Liquid chemical, method for producing liquid chemical, and method for analyzing test target solution
An object is to provide a liquid chemical exhibiting excellent defect inhibitive performance even in a case of being applied to a resist process by KrF excimer laser exposure and ArF excimer laser exposure. Another object is to provide a method for analyzing a test target solution and a method for producing a liquid chemical. A liquid chemical includes an organic solvent; and metal-containing particles containing a metal atom and having a particle size of 10 to 100 nm, in which the number of the metal-containing particles contained is 1.0×10 −2 to 1.0×10 12 particles/cm 3 .
1. A liquid chemical comprising:
an organic solvent;
metal-containing particles containing a metal atom and having a particle size of 10 to 100 nm, and
an organic compound having a boiling point of 300° C. or higher,
wherein the number of the metal-containing particles contained is 1.0×10 8 to 1.0×10 11 particles/cm 3 , and
the organic solvent is at least one selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether (PGME), propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate (PGMEA), ethyl lactate (EL), methyl methoxypropionate, cyclopentanone, cyclohexanone (CHN), γ-butyrolactone, diisoamyl ether, butyl acetate (nBA), isoamyl acetate, dimethyl sulfoxide, N-methyl-2-pyrrolidone, ethylene carbonate, propylene carbonate (PC), sulfolane, cycloheptanone, decane, and 2-heptanone.
2. The liquid chemical according to claim 1 , which is used for manufacturing a semiconductor device.
3. The liquid chemical according to claim 2 ,
wherein the metal-containing particles consist of at least one selected from the group consisting of particles A consisting of a simple substance of the metal atom, particles B consisting of an oxide of the metal atom, and particles C consisting of a simple substance of the metal atom and an oxide of the metal atom.
4. The liquid chemical according to claim 1 ,
wherein the metal-containing particles consist of at least one selected from the group consisting of particles A consisting of a simple substance of the metal atom, particles B consisting of an oxide of the metal atom, and particles C consisting of a simple substance of the metal atom and an oxide of the metal atom.
5. The liquid chemical according to claim 4 ,
wherein the particles C have a simple substance of the metal atom and have an oxide of the metal atom which is disposed to cover at least a part of a surface of the simple substance of the metal atom.
6. The liquid chemical according to claim 4 ,
wherein a ratio of the number of the particles C contained to the number of the particles B contained is 1.0 or more, based on the number of the particles per unit volume of the liquid chemical.
7. The liquid chemical according to claim 4 ,
wherein a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained is less than 1.0, based on the number of the particles per unit volume of the liquid chemical.
8. The liquid chemical according to claim 4 ,
wherein a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained is 1.0×10 −1 or less, based on the number of the particles per unit volume of the liquid chemical.
9. The liquid chemical according to claim 4 ,
wherein the particles A consist of particles E consisting of one kind of the metal atom, and particles F consisting of two or more kinds of metal atoms, and
a ratio of the number of the particles E contained to the number of the particles F contained is 1.0×10 −2 to 1.0×10 2 , based on the number of the particles per unit volume of the liquid chemical.
10. The liquid chemical according to claim 1 ,
wherein at least some of the metal-containing particles are particles U containing the organic compound.
11. The liquid chemical according to claim 10 ,
wherein the number of the particles U contained per unit volume of the liquid chemical is 5.0×10 −2 to 1.0×10 11 particles/cm 3 .
12. The liquid chemical according to claim 1 ,
wherein at least some of the metal-containing particles are the particles U containing the organic compound and particles V not containing the organic compound, and
a ratio of the number of the particles U contained to the number of the particles V contained is 1.0×10 1 or more, based on the number of the particles per unit volume of the liquid chemical.
13. The liquid chemical according to claim 1 ,
wherein at least some of the metal-containing particles are at least one selected from the group consisting of Pb-containing particles containing a Pb atom and Ti-containing particles containing a Ti atom.
14. The liquid chemical according to claim 1 ,
wherein at least some of the metal-containing particles are Pb-containing particles containing a Pb atom and Ti-containing particles containing a Ti atom, and
a ratio of the number of the Pb-containing particles contained to the number of the Ti-containing particles contained is 1.0×10 −5 to 1.0, based on the number of the particles per unit volume of the liquid chemical.
15. A method for producing a liquid chemical, which is for producing the liquid chemical according to claim 1 , the method comprising:
a filtration step of filtering a purification target substance containing the organic solvent using a filter to obtain the liquid chemical.
16. The method for producing a liquid chemical according to claim 15 , the method further comprising:
a distillation step of distilling the purification target substance to obtain a distilled purification target substance prior to the filtration step,
wherein the purification target substance contains the organic compound having a boiling point of 300° C. or higher, and
a content of the organic compound in the distilled purification target substance is 1.0×10 −3 mass ppt to 1.0×10 3 mass ppm.
17. The method for producing a liquid chemical according to claim 15 ,
wherein the filter comprises two or more kinds of filters, and the filtration step is a multi-stage filtration step in which the purification target substance is passed through the two or more kinds of filters different in at least one selected from the group consisting of a filter material, a pore diameter, and a pore structure.
18. The method for producing a liquid chemical according to claim 15 ,
wherein, for the filter, when using one filter, a pore diameter of the filter is 5 nm or smaller, and when using two or more filters, a pore diameter of the filter having a smallest pore diameter among the filters is 5 nm or smaller.