Phase-change memory
The present description concerns a device including phase-change memory cells, each memory cell including a first resistive element in lateral contact with a second element made of a phase-change material.
1. A device, comprising:
phase-change memory cells, each memory cell of the phase-change memory cells including:
a first element of a conductive material having a cuboid shape and a first surface transverse a second surface; and
a second element of a phase-change material having a first surface transverse a second surface, the first surface of the second element contacting the first surface of the first element;
a first insulating layer covering the first and second elements, the first insulating layer contacting the second surface of the first element and the first surface of the second element, a third surface of the first element being exposed from the first insulating layer, the third surface opposite the first surface of the first element; and
a conductive strip on the first insulating layer.
2. The device of claim 1 , comprising a second insulating layer spaced from the first insulating layer, the second insulating layer contacting a fourth surface of the first element opposite the second surface of the first element, the second insulating layer contacting the first surface of the second element.
3. The device of claim 2 , comprising a selection element contacting the first and second insulating layers and the third surface of the first element.
4. The device of claim 3 , wherein the selection element has a spacer shape.
5. The device of claim 4 , wherein the selection element is made of chalcogen material, an alloy of chalcogen, or ovonic threshold switching type (OTS).
6. The device of claim 1 , comprising:
a third element of a conductive material contacting the second surface of the second element, the third element being spaced from the conductive strip; and
a conductive track contacting the third element.
7. The device of claim 1 , comprising a conductive track, the second surface of the second element contacting the conductive track.
8. The device of claim 7 , wherein the conductive track is made of tungsten.
9. The device of claim 1 , wherein the third surface of the first element contacts the conductive strip.
10. A device, comprising:
a plurality of first elements of a conductive material having a cuboid shape and a first surface transverse a second surface;
a plurality of second elements of a phase-change material having a first surface transverse a second surface, the first surface of each second element contacting the first surface of each first element, respectively;
a first insulating layer covering the plurality of first and second elements, the first insulating layer contacting the second surface of each first element and the first surface of each second element, a third surface of each first element being exposed from the first insulating layer, the third surface opposite the first surface of each first element, respectively; and
a conductive strip on the first insulating layer.
11. The device of claim 10 , comprising a second insulating layer having a plurality of portions, each portion of the second insulating layer extending between each second element and the conductive strip, respectively, a fourth surface of each first element contacting each portion of the second insulating layer, respectively, the fourth surface being opposite the second surface of each first element, respectively.
12. The device of claim 10 , wherein the conductive strip separates adjacent first elements facing each other.
13. The device of claim 10 , wherein the first insulating layer separates adjacent second elements facing each other.
14. The device of claim 10 , wherein the first insulating layer has a first surface that is non-planar surface and contacts the conductive strip.
15. The device of claim 11 , wherein the first insulating layer includes cavities between the adjacent second elements, the conductive strip extending in the cavities.
16. A method, comprising:
forming a plurality of first elements of a conductive material having a cuboid shape and a first surface transverse a second surface;
forming a plurality of second elements of a phase-change material having a first surface transverse a second surface, the first surface of each second element contacting the first surface of each first element, respectively;
forming a first insulating layer covering the plurality of first and second elements, the first insulating layer contacting the second surface of each first element and the first surface of each second element, a third surface of each first element being exposed from the first insulating layer, the third surface opposite the first surface of each first element, respectively; and
forming a conductive strip on the first insulating layer.
17. The method of claim 16 , wherein forming the plurality of first elements includes:
forming a stack of a first layer of insulating material, a second layer of conductive material, and a third layer of insulating material, the second layer of conductive material being between the first and second layers of insulating material; and
etching first cavities in the stack; and
wherein forming the plurality of second elements includes each second element being in a respective first cavity.
18. The method of claim 17 , wherein forming the first insulating layer includes forming a fourth layer of insulating material over the first layer of insulating material and the plurality of second elements.
19. The method of claim 18 , wherein forming the conductive strip includes:
forming second cavities through the stack and the fourth layer of insulating material; and
filling the second cavities with a fifth layer of conductive material.
20. The method of claim 19 , comprising individualizing phase-change memory cells each having at least one first element and at least one second element, each phase-change memory cell having a thickness less than 150 nm, the thickness being in a first direction from the first layer of insulating material to the third layer of insulating material.