Fabrication of embedded memory devices utilizing a self assembled monolayer
A semiconductor device structure includes a metallization stack comprising one or more patterned metal layers. A bi-layer dielectric cap is disposed on and in contact with the metallization stack. At least one memory device is disposed on the bi-layer dielectric cap. A method for forming the metallization stack includes receiving a structure comprising a metallization layer and a first dielectric cap layer formed over the metallization layer. The metallization layer includes a logic area and a memory area. At least one memory stack is formed over the first dielectric cap layer. A self-assembled monolayer is formed over and in contact with the memory stack. A second dielectric cap layer is formed on and in contact with the first dielectric cap layer. The second dielectric cap layer is not formed on the self-assembled monolayer.
1. A method for forming an embedded memory device, the method comprising:
receiving a structure comprising a metallization layer and a first dielectric cap layer formed over the metallization layer, the structure comprising a logic area and a memory area;
forming at least one memory stack over the first dielectric cap layer;
forming a self-assembled monolayer over and in contact with the at least one memory stack; and
forming a second dielectric cap layer on and in contact with the first dielectric cap layer, wherein the second dielectric cap layer is not formed on the self-assembled monolayer.
2. The method of claim 1 , further comprising:
removing the self-assembled monolayer after forming the second dielectric cap layer; and
forming an encapsulation layer on sidewalls of the at least one memory stack.
3. The method of claim 2 , further comprising:
forming an inter-layer dielectric over the second dielectric cap layer and the at least one memory stack; and
forming a contact within the inter-layer dielectric and in contact with a top electrode of the at least one memory stack.
4. The method of claim 3 , further comprising:
forming a contact within the inter-layer dielectric and in contact with a patterned metal layer disposed within a portion of the metallization layer within the logic area of the structure.
5. The method of claim 1 , wherein forming the at least one memory stack over the first dielectric cap layer comprises:
forming a bottom electrode layer on the first dielectric cap layer;
forming a stack of magnetic tunnel layers on the bottom electrode layer; and
forming a top electrode layer on the stack of magnetic tunnel layers.
6. The method of claim 5 , wherein forming the at least one memory stack over the first dielectric cap layer comprises forming a hardmask layer on the top electrode layer.
7. The method of claim 5 , wherein forming the at least one memory stack over the first dielectric cap layer comprises patterning at least the top electrode layer, the stack of magnetic tunnel layers, and the bottom electrode layer to form the at least one memory stack.
8. The method of claim 1 , wherein a portion of the first dielectric cap layer is etched during forming of the at least one memory stack.