Stripped redistrubution-layer fabrication for package-top embedded multi-die interconnect bridge
An embedded multi-die interconnect bridge (EMIB) is fabricated on a substrate using photolithographic techniques, and the EMIB is separated from the substrate and placed on the penultimate layer of an integrated-circuit package substrate, below the top solder-resist layer. A low Z-height of the EMIB, allows for useful trace and via real estate below the EMIB, to be employed in the package substrate.
1. An integrated-circuit device package, comprising:
an interconnect bridge in a dielectric layer, the interconnect bridge having a top side and a bottom side opposite the top side, a first side between the top side and the bottom side, and a second side between the top side and the bottom side, wherein the dielectric layer is in contact with the top side and the first side of the interconnect bridge, the interconnect bridge comprising first bridge vias and second bridge vias, wherein an uppermost surface of the first bridge vias and the second bridge vias is at a same level as an uppermost surface of the dielectric layer;
a first via and a second via in and in contact with the dielectric layer, the first via and the second via laterally spaced apart from the first side of the interconnect bridge in a cross-sectional perspective, and the first via and the second via having an uppermost surface at a same level as the uppermost surface of the dielectric layer;
a first copper stud coupled to the first via, and a second copper stud coupled to the second via;
a third via and a fourth via in and in contact with the dielectric layer, the third via and the fourth via laterally spaced apart from the second side of the interconnect bridge in the cross-sectional perspective, and the third via and the fourth via having an uppermost surface at a same level as the uppermost surface of the dielectric layer;
a third copper stud coupled to the third via, and a fourth copper stud coupled to the fourth via;
a first integrated circuit chip coupled to the first bridge vias of the interconnect bridge, the first integrated circuit chip electrically coupled to the first copper stud and the second copper stud;
a second integrated circuit chip having a top side and a bottom side, the bottom side of the second integrated circuit chip coupled to the second bridge vias of the interconnect bridge, the second integrated circuit chip electrically coupled to the third copper stud and the fourth copper stud, and the second integrated circuit chip having through-silicon vias;
a third integrated circuit chip above the top side of the second integrated circuit chip, the third integrated circuit chip coupled to the through-silicon vias of the second integrated circuit chip; and
a package substrate beneath the interconnect bridge, the first via, the second via, the third via and the fourth via, the package substrate electrically coupled to the first via, the second via, the third via and the fourth via.
2. The interconnect bridge of claim 1 , wherein the first integrated circuit chip is coupled to the first bridge vias of the interconnect bridge by a plurality of first bridge copper studs, and wherein the second integrated circuit chip is coupled to the second bridge vias of the interconnect bridge by a plurality of second bridge copper studs.
3. The integrated-circuit device package of claim 1 , further comprising:
a fourth integrated circuit chip coupled to the top side of the second integrated circuit chip.
4. The integrated-circuit device package of claim 3 , further comprising:
a fifth integrated circuit chip coupled to the top side of the second integrated circuit chip.
5. The integrated-circuit device package of claim 4 , wherein the fourth integrated circuit chip is laterally adjacent to the third integrated circuit chip, and the fifth integrated circuit chip is laterally adjacent to the fourth integrated circuit chip.
6. The integrated-circuit device package of claim 4 , wherein each of the third integrated circuit chip, the fourth integrated circuit chip, and the fifth integrated circuit chip is directly attached to the top side of the second integrated circuit chip.
7. The integrated-circuit device package of claim 4 , further comprising:
a sixth integrated circuit chip coupled to a top side of the first integrated circuit chip.
8. The integrated-circuit device package of claim 1 , wherein the interconnect bridge is in direct contact with the dielectric layer, and wherein each of the first, second, third and fourth vias is in direct contact with the dielectric layer.
9. The integrated-circuit device package of claim 1 , further comprising:
a die attach film coupled to the bottom side of the interconnect bridge.
10. The integrated-circuit device package of claim 9 , further comprising:
a heat slug coupled to the die attach film.
11. An integrated-circuit device package, comprising:
an interconnect bridge in a dielectric layer, wherein the dielectric layer is in contact with a top side and the first side of the interconnect bridge, the interconnect bridge comprising a plurality of bridge vias, wherein an uppermost surface of the plurality of bridge vias is at a same level as an uppermost surface of the dielectric layer;
a first plurality of vias in and in contact with the dielectric layer, the first plurality of vias laterally spaced apart from a first side of the interconnect bridge, and the first plurality of vias having an uppermost surface at a same level as the uppermost surface of the dielectric layer;
a first plurality of conductive structures coupled to the first plurality of vias;
a second plurality of vias in and in contact with the dielectric layer, the second plurality of vias laterally spaced apart from a second side of the interconnect bridge, and the second plurality of vias having an uppermost surface at a same level as the uppermost surface of the dielectric layer;
a second plurality of conductive structures coupled to the second plurality of vias;
a first chip coupled to a first portion of the plurality of bridge vias, the first chip electrically coupled to the first plurality of conductive structures;
a second chip coupled to a second portion of the plurality of bridge vias, the second chip electrically coupled to the second plurality of conductive structures, and the second chip having through vias;
a third chip above the top side of the second chip, the third chip coupled to the through vias of the second chip; and
a package substrate beneath the interconnect bridge, the first plurality of vias, and the second plurality of vias.
12. The integrated-circuit device package of claim 11 , further comprising:
a fourth chip coupled to the top side of the second chip.
13. The integrated-circuit device package of claim 12 , further comprising:
a fifth chip coupled to the top side of the second chip.
14. The integrated-circuit device package of claim 13 , wherein the fourth chip is laterally adjacent to the third chip, and the fifth chip is laterally adjacent to the fourth chip.
15. The integrated-circuit device package of claim 13 , further comprising:
a sixth chip coupled to a top side of the first chip.
16. An integrated-circuit device package, comprising:
an interconnect bridge in a dielectric layer, the interconnect bridge having a top side and a bottom side opposite the top side, a first side between the top side and the bottom side, and a second side between the top side and the bottom side, wherein the dielectric layer is in contact with the top side and the first side of the interconnect bridge, the interconnect bridge comprising a plurality of bridge vias, wherein an uppermost surface of the plurality of bridge vias is at a same level as an uppermost surface of the dielectric layer;
vias in and in contact with the dielectric layer, the vias laterally spaced apart from the first side of the interconnect bridge and laterally spaced apart from the second side of the interconnect bridge in a cross-sectional perspective, and the vias having an uppermost surface at a same level as the uppermost surface of the dielectric layer;
copper studs coupled to the vias;
a first integrated circuit chip coupled to a first portion of the plurality of bridge vias and to a first portion of the copper studs;
a second integrated circuit chip having a top side and a bottom side, the bottom side of the second integrated circuit chip coupled to a second portion of the plurality of bridge vias and to a second portion of the copper studs, and the second integrated circuit chip having through-silicon vias;
a third integrated circuit chip above the top side of the second integrated circuit chip, the third integrated circuit chip coupled to the through-silicon vias of the second integrated circuit chip; and
a package substrate beneath the interconnect bridge and the vias, the package substrate electrically coupled to the vias.
17. The interconnect bridge of claim 16 , wherein the first integrated circuit chip is coupled to the first portion of the plurality of bridge vias by a first portion of bridge copper studs, and wherein the second integrated circuit chip is coupled to the second portion of the plurality of bridge vias by a second portion of bridge copper studs.
18. The integrated-circuit device package of claim 16 , further comprising:
a fourth integrated circuit chip coupled to the top side of the second integrated circuit chip.
19. The integrated-circuit device package of claim 18 , further comprising:
a fifth integrated circuit chip coupled to the top side of the second integrated circuit chip.
20. The integrated-circuit device package of claim 19 , wherein the fourth integrated circuit chip is laterally adjacent to the third integrated circuit chip, and the fifth integrated circuit chip is laterally adjacent to the fourth integrated circuit chip.