Semiconductor devices and manufacturing methods of the same
A semiconductor device includes a first substrate structure and a second substrate structure. The first substrate structure includes a base substrate, circuit elements disposed on the base substrate, a first substrate disposed on the circuit elements, first memory cells disposed on the first substrate and electrically connected to the circuit elements, first bit lines disposed on the first memory cells and connected to the first memory cells, and first bonding pads disposed on the first bit lines to be connected to the first bit lines, respectively. The second substrate structure is connected to the first substrate structure on the first substrate structure, and includes a second substrate, second memory cells disposed on the second substrate, second bit lines disposed on the second memory cells and connected to the second memory cells, and second bonding pads disposed on the second bit lines to be connected to the second bit lines, respectively. The first substrate structure and the second substrate structure are connected to each other by bonding the first bonding pads to the second bonding pads, and the first bonding pads and second bonding pads are vertically between the first bit lines and the second bit lines, without the first substrate or second substrate disposed vertically between the first bit lines and the second bit lines.
1. A method for manufacturing a semiconductor device, comprising:
forming a first substrate structure by forming first gate electrodes stacked and spaced apart from each other in a direction perpendicular to a first surface of a first substrate, first channels extending perpendicular to the first substrate while passing through the first gate electrodes, first bit lines connected to the first channels, and first bonding pads disposed on the first bit lines to be electrically connected to the first bit lines, respectively, on the first substrate;
forming a second substrate structure by forming second gate electrodes stacked and spaced apart from each other in a direction perpendicular to a first surface of a second substrate, second channels extending perpendicular to the second substrate while passing through the second gate electrodes, second bit lines connected to the second channels, and second bonding pads disposed on the second bit lines to be electrically connected to the second bit lines, respectively, on the second substrate;
forming a third substrate structure by forming circuit elements on a third substrate, through contact plugs passing through the third substrate to a predetermined depth, and third bonding pads disposed on the circuit elements, on a first surface of the third substrate;
bonding the third substrate structure to the first substrate structure by bonding the first bonding pads to the third bonding pads;
exposing first ends of the through contact plugs by removing a portion of the third substrate from a second surface of the third substrate, opposite the first surface of the third substrate;
forming fourth bonding pads on the through contact plugs, exposed through the second surface of the third substrate; and
bonding the second substrate structure to the third substrate structure by bonding the second bonding pads to the fourth bonding pads.
2. The method for manufacturing a semiconductor device of claim 1 , wherein the first bit lines are electrically connected to the second bit lines through the first bonding pads, the third bonding pads, the through contact plugs, the fourth bonding pads, and the second bonding pads.
3. The method for manufacturing a semiconductor device of claim 1 , wherein:
the forming the first to third substrate structures further includes forming first to fourth dielectric layers surrounding the first to fourth bonding pads, respectively,
in the bonding the third substrate structure to the first substrate structure, the first dielectric layer is bonded to the third dielectric layer, and
in the bonding the second substrate structure to the third substrate structure, the fourth dielectric layer is bonded to the second dielectric layer.
4. The method for manufacturing a semiconductor device of claim 3 , wherein each of the first to fourth dielectric layers is a diffusion prevention layer preventing diffusion of materials of the first to fourth bonding pads.
5. The method for manufacturing a semiconductor device of claim 1 , wherein each of the first channels has an inclined side surface narrowing toward the first substrate and each of the second channels has an inclined side surface narrowing toward the second substrate.
6. The method for manufacturing a semiconductor device of claim 1 , wherein the first substrate structure and the second substrate structure have a symmetrical structure based on the third substrate structure.
7. The method for manufacturing a semiconductor device of claim 1 , wherein the forming the third substrate structure includes:
forming contact holes by removing a portion of the third substrate;
forming a substrate insulating layer on a side wall and a lower surface of the third substrate exposed through the contact holes; and
filling the contact holes with a conductive material to form the through contact plugs.
8. The method for manufacturing a semiconductor device of claim 1 , wherein the first gate electrodes are electrically connected to the second gate electrodes through the first bonding pads, the third bonding pads, the through contact plugs, the fourth bonding pads, and the second bonding pads.