FinFET device and method
A semiconductor device includes a fin extending from a substrate, a gate stack over and along a sidewall of the fin, a spacer along a first sidewall of the gate stack and the sidewall of the fin, a dummy gate material along the sidewall of the fin, wherein the dummy gate material is between the spacer and the gate stack, and a first epitaxial source/drain region in the fin and adjacent the gate stack.
1. A semiconductor device, comprising:
a fin extending from a substrate, the fin having an upper surface, a first sidewall, and a second sidewall;
an isolation region along a sidewall of the fin, the fin extending higher than an upper surface of the isolation region;
a gate structure over the fin and the upper surface of the isolation region, the gate structure comprising a gate dielectric layer and a gate electrode;
a dielectric layer adjacent to the first sidewall of the fin and the gate structure in a top-down view;
a spacer structure contacting a first sidewall of the gate structure;
a corner structure between the spacer structure and the gate structure on the first sidewall of the fin in the top-down view, wherein the corner structure is a separate element from the spacer structure, wherein the dielectric layer is between the corner structure and the fin; and
an epitaxial source/drain region adjacent to the gate structure.
2. The semiconductor device of claim 1 , wherein a distance between the epitaxial source/drain region and the gate structure on the sidewall of the fin is greater than a distance between the epitaxial source/drain region and the corner structure on the sidewall of the fin in the top-down view.
3. The semiconductor device of claim 1 , wherein a width of the corner structure decreases as the corner structure extends away from the fin.
4. The semiconductor device of claim 1 , wherein the dielectric layer contacts the epitaxial source/drain region.
5. The semiconductor device of claim 1 , wherein the spacer structure contacts the dielectric layer.
6. The semiconductor device of claim 1 , wherein an interface between the corner structure and the gate structure is curved.
7. The semiconductor device of claim 1 , wherein the dielectric layer extends past opposite sidewalls of the corner structure.
8. A semiconductor device, comprising:
a fin extending from a substrate, the fin having an upper surface, a first sidewall, and a second sidewall;
an isolation region along the first sidewall and the second sidewall of the fin, the fin protruding above the isolation region;
a gate structure on the first sidewall of the fin and an upper surface of the isolation region, wherein the gate structure includes a conductive gate electrode;
a source/drain region in the fin and adjacent to the gate structure;
a dielectric layer on the first sidewall of the fin extending from the gate structure to the source/drain region;
a spacer on the dielectric layer on the first sidewall of the fin, the spacer contacting the gate structure; and
a corner structure along the first sidewall of the fin, wherein the corner structure is a different layer than the spacer, wherein the corner structure extends between the spacer and the gate structure along the first sidewall of the fin.
9. The semiconductor device of claim 8 , wherein the gate structure comprises a gate dielectric layer, wherein a sidewall of the corner structure contacts the gate dielectric layer.
10. The semiconductor device of claim 8 , wherein the corner structure comprises polysilicon or amorphous silicon.
11. The semiconductor device of claim 8 , wherein a width of the corner structure measured parallel to the first sidewall of the fin is between 2 nm and 30 nm.
12. The semiconductor device of claim 8 , wherein a thickness of the corner structure measured perpendicular to the first sidewall of the fin is between 2 nm and 20 nm.
13. The semiconductor device of claim 8 , wherein the dielectric layer extends further between the gate structure and the fin than the corner structure.
14. The semiconductor device of claim 13 , wherein the dielectric layer extends closer to the source/drain region than the corner structure.
15. A semiconductor device, comprising:
a fin extending from a substrate;
a gate stack over a top and along a sidewall of the fin, wherein the gate stack includes a conductive gate electrode;
an epitaxial source/drain region in the fin and adjacent to the gate stack;
a spacer along a first sidewall of the gate stack and the sidewall of the fin;
a corner structure positioned in a corner region of the sidewall of the fin and the gate stack, wherein the corner structure and the spacer are different layers, wherein the corner structure contacts the gate stack; and
a dielectric layer adjacent to the gate stack and separating the spacer and the corner structure from the sidewall of the fin.
16. The semiconductor device of claim 15 , wherein the dielectric layer contacts the epitaxial source/drain region.
17. The semiconductor device of claim 15 , wherein the corner structure has a triangular shape in a top-down view.
18. The semiconductor device of claim 15 , wherein the corner structure comprises polysilicon or amorphous silicon.
19. The semiconductor device of claim 15 , wherein the corner structure is between the gate stack and the fin along a line perpendicular to the sidewall of the fin in a top-down view.
20. The semiconductor device of claim 15 , wherein the gate stack comprises a gate dielectric layer, wherein the corner structure contacts the gate dielectric layer and the spacer.