Build-up package for integrated circuit devices, and methods of making same
A device is disclosed which includes, in one illustrative example, an integrated circuit die having an active surface and a molded body extending around a perimeter of the die, the molded body having lips that are positioned above a portion of the active surface of the die. Another illustrative example includes an integrated circuit die having an active surface, a molded body extending around a perimeter of the die and a CTE buffer material formed around at least a portion of the perimeter of the die adjacent the active surface of the die, wherein the CTE buffer material is positioned between a portion of the die and a portion of the molded body and wherein the CTE buffer material has a coefficient of thermal expansion that is intermediate a coefficient of thermal expansion for the die and a coefficient of thermal expansion for the molded body.
1. A semiconductor device, comprising:
a die having an active surface;
a bond pad at the active surface, wherein the bond pad has an upper surface, and wherein the upper surface is coplanar with the active surface of the die;
a first layer of insulating material carried by the active surface, the first layer of insulating material including a first opening aligned with the bond pad along a vertical axis perpendicular to the active surface of the die;
a molded body surrounding a lateral perimeter of the die, wherein the molded body includes an extension portion over a portion of the active surface of the die and in contact with a sidewall of the first layer of insulating material;
a second layer of insulating material carried by the first layer of insulating material and the molded body, the second layer of insulating material including a second opening aligned with the first opening along the vertical axis; and
a conductive layer carried by the second layer of insulation material, the conductive layer electrically coupled to the bond pad through the first and second openings.
2. The semiconductor device of claim 1 wherein the first layer of insulating material at least partially covers the upper surface of the bond pad.
3. The semiconductor device of claim 1 wherein the lateral perimeter of the die is laterally offset from the sidewall of the first layer of insulating material.
4. The semiconductor device of claim 1 wherein the upper surface of the bond pad is a third upper surface, wherein the first layer of insulating material has a first upper surface, wherein the molded body has a second upper surface, and wherein the first upper surface is coplanar with the second upper surface.
5. The semiconductor device of claim 1 , further comprising a third layer of insulating material deposited over the conductive layer, the third layer of insulating material having a third opening exposing a portion of the conductive layer.
6. The semiconductor device of claim 5 , further comprising:
a second bond pad coupled to the conductive layer in the third opening; and
a conductive structure coupled to the second bond pad and extending at least partially out of the third opening.
7. The semiconductor device of claim 1 wherein the sidewall of the first layer of insulating material is offset from the lateral perimeter of the die between 100 micrometers (μm) to 500 μm.
8. The semiconductor device of claim 1 wherein the molded body has a first thickness, and wherein a combination of the die and the first layer of insulating material have a second thickness equal to the first thickness.
9. The semiconductor device of claim 1 wherein the extension portion of the molded body defines a window that has a first footprint, and wherein the die has a second footprint that is greater than the first footprint.
10. A semiconductor device, comprising:
a die having an active surface;
a bond pad at the active surface and having an upper surface;
an insulating layer deposited on the active surface, wherein the insulating layer at least partially covers the upper surface of the bond pad, and wherein the insulating layer includes an opening vertically aligned with the bond pad; and
a molded body having a primary vertical interface with a lateral portion of the die, wherein the molded body includes an extension portion extending inward beyond the primary vertical interface and contacting a sidewall of the insulating layer.
11. The semiconductor device of claim 10 , further comprising a conductive layer coupled to the bond pad through the opening in the insulating layer and extending longitudinally away from the opening.
12. The semiconductor device of claim 11 , further comprising a second insulating layer deposited over the conductive layer, wherein the second insulating layer includes a second opening exposing at least a portion of the conductive layer.
13. The semiconductor device of claim 12 wherein the second opening is spaced laterally outward from the primary vertical interface between the molded body and the die.
14. The semiconductor device of claim 10 wherein the insulating layer has an upper surface, and wherein the molded body has an upper surface that is coplanar with the upper surface of the insulating layer.
15. The semiconductor device of claim 10 wherein the insulating layer is a first insulating layer and the opening is a first opening, wherein the semiconductor device further comprises a second insulating layer deposited over the first insulating layer and the molded body, and wherein the second insulating layer includes a second opening vertically aligned with the first opening.
16. A semiconductor device, comprising:
a die having an active surface, wherein the active surface includes a bond pad formed thereon;
an insulating material deposited over a portion of the active surface, wherein the insulating material at least partially covers an upper surface of the bond pad, and wherein the insulating material includes an opening exposing a portion of the bond pad;
a molded material deposited around a lateral portion of the die, wherein the molded material includes a vertical interface with the lateral portion and an extension portion extending inward beyond the vertical interface to a sidewall of the insulating material; and
a conductive layer deposited over the insulating material and the molded material, wherein the conductive layer is electrically coupled to the bond pad through the opening in the insulating material.
17. The semiconductor device of claim 16 wherein:
the opening is a first opening;
the semiconductor device further comprises a second insulating material deposited over the insulating material and the molded material and beneath the conductive layer;
the second insulating material includes a second opening vertically aligned with the first opening; and
the conductive layer is electrically coupled to the bond pad through the first and second openings.
18. The semiconductor device of claim 16 wherein the conductive layer extends over the extension portion of the molded material to a position laterally exterior to the vertical interface.
19. The semiconductor device of claim 16 , further comprising a second insulating material deposited over the conductive layer, the second insulating material including a second opening exposing at least a portion of the conductive layer.