Cap substrate for acoustic wave device
A packaged acoustic wave component includes a device substrate and an acoustic wave device mounted on the device substrate. A peripheral wall is attached to the device substrate and surrounds the acoustic wave device. A cap substrate is attached to the peripheral wall and spaced above the device substrate. The cap substrate has a marking layer disposed on a bottom surface of the cap substrate that is disposed above and faces the acoustic wave device. The marking layer is configured to receive one or more markings thereon.
1. A packaged acoustic wave component comprising:
a device substrate;
an acoustic wave device mounted on the device substrate;
a peripheral wall attached to the device substrate and surrounding the acoustic wave device; and
a cap substrate attached to the peripheral wall and spaced above the device substrate, the cap substrate having a marking layer disposed on a bottom surface of the cap substrate that is spaced from and faces the acoustic wave device, the marking layer configured to receive one or more markings thereon, the one or more markings being coordinates associated with a location of the cap substrate on a parent wafer.
2. The packaged acoustic wave component of claim 1 wherein the marking layer is centered on the bottom surface of the cap substrate.
3. The packaged acoustic wave component of claim 1 wherein the marking layer is planar.
4. The packaged acoustic wave component of claim 1 wherein the acoustic wave device is a bulk acoustic wave device.
5. The packaged acoustic wave component of claim 1 further including one or more pillars between the peripheral wall and the marking layer.
6. The packaged acoustic wave component of claim 1 wherein the cap substrate has a dimension of no more than 565 um by 495 um.
7. The packaged acoustic wave component of claim 1 wherein marking layer is circular.
8. A radio frequency module comprising:
a package substrate;
a packaged acoustic wave component including a device substrate, an acoustic wave device mounted on the device substrate, a peripheral wall attached to the device substrate and surrounding the acoustic wave device, and a cap substrate attached to the peripheral wall and spaced above the device substrate, the cap substrate having a marking layer disposed on a bottom surface of the cap substrate that is spaced from and faces the acoustic wave device, the marking layer configured to receive one or more markings thereon, the one or more markings being coordinates associated with a location of the cap substrate on a parent wafer; and
additional circuitry, the packaged acoustic wave component and additional circuitry disposed on the package substrate.
9. The radio frequency module of claim 8 wherein the marking layer is centered on the bottom surface of the cap substrate.
10. The radio frequency module of claim 8 wherein the marking layer is planar.
11. The radio frequency module of claim 8 wherein the acoustic wave device is a bulk acoustic wave device.
12. The radio frequency module of claim 8 further including one or more pillars between the peripheral wall and the marking layer.
13. A wireless communication device comprising:
an antenna; and
a front end module including one or more packaged acoustic wave components configured to filter a radio frequency signal associated with the antenna, each packaged acoustic wave component including a device substrate, an acoustic wave device mounted on the device substrate, a peripheral wall attached to the device substrate and surrounding the acoustic wave device, and a cap substrate attached to the peripheral wall and spaced above the device substrate, the cap substrate having a marking layer disposed on a bottom surface of the cap substrate that is spaced from and faces the acoustic wave device, the marking layer configured to receive one or more markings thereon, the one or more markings being coordinates associated with a location of the cap substrate on a parent wafer.
14. The wireless communication device of claim 13 wherein the marking layer is centered on the bottom surface of the cap substrate.
15. The wireless communication device of claim 13 wherein the marking layer is planar.
16. The wireless communication device of claim 13 wherein the acoustic wave device is a bulk acoustic wave device.
17. The wireless communication device of claim 13 further including one or more pillars between the peripheral wall and the marking layer.
18. The packaged acoustic wave component of claim 1 wherein the one or more markings are alphanumeric indicia.
19. The radio frequency module of claim 8 wherein the one or more markings are alphanumeric indicia.
20. The wireless communication device of claim 13 wherein the one or more markings are alphanumeric indicia.