Semiconductor structure with extended contact structure
Semiconductor structures are provided. The semiconductor structure includes a substrate and nanostructures formed over the substrate. In addition, the nanostructures includes channel regions and source/drain regions. The semiconductor structure further includes a gate structure vertically sandwiched the channel regions of the nanostructures and a contact wrapping around and vertically sandwiched between the source/drain regions of the nanostructures.
1. A semiconductor structure, comprising:
a substrate;
nanostructures formed over the substrate, wherein the nanostructures comprise channel regions and source/drain regions, and the channel regions comprise a first channel region and a second channel region;
a gate structure vertically sandwiched the channel regions of the nanostructures, wherein a portion of the gate structure is vertically sandwiched between a bottom surface of the first channel region and a top surface of the second channel region; and
a contact wrapping around and vertically sandwiched between the source/drain regions of the nanostructures.
2. The semiconductor structure as claimed in claim 1 , further comprising:
inner spacers formed between the nanostructures,
wherein the inner spacers are sandwiched between the contact and the gate structure.
3. The semiconductor structure as claimed in claim 2 , wherein the inner spacers are in contact with the contact.
4. The semiconductor structure as claimed in claim 1 , wherein a bottom surface of the gate structure is substantially aligned with a bottom surface of the contact.
5. The semiconductor structure as claimed in claim 1 , further comprising:
silicide layers wrapping around the source/drain regions of the nanostructures.
6. The semiconductor structure as claimed in claim 1 , further comprising:
a doped region formed in the substrate under the source/drain regions of the nanostructures.
7. The semiconductor structure as claimed in claim 6 , wherein the contact is in direct contact with the doped region in the substrate.
8. The semiconductor structure as claimed in claim 1 , wherein a top surface of the contact is higher than a top surface of the gate structure.
9. A semiconductor structure, comprising:
a substrate;
nanostructures formed over the substrate and vertically separated from each other, wherein each of the nanostructures comprise:
a first channel region; and
a source/drain region adjacent to the first channel region;
a gate structure wrapping around the first channel regions of the nanostructures;
a contact formed over the source/drain regions of the nanostructures;
first inner spacers vertically sandwiched between the nanostructures and laterally separated the contact from the gate structure; and
a gate spacer formed over a topmost one of the nanostructures,
wherein a top surface of the contact is higher than a top surface of the gate spacer.
10. The semiconductor structure as claimed in claim 9 , wherein each of the nanostructures comprise:
a second channel region,
wherein the source/drain regions of the nanostructures are sandwiched between the second channel regions and the first channel regions of the nanostructures, and the nanostructures continuously extend from the first channel regions to the second channel regions.
11. The semiconductor structure as claimed in claim 10 , further comprising:
second inner spacers vertically sandwiched between the nanostructures,
wherein the first inner spacers and the second inner spacers are in contact with opposite sides of the contact.
12. The semiconductor structure as claimed in claim 9 ,
wherein the gate spacer vertically overlaps portions of the gate structure.
13. The semiconductor structure as claimed in claim 9 , further comprising:
a substrate source/drain region formed in the substrate, wherein the substrate source/drain region vertically overlaps the source/drain regions of the nanostructures.
14. The semiconductor structure as claimed in claim 13 , wherein a portion of the contact is vertically sandwiched between the substrate source/drain region and the source/drain region of a bottommost one of the nanostructures.
15. A semiconductor structure, comprising:
a substrate;
nanostructures longitudinally oriented along a first direction and vertically separated from each other, wherein the nanostructures comprise channel regions and doped regions at opposite sides of the channel regions;
a gate structure wrapping around the channel regions of the nanostructures;
a contact formed over the doped regions of the nanostructures; and
a gate spacer formed between the contact and the gate structure,
wherein the doped regions of the nanostructures partially extend under and vertically overlaps the gate spacer.
16. The semiconductor structure as claimed in claim 15 , wherein the contact has curved sidewall portions.
17. The semiconductor structure as claimed in claim 16 , further comprising:
inner spacers covering the curved sidewall portions of the contact.
18. The semiconductor structure as claimed in claim 15 , further comprising:
inner spacers vertically sandwiched between the nanostructures and laterally sandwiched between the contact and the gate structure.
19. The semiconductor structure as claimed in claim 18 , wherein the gate spacer is wider than the inner spacers in a cross-sectional view along the first direction.
20. The semiconductor structure as claimed in claim 18 , wherein the contact is in direct contact with a bottommost one of the inner spacers.