Methods and systems to determine shapes for semiconductor or flat panel display fabrication
Methods for calculating a pattern to be manufactured on a substrate include inputting a physical design pattern, determining a plurality of possible neighborhoods for the physical design pattern, generating a plurality of possible mask designs for the physical design pattern, calculating a plurality of possible patterns on the substrate, calculating a variation band from the plurality of possible patterns, and modifying the physical design pattern to reduce the variation band. Embodiments also include inputting a set of parameters for a neural network to calculate a pattern to be manufactured on a substrate, calculating a plurality of patterns to be manufactured on the substrate for the physical design in each possible neighborhood of the plurality of possible neighborhoods, training the neural network with the calculated plurality of patterns, and adjusting the set of parameters to reduce the manufacturing variation for the calculated plurality of patterns to be manufactured on a substrate.
1. A method for calculating a pattern to be manufactured on a substrate used to create an integrated circuit (IC), the method comprising:
receiving a physical design pattern produced by a computer aided design application to represent a portion of a circuit design of the IC;
determining a plurality of possible neighborhoods for the physical design pattern;
generating a plurality of possible mask designs for the physical design pattern, wherein the plurality of possible mask designs corresponds to the plurality of possible neighborhoods;
calculating a plurality of possible patterns on the substrate, wherein the plurality of possible patterns on the substrate correspond to the plurality of possible mask designs;
calculating a variation band from the plurality of possible patterns on the substrate; and
modifying the physical design pattern to reduce the variation band.
2. The method of claim 1 further comprising calculating a plurality of mask images from the plurality of possible mask designs.
3. The method of claim 2 , wherein calculating the plurality of possible mask images comprises performing charged particle beam simulation.
4. The method of claim 1 , wherein modifying the physical design pattern comprises modifying the plurality of possible neighborhoods of the physical design pattern.
5. The method of claim 1 , wherein the variation band corresponds to a set of manufacturing variation parameters.
6. The method of claim 1 , wherein the variation band comprises a process variation with a lower bound and an upper bound surrounding a nominal substrate pattern.
7. The method of claim 1 further comprising performing a coloring step separating shapes of the physical design pattern into layers.
8. The method of claim 7 , wherein modifying the physical design pattern includes modifying the coloring step.
9. The method of claim 1 , wherein generating the plurality of possible mask designs comprises performing optical proximity correction (OPC) of the physical design pattern.
10. The method of claim 1 , wherein determining the plurality of possible neighborhoods, generating the plurality of possible mask designs, or calculating the plurality of possible patterns on the substrate comprises using a neural network.
11. The method of claim 10 further comprising using post- processing to aggregate variation in the variation band.
12. The method of claim 10 , wherein the neural network further comprises multiple output channels to aggregate variation in the variation band.
13. The method of claim 1 further comprising calculating false negatives and false positives for the plurality of possible patterns on the substrate.
14. The method of claim 1 , wherein calculating the plurality of possible patterns on the substrate comprises performing lithography simulation.
15. The method of claim 1 , wherein the physical design pattern comprises a portion of an entire design, wherein the method further comprises determining a set of actual neighborhoods in which the physical design pattern is used in the entire design.
16. The method of claim 15 , wherein the portion of the entire design is an instance of the physical design pattern and the plurality of possible neighborhoods includes all neighborhoods of each instance.
17. The method of claim 1 , wherein each possible neighborhood in the plurality of possible neighborhoods is one possible neighborhood that surrounds the physical design pattern, wherein the plurality of possible neighborhoods comprise different shapes or different orientations of shapes.
18. A non-transitory machine readable medium storing a program for calculating a pattern to be manufactured on a substrate used to create an integrated circuit (IC), the program for execution by at least one processing unit, the program comprising sets of instructions for:
receiving a physical design pattern produced by a computer aided design application to represent a portion of a circuit design of the IC;
determining a plurality of possible neighborhoods for the physical design pattern;
generating, for the received physical design pattern, a plurality of possible mask designs corresponding to the plurality of possible neighborhoods;
calculating a plurality of possible patterns that are expected to be produced on the substrate for the plurality of possible mask designs;
calculating a variation band that expresses a difference between the plurality of possible patterns that are expected to be produced on the substrate; and
directing a physical design tool to modify the physical design pattern in order to reduce the variation band.
19. The non-transitory machine readable medium of claim 18 , wherein the program further comprises a set of instructions for calculating a plurality of mask images from the plurality of possible mask designs.
20. The non-transitory machine readable medium of claim 18 , wherein the physical design tool modifies the physical design pattern by modifying the plurality of possible neighborhoods of the physical design pattern.
21. The non-transitory machine readable medium of claim 18 , wherein the variation band comprises a process variation with a lower bound and an upper bound surrounding a nominal substrate pattern.
22. The non-transitory machine readable medium of claim 18 , wherein the set of instructions for at least one of determining the plurality of possible neighborhoods, generating the plurality of possible mask designs, or calculating the plurality of possible patterns that are expected to be produced on the substrate comprises a set of instructions for using a neural network.
23. A method for modifying a physical design pattern to be manufactured on a substrate, the physical design pattern part of an integrated circuit (IC) design layout and produced by a computer design application to represent a portion of a circuit design of the IC, the method comprising:
calculating, for the physical design pattern produced by the computer design application to represent the portion of the circuit design of the IC, a plurality of possible patterns that are predicted to be manufactured on the substrate based on different possible neighborhoods for the physical design pattern in the IC design layout;
calculating a variation band from the plurality of possible patterns on the substrate; and
modifying the physical design pattern in order to reduce the variation band.
24. The method of claim 23 , wherein the plurality of possible patterns is further based on variations in at least one manufacturing process parameter.
25. The method of claim 23 further comprising generating a plurality of possible mask designs for the physical design pattern, wherein the plurality of possible mask designs corresponds to the plurality of possible neighborhoods.
26. A method for calculating a pattern to be manufactured on a substrate, the method comprising:
receiving a physical design pattern;
determining a plurality of possible neighborhoods for the physical design pattern;
generating a plurality of possible mask designs for the physical design pattern, wherein the plurality of possible mask designs corresponds to the plurality of possible neighborhoods;
using a neural network to calculate a plurality of possible patterns on the substrate, wherein the plurality of possible patterns on the substrate correspond to the plurality of possible mask designs, and the neural network comprises a plurality of output channels each of which outputs a different calculated possible pattern;
calculating a variation band from the plurality of possible patterns on the substrate; and
modifying the physical design pattern to reduce the variation band.