Semiconductor device and method of manufacture
Semiconductor devices and methods of manufacturing are presented in which inner spacers for nanostructures are manufactured. In embodiments a dielectric material is deposited for the inner spacer and then treated. The treatment may add material and cause an expansion in volume in order to close any seams that can interfere with subsequent processes.
1. A method of manufacturing a semiconductor device, the method comprising
forming a fin comprising alternately stacked first material and second material;
recessing the first material to form a recess;
forming a first inner spacer within the recess; and
performing an annealing process to the first inner spacer to add oxygen.
2. The method of claim 1 , wherein the performing the annealing process closes seams within the first inner spacer.
3. The method of claim 1 , wherein prior to the performing the annealing process the first inner spacer is silicon nitride.
4. The method of claim 1 , wherein prior to the performing the annealing process the first inner spacer is SiCON.
5. The method of claim 1 , wherein the first inner spacer comprises a hybrid material.
6. The method of claim 1 , wherein the forming the first inner spacer is performed at least in part with an atomic layer deposition process.
7. The method of claim 6 , wherein the atomic layer deposition process uses a number of cycles of between about 30 times and about 100 times.
8. A method of manufacturing a semiconductor device, the semiconductor device comprising:
forming a first nanostructure over a second nanostructure, wherein the second nanostructure has a substantially constant thickness;
forming an inner spacer located between the first nanostructure and the second nanostructure, the inner spacer having a closed seam; and
forming a gate dielectric around the first nanostructure and the second nanostructure.
9. The method of claim 8 , wherein the forming the inner spacer further comprises:
depositing a first material, wherein after the depositing the first material the first material has a first seam; and
adding oxygen to the first material to close the first seam.
10. The method of claim 9 , wherein the adding oxygen is performed within a furnace.
11. The method of claim 10 , wherein the adding oxygen is performed in a non-plasma oxidizing environment.
12. The method of claim 11 , wherein the oxidizing environment comprises:
an oxidizer;
a regenerator; and
a catalyst.
13. The method of claim 12 , wherein the catalyst comprises pyridine.
14. The method of claim 13 , wherein the regenerator comprises a first material, and wherein the first material is also used during the forming the inner spacer.
15. A method of manufacturing a semiconductor device, the semiconductor device comprising:
partially filling a recess with a first dielectric material, the recess being located between a first nanostructure and a second nanostructure, wherein the second nanostructure has a substantially constant thickness; and
introducing a second material to the first dielectric material to expand the first dielectric material into a second dielectric material.
16. The method of claim 15 , further comprising removing portions of the second dielectric material to form spacers.
17. The method of claim 16 , wherein the spacers are flush with sidewalls of the first nanostructure and the second nanostructure.
18. The method of claim 16 , further comprising recessing the second dielectric material from sidewalls of the first nanostructure and the second nanostructure.
19. The method of claim 15 , wherein the second material is oxygen.
20. The method of claim 15 , wherein the introducing the second material is performed at a temperature of between about 400° C. and about 600° C. and at a pressure of between about 500 torr and 800 torr.