Liquid chemical and method for producing liquid chemical
An object of the present invention is to provide a liquid chemical exhibiting excellent defect inhibitive performance even in a case of being applied to a resist process by EUV exposure. Another object thereof is to provide a method for producing a liquid chemical. The liquid chemical of the present invention includes an organic solvent, and metal-containing particles containing a metal atom, in which the number of metal nanoparticles contained in the metal-containing particles and having a particle size of 0.5 to 17 nm is 1.0×10 1 to 1.0×10 9 particles/cm 3 , based on the number of the particles per unit volume of the liquid chemical.
1 . A liquid chemical comprising:
an organic solvent; and
metal-containing particles containing a metal atom,
wherein the number of metal nanoparticles contained in the metal-containing particles and having a particle size of 0.5 to 17 nm is 1.0×10 1 to 1.0×10 9 particles/cm 3 , based on the number of the particles per unit volume of the liquid chemical,
the metal nanoparticles include metal nanoparticles containing a Pb atom and metal nanoparticles containing a Ti atom,
a ratio of the number of the metal nanoparticles containing a Pb atom to the number of the metal nanoparticles containing a Ti atom is 1.0×10 −3 to 9.0×10 −1 , based on the number of the particles per unit volume of the liquid chemical,
the metal nanoparticles consist of at least one selected from the group consisting of particles A consisting of a simple substance of the metal atom, particles B consisting of an oxide of the metal atom, and particles C consisting of a simple substance of the metal atom and an oxide of the metal atom,
a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained 1.0×10 −1 or less, based on the number of the particles per unit volume of the liquid chemical, and
the liquid chemical includes no resin.
2 . The liquid chemical according to claim 1 ,
wherein a value of particle size distribution of the metal-containing particles on a number basis is a maximum value in at least one range selected from the group consisting of a range in which a particle size is smaller than 5 nm and a range in which a particle size is larger than 17 nm.
3 . The liquid chemical according to claim 2 ,
wherein a value of the particle size distribution is a maximum value in a range in which a particle size is 0.5 nm or larger and smaller than 5 nm.
4 . The liquid chemical according to claim 1 , which is used for manufacturing a semiconductor device.
5 . The liquid chemical according to claim 1 , further comprising:
an organic compound having a boiling point of 300° C. or higher.
6 . The liquid chemical according to claim 5 ,
wherein at least some of the metal nanoparticles are particles U containing the organic compound.
7 . The liquid chemical according to claim 5 ,
wherein at least some of the metal nanoparticles are the particles U containing the organic compound and particles V not containing the organic compound, and
a ratio of the number of the particles U contained to the number of the particles V contained is 1.0×10 1 or more, based on the number of the particles per unit volume of the liquid chemical.
8 . The liquid chemical according to claim 1 ,
wherein the metal nanoparticles include at least one selected from the group consisting of metal nanoparticles containing a Pb atom and metal nanoparticles containing a Ti atom.
9 . A method for producing a liquid chemical, which is for producing the liquid chemical according to claim 1 , the method comprising:
a filtration step of filtering a purification target substance containing an organic solvent using a filter to obtain the liquid chemical.
10 . The method for producing a liquid chemical according to claim 9 ,
wherein the filtration step is a multi-stage filtration step in which the purification target substance is passed through two or more kinds of filters different in at least one selected from the group consisting of a filter material, a pore diameter, and a pore structure.
11 . The method for producing a liquid chemical according to claim 9 ,
wherein, for the filter, in a case of using one filter, a pore diameter of the filter is 5 nm or smaller, and in a case of using two or more filters, a pore diameter of a filter having a smallest pore diameter among the filters is 5 nm or smaller.
12 . The liquid chemical according to claim 2 , which is used for manufacturing a semiconductor device.
13 . A method for producing a liquid chemical, which is for producing the liquid chemical according to claim 2 , the method comprising:
a filtration step of filtering a purification target substance containing an organic solvent using a filter to obtain the liquid chemical.
14 . The liquid chemical according to claim 1 ,
wherein a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained is 1.0×10 −3 or more, based on the number of the particles per unit volume of the liquid chemical.