IP Library Granted Patent US 12,444,702
Granted Patent B2
US 12,444,702 · App. 17/747,740 · Granted Oct 14, 2025

Flip-chip enhanced quad flat no-lead electronic device with conductor backed coplanar waveguide transmission line feed in multilevel package substrate

Inventors: Rajen Manicon Murugan (Dallas, TX); Yiqi Tang (Allen, TX)
Assignee: TEXAS INSTRUMENTS INCORPORATED
H01L23/66H01L23/49805H01L23/49822H01L23/49838H01L24/08H01L24/09H01L24/16H01L2223/6633H01L2223/6677H01L2223/6688H01L2224/0801H01L2224/0913H01L2224/1601H01L2224/16235H01L2924/1421H01L2924/182
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Quick Facts
Patent No.
US 12,444,702
App. No.
17/747,740
Granted
Oct 14, 2025
Kind
B2
Abstract

An electronic device includes a multilevel package substrate with first, second, third, and fourth levels, a semiconductor die mounted to the first level, and a conductor backed coplanar waveguide transmission line feed with an interconnect and a conductor, the interconnect including coplanar first, second, and third conductive lines extending in the first level along a first direction from respective ends to an antenna, the second and third conductive lines spaced apart from opposite sides of the first conductive line along an orthogonal second direction, and the conductor extending in the third level under the interconnect and under the antenna.

Claims (60)

1. An electronic device, comprising:

a multilevel package substrate having a first level, a second level, a third level, and a fourth level, the first, second, third, and fourth levels each including a respective dielectric layer and respective patterned conductive features, the first, second, third, and fourth levels extending in respective first, second, third, and fourth planes of a first direction and an orthogonal second direction, the second level between the first and third levels along a third direction that is orthogonal to the first and second directions, and the third level between the second and fourth levels along the third direction;

conductive leads in the fourth level of the multilevel package substrate;

a semiconductor die mounted to the first level of the multilevel package substrate and having conductive pads and conductive terminals coupled to respective ones of the conductive pads;

a package structure that encloses the semiconductor die and a portion of the multilevel package substrate; and

a conductor backed coplanar waveguide transmission line feed, including an interconnect and a conductor, the interconnect including coplanar first, second, and third conductive lines extending in the first level along the first direction from respective ends to an antenna, the second and third conductive lines spaced apart from opposite sides of the first conductive line along the second direction, the ends of the first, second, and third conductive lines coupled to respective ones of the conductive terminals of the semiconductor die, and the conductor extending in the third level of the multilevel package substrate under the interconnect and under the antenna.

2. The electronic device of claim 1 , further comprising a conductive wall extending around the antenna in the first, second, and third levels.

3. The electronic device of claim 2 , wherein the conductive wall is connected to the second and third conductive lines of the interconnect.

4. The electronic device of claim 2 , wherein:

the first, second, and third conductive lines have lengths along the first direction of 400 μm or more and 600 μm or less;

the first conductive line has a width along the second direction of 32 μm or more and 48 μm or less;

the second and third conductive lines are spaced apart from the respective opposite sides of the first conductive line along the second direction by a spacing distance of 21.6 μm or more and 32.4 μm or less; and

the conductive terminals have a diameter in a plane of the first and second directions of 24 μm or more and 36 μm or less.

5. The electronic device of claim 1 , wherein:

the first, second, and third conductive lines have lengths along the first direction of 400 μm or more and 600 μm or less;

the first conductive line has a width along the second direction of 32 μm or more and 48 μm or less;

the second and third conductive lines are spaced apart from the respective opposite sides of the first conductive line along the second direction by a spacing distance of 21.6 μm or more and 32.4 μm or less; and

the conductive terminals have a diameter in a plane of the first and second directions of 24 μm or more and 36 μm or less.

6. The electronic device of claim 5 , wherein:

the conductive pads have a length along the first direction of 64 μm or more and 96 μm or less;

the conductive pads have a width along the second direction of 32 μm or more and 48 μm or less; and

centers of the conductive pads are spaced apart from one another along the second direction by a pitch distance of 48 μm or more and 72 μm or less.

7. The electronic device of claim 1 , wherein:

the conductive pads have a length along the first direction of 64 μm or more and 96 μm or less;

the conductive pads have a width along the second direction of 32 μm or more and 48 μm or less; and

centers of the conductive pads are spaced apart from one another along the second direction by a pitch distance of 48 μm or more and 72 μm or less.

8. The electronic device of claim 1 , wherein:

the first, second, and third conductive lines have lengths along the first direction of 400 μm or more and 600 μm or less;

the first conductive line has a width along the second direction of 48 μm or more and 72 μm or less;

the second and third conductive lines are spaced apart from the respective opposite sides of the first conductive line along the second direction by a spacing distance of 27.2 μm or more and 40.8 μm or less; and

the conductive terminals have a diameter in a plane of the first and second directions of 28 μm or more and 42 μm or less.

9. The electronic device of claim 8 , wherein:

the conductive pads have a length along the first direction of 80 μm or more and 120 μm or less;

the conductive pads have a width along the second direction of 48 μm or more and 72 μm or less; and

centers of the conductive pads are spaced apart from one another along the second direction by a pitch distance of 76 μm or more and 114 μm or less.

10. The electronic device of claim 1 , wherein:

the conductive pads have a length along the first direction of 80 μm or more and 120 μm or less;

the conductive pads have a width along the second direction of 48 μm or more and 72 μm or less; and

centers of the conductive pads are spaced apart from one another along the second direction by a pitch distance of 76 μm or more and 114 μm or less.

11. A multilevel package substrate, comprising:

a first level having a first dielectric layer and first patterned conductive features in a first plane of a first direction and an orthogonal second direction;

a second level having a second dielectric layer and second patterned conductive features in a second plane of the first and second directions;

a third level having a third dielectric layer and third patterned conductive features in a third plane of the first and second directions, the second level between the first and third levels along a third direction that is orthogonal to the first and second directions;

a fourth level having a fourth dielectric layer and fourth patterned conductive features in a fourth plane of the first and second directions, the third level between the second and fourth levels along the third direction; and

a conductor backed coplanar waveguide transmission line feed, including an interconnect and a conductor, the interconnect including coplanar first, second, and third conductive lines extending in the first level along the first direction from respective ends to an antenna, the second and third conductive lines spaced apart from opposite sides of the first conductive line along the second direction, and the conductor extending in the third level of the multilevel package substrate under the interconnect and under the antenna.

12. The multilevel package substrate of claim 11 , further comprising a conductive wall extending around the antenna in the first, second, and third levels.

13. The multilevel package substrate of claim 12 , wherein the conductive wall is connected to the second and third conductive lines of the interconnect.

14. The multilevel package substrate of claim 12 , wherein:

the first, second, and third conductive lines have lengths along the first direction of 400 μm or more and 600 μm or less;

the first conductive line has a width along the second direction of 32 μm or more and 48 μm or less; and

the second and third conductive lines are spaced apart from the respective opposite sides of the first conductive line along the second direction by a spacing distance of 21.6 μm or more and 32.4 μm or less.

15. The multilevel package substrate of claim 11 , wherein:

the first, second, and third conductive lines have lengths along the first direction of 400 μm or more and 600 μm or less;

the first conductive line has a width along the second direction of 32 μm or more and 48 μm or less; and

the second and third conductive lines are spaced apart from the respective opposite sides of the first conductive line along the second direction by a spacing distance of 21.6 μm or more and 32.4 μm or less.

16. The multilevel package substrate of claim 11 , wherein:

the first, second, and third conductive lines have lengths along the first direction of 400 μm or more and 600 μm or less;

the first conductive line has a width along the second direction of 48 μm or more and 72 μm or less;

the second and third conductive lines are spaced apart from the respective opposite sides of the first conductive line along the second direction by a spacing distance of 27.2 μm or more and 40.8 μm or less; and

the conductive terminals have a diameter in a plane of the first and second directions of 28 μm or more and 42 μm or less.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 18, 2022
From: MURUGAN, RAJEN MANICON; TANG, YIQI
To: TEXAS INSTRUMENTS INCORPORATED
Reel/Frame 059950/0299 →
Continuity (2)
Provisional Application 63228566 · Aug 2, 2021
Related Publication 20230044284A1 · Feb 9, 2023
References Cited (65)
US 3388339A · Malnar et al. · 1968 [cited by applicant]
US 8217724B2 · Briggs et al. · 2012 [cited by applicant]
US 8624682B2 · Ridley et al. · 2014 [cited by applicant]
US 8680854B2 · Dyer et al. · 2014 [cited by applicant]
US 8836327B2 · French et al. · 2014 [cited by applicant]
US 8906470B2 · Overstolz et al. · 2014 [cited by applicant]
US 9201404B2 · Harasaka et al. · 2015 [cited by applicant]
US 9529334B2 · Herbsommer et al. · 2016 [cited by applicant]
US 11348886B2 · Wang · 2022 [cited by examiner]
US 11837775B2 · Tang · 2023 [cited by examiner]
US 20050007118A1 · Kitching et al. · 2005 [cited by applicant]
US 20050271250A1 · Vallone et al. · 2005 [cited by applicant]
US 20060022761A1 · Abeles et al. · 2006 [cited by applicant]
US 20070247241A1 · Bruan et al. · 2007 [cited by applicant]
US 20100156547A1 · McGuyer et al. · 2010 [cited by applicant]
US 20100189605A1 · Schmid et al. · 2010 [cited by applicant]
US 20100193935A1 · Lachner · 2010 [cited by examiner]
US 20110128082A1 · Maki et al. · 2011 [cited by applicant]
US 20110147367A1 · Borwick, III et al. · 2011 [cited by applicant]
US 20130015850A1 · Lindorfer et al. · 2013 [cited by applicant]
US 20130021208A1 · Seok et al. · 2013 [cited by applicant]
US 20130026586A1 · Seok et al. · 2013 [cited by applicant]
US 20130044921A1 · In et al. · 2013 [cited by applicant]
US 20130059551A1 · Ginsburg et al. · 2013 [cited by applicant]
US 20130147472A1 · French et al. · 2013 [cited by applicant]
US 20130176703A1 · Hopper et al. · 2013 [cited by applicant]
US 20130299967A1 · Daniels et al. · 2013 [cited by applicant]
US 20140285289A1 · Herbsommer et al. · 2014 [cited by applicant]
US 20140287701A1 · Herbsommer et al. · 2014 [cited by applicant]
US 20140287703A1 · Herbsommer et al. · 2014 [cited by applicant]
US 20140347074A1 · Nadeau · 2014 [cited by applicant]
US 20140368377A1 · Nadeau et al. · 2014 [cited by applicant]
US 20140373599A1 · Trombley et al. · 2014 [cited by applicant]
US 20150001694A1 · Hopper et al. · 2015 [cited by applicant]
US 20150027908A1 · Parsa et al. · 2015 [cited by applicant]
US 20150028866A1 · Parsa et al. · 2015 [cited by applicant]
US 20150084707A1 · Maki · 2015 [cited by applicant]
US 20150244382A1 · Ishihara · 2015 [cited by applicant]
US 20150277386A1 · Passilly et al. · 2015 [cited by applicant]
US 20150280320A1 · Haroun et al. · 2015 [cited by applicant]
US 20150295305A1 · Herbsommer et al. · 2015 [cited by applicant]
US 20160276731A1 · Seok et al. · 2016 [cited by applicant]
US 20170093010A1 · Herbsommer et al. · 2017 [cited by applicant]
US 20180156875A1 · Herbsommer et al. · 2018 [cited by applicant]
US 20190013288A1 · Kim et al. · 2019 [cited by applicant]
US 20190103653A1 · Jeong · 2019 [cited by examiner]
US 20190115643A1 · Khan · 2019 [cited by examiner]
US 20190152773A1 · Herbsommer et al. · 2019 [cited by applicant]
US 20190334220A1 · Ali et al. · 2019 [cited by applicant]
US 20190346814A1 · Fruehling et al. · 2019 [cited by applicant]
US 20200118949A1 · Moallem et al. · 2020 [cited by applicant]
US 20200194871A1 · Moallem et al. · 2020 [cited by applicant]
US 20200212536A1 · Gupta et al. · 2020 [cited by applicant]
US 20200241480A1 · Bahr et al. · 2020 [cited by applicant]
US 20200259239A1 · Moallem et al. · 2020 [cited by applicant]
US 20200259240A1 · Moallem · 2020 [cited by applicant]
US 20200403299A1 · Gupta et al. · 2020 [cited by applicant]
US 20210050652A1 · Moallem et al. · 2021 [cited by applicant]
US 20210075081A1 · Kamphuis · 2021 [cited by examiner]
US 20220376378A1 · Tang · 2022 [cited by examiner]
Y. Zhang and J. Mao, “An Overview of the Development of Antenna-in-Package Technology for Highly Integrated Wireless Devices,” in Proceedings of the IEEE, vol. 107, No. 11, pp. 2265-2280, Nov. 2019, doi: 10.1109/JPROC.2… [cited by applicant]
F. Ahmed, M. Furqan and A. Stelzer, “120-GHz and 240-GHz Broadband Bow-Tie Antennas in eWLB Package for High Resolution Radar Applications,” 2018 48th European Microwave Conference (EuMC), 2018, pp. 1109-1112, doi: 10.2… [cited by applicant]
S. Beer and T. Zwick, “122 GHz antenna-integration in a plastic package based on a flip chip interconnect,” 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, 2011, pp. … [cited by applicant]
C. Wang et al., “InFO_AiP Technology for High Performance and Compact 5G Millimeter Wave System Integration,” 2018 IEEE 68th Electronic Components and Technology Conference (ECTC), 2018, pp. 202-207, doi: 10.1109/ECTC.2… [cited by applicant]
A. O. Watanabe et al., “3D Glass-Based Panel-Level Package with Antenna and Low-Loss Interconnects for Millimeter-Wave 5G Applications,” 2019 IEEE MTT-S International Microwave Conference on Hardware and Systems for 5G … [cited by applicant]