Dual metal wrap-around contacts for semiconductor devices
A semiconductor device includes a first raised feature in a NFET region on a substrate, a first n-type doped epitaxial semiconductor material grown on the first raised feature, the first n-type doped epitaxial material having a first upward facing surface and a first downward facing surface, a first contact metal on the first downward facing surface, and a second contact metal on the first upward facing surface. The device further includes a second raised feature in a PFET region on the substrate, a second p-type doped epitaxial semiconductor material grown on the second raised feature, the second p-type doped epitaxial material having a second upward facing surface and a second downward facing surface, a third contact metal on the second downward facing surface, and a fourth contact metal on the second upward facing surface, wherein the fourth contact metal is different from the second contact metal.
1. A method of forming a semiconductor device, the method comprising:
providing a first raised feature in a n-type channel field effect transistor (NFET) region on a substrate;
growing a first n-type doped epitaxial semiconductor material on the first raised feature, the first n-type doped epitaxial semiconductor material having a first upward facing surface and a first downward facing surface;
forming a first contact metal on the first downward facing surface;
forming a second contact metal on the first upward facing surface;
providing a second raised feature in a p-type channel field effect transistor (PFET) region on the substrate;
growing a second p-type doped epitaxial semiconductor material on the second raised feature, the second p-type doped epitaxial semiconductor material having a second upward facing surface and a second downward facing surface;
forming a third contact metal on the second downward facing surface; and
forming a fourth contact metal on the second upward facing surface, wherein the fourth contact metal is different from the second contact metal, and the first contact metal is the different from the third contact metal.
2. The method of claim 1 , wherein the first n-type doped epitaxial semiconductor material contains Si:P or Si:As, the first contact metal contains Ru or Ti, and the second contact metal contains Ti or TiSi x .
3. The method of claim 1 , wherein the second p-type doped epitaxial semiconductor material contains Si:B or SiGe:B, the third contact metal contains Ru or Ti, and the fourth contact metal contains NiPt or Ru.
4. The method of claim 1 , wherein the first and second raised features are fins that extend through a shallow trench isolation (STI) layer.
5. The method of claim 1 , wherein forming the first contact metal on the first downward facing surface and forming the second contact metal on the first upward facing surface includes:
conformally depositing the first contact metal on the first upward facing surface and on the first downward facing surface;
removing the first contact metal from the first upward facing surface; and
depositing the second contact metal on the first upward facing surface.
6. The method of claim 1 , wherein forming the third contact metal on the second downward facing surface and forming the fourth contact metal on the second upward facing surface includes:
conformally depositing the third contact metal on the second upward and downward facing surfaces;
removing the third contact metal from the second upward facing surface; and
depositing the fourth contact metal on the second upward facing surface.
7. A method of forming a semiconductor device, the method comprising:
providing a first raised feature in a n-type channel field effect transistor (NFET) region on a substrate;
growing a first n-type doped epitaxial semiconductor material on the first raised feature, the first n-type doped epitaxial semiconductor material having a first upward facing surface and a first downward facing surface;
forming a first contact metal on the first downward facing surface;
forming a second contact metal on the first upward facing surface;
providing a second raised feature in a p-type channel field effect transistor (PFET) region on the substrate;
growing a second p-type doped epitaxial semiconductor material on the second raised feature, the second p-type doped epitaxial semiconductor material having a second upward facing surface and a second downward facing surface;
forming a third contact metal on the second downward facing surface; and
forming a fourth contact metal on the second upward facing surface, wherein the fourth contact metal is different from the second contact metal, the first contact metal is the different from the third contact metal, the first n-type doped epitaxial semiconductor material contains Si:P or Si:As, the first contact metal contains Ti, and the second contact metal contains Ti or TiSi x .
8. The method of claim 7 , wherein the second p-type doped epitaxial semiconductor material contains Si:B or SiGe:B, the third contact metal contains Ru, and the fourth contact metal contains NiPt or Ru.
9. The method of claim 7 , wherein the first and second raised features are fins that extend through a shallow trench isolation (STI) layer.
10. The method of claim 7 , wherein forming the first contact metal on the first downward facing surface and forming the second contact metal on the first upward facing surface includes:
conformally depositing the first contact metal on the first upward facing surface and on the first downward facing surface;
removing the first contact metal from the first upward facing surface; and
depositing the second contact metal on the first upward facing surface.
11. The method of claim 7 , wherein forming the third contact metal on the second downward facing surface and forming the fourth contact metal on the second upward facing surface includes:
conformally depositing the third contact metal on the second upward and downward facing surfaces;
removing the third contact metal from the second upward facing surface; and
depositing the fourth contact metal on the second upward facing surface.
12. A method of forming a semiconductor device, the method comprising:
providing a first raised feature in a n-type channel field effect transistor (NFET) region on a substrate;
growing a first n-type doped epitaxial semiconductor material on the first raised feature, the first n-type doped epitaxial semiconductor material having a first upward facing surface and a first downward facing surface;
forming a first contact metal on the first downward facing surface;
forming a second contact metal on the first upward facing surface;
providing a second raised feature in a p-type channel field effect transistor (PFET) region on the substrate;
growing a second p-type doped epitaxial semiconductor material on the second raised feature, the second p-type doped epitaxial semiconductor material having a second upward facing surface and a second downward facing surface;
forming a third contact metal on the second downward facing surface; and
forming a fourth contact metal on the second upward facing surface, wherein the fourth contact metal is different from the second contact metal, the first contact metal is the different from the third contact metal, the second p-type doped epitaxial semiconductor material contains Si:B or SiGe:B, the third contact metal contains Ru, and the fourth contact metal contains NiPt or Ru.
13. The method of claim 12 , wherein the first n-type doped epitaxial semiconductor material contains Si:P or Si:As, the first contact metal contains Ti, and the second contact metal contains Ti or TiSi x .
14. The method of claim 12 , wherein the first and second raised features are fins that extend through a shallow trench isolation (STI) layer.
15. The method of claim 12 , wherein forming the first contact metal on the first downward facing surface and forming the second contact metal on the first upward facing surface includes:
conformally depositing the first contact metal on the first upward facing surface and on the first downward facing surface;
removing the first contact metal from the first upward facing surface; and
depositing the second contact metal on the first upward facing surface.
16. The method of claim 12 , wherein forming the third contact metal on the second downward facing surface and forming the fourth contact metal on the second upward facing surface includes:
conformally depositing the third contact metal on the second upward and downward facing surfaces;
removing the third contact metal from the second upward facing surface; and
depositing the fourth contact metal on the second upward facing surface.