Semiconductor device and method for manufacturing semiconductor device
A semiconductor device with less variations in transistor characteristics is provided. The semiconductor device includes: a first insulator; a first oxide over the first insulator; a first conductor and a second conductor over the first oxide; a first layer and a second layer which are in contact with a side surface of the first oxide; a second insulator over the first insulator, the first layer, the second layer, the first conductor, and the second conductor; a third insulator over the second insulator; a second oxide between the first conductor and the second conductor and over the first oxide; a fourth insulator over the second oxide; and a third conductor over the fourth insulator. Each of the first layer and the second layer includes a metal contained in the first conductor and the second conductor. The first insulator in a region in contact with the second insulator includes a region where a concentration of the metal is lower than that of the first layer or the second layer.
1. A semiconductor device comprising:
a first insulator;
a first oxide over the first insulator;
a first conductor and a second conductor over the first oxide;
a first layer and a second layer which are in contact with a side surface of the first oxide;
a second insulator over the first insulator, the first layer, the second layer, the first conductor, and the second conductor;
a third insulator over the second insulator;
a fourth insulator between the first conductor and the second conductor and over the first oxide; and
a third conductor over the fourth insulator,
wherein the second insulator is in contact with a top surface of the first insulator, a side surface of the first layer, a side surface of the second layer, a top surface of the first conductor, and a top surface of the second conductor;
wherein each of the first layer and the second layer comprises a metal contained in the first conductor and the second conductor,
wherein the first insulator comprises a region in contact with the second insulator, and
wherein a concentration of the metal in the region is lower than a concentration of the metal in the first layer or the second layer.
2. The semiconductor device according to claim 1 ,
wherein a thickness of each of the first layer and the second layer is greater than or equal to 0.5 nm and less than or equal to 1.5 nm.
3. The semiconductor device according to claim 1 ,
wherein the metal is tantalum.
4. The semiconductor device according to claim 1 ,
wherein the first oxide comprises indium, an element M, and zinc, and
wherein M is gallium, aluminum, yttrium, or tin.
5. The semiconductor device according to claim 1 ,
wherein each of the first layer and the second layer is an oxide.
6. A semiconductor device comprising:
a first insulator;
a first oxide over the first insulator;
a second oxide over the first oxide;
a first conductor and a second conductor over the second oxide;
a first layer and a second layer which are in contact with a side surface of the first oxide and a side surface of the second oxide;
a second insulator over the first insulator, the first layer, the second layer, the first conductor, and the second conductor;
a third insulator over the second insulator;
a fourth insulator between the first conductor and the second conductor and over the second oxide; and
a third conductor over the fourth insulator,
wherein the second insulator is in contact with a top surface of the first insulator, a side surface of the first layer, a side surface of the second layer, a top surface of the first conductor, and a top surface of the second conductor, and
wherein each of the first layer and the second layer comprises a metal contained in the first conductor and the second conductor.
7. The semiconductor device according to claim 6 ,
wherein a thickness of each of the first layer and the second layer is greater than or equal to 0.5 nm and less than or equal to 1.5 nm.
8. The semiconductor device according to claim 6 ,
wherein the metal is tantalum.
9. The semiconductor device according to claim 6 ,
wherein the first oxide comprises indium, an element M, and zinc, and
wherein M is gallium, aluminum, yttrium, or tin.
10. The semiconductor device according to claim 6 ,
wherein each of the first layer and the second layer is an oxide.