memory cell comprising a second PD transistor and a second pass transistor.
16. The method claim 15 , wherein the forming the first memory cell and the forming the second memory cell forms separate memory cells.
17. The method of claim 15 , wherein the forming the first memory cell and the forming the second memory cell forms a same memory cell.
18. The method of claim 15 , further comprising:
coupling a word line to a seventh terminal of the first cut-off transistor; and
coupling an eighth terminal of the second cut-off transistor to the word line.
19. The method of claim 15 , further comprising:
coupling a word line to the first memory cell and the second memory cell;
coupling a seventh terminal of the first cut-off transistor to a control line; and
coupling an eighth terminal of the second cut-off transistor to the control line, wherein the control line is separate from the word line.