Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate support
Described herein is a technique capable of preventing a constituent contained in an aluminum alloy from being vaporized and scattered when the aluminum alloy is used in a process vessel which is heated to a high temperature. According to one aspect thereof, there is provided a technique including a process chamber; a substrate support configured to support a substrate in the process chamber; and a heater configured to heat the substrate supported by the substrate support, wherein the substrate support is made of an aluminum alloy containing magnesium, and a surface of the substrate support is coated by a coating film of aluminum oxide containing magnesium oxide and being substantially free of magnesium.
1. A substrate processing apparatus comprising:
a process chamber in which a substrate is processed;
a substrate support configured to support the substrate in the process chamber;
a heater configured to heat the substrate supported by the substrate support; and
a heat processing chamber different from the process chamber,
wherein the substrate support is made of an aluminum alloy,
a surface of the substrate support is coated by a coating film of aluminum oxide by heating the surface of the substrate support in the heat processing chamber to a predetermined first temperature under an atmospheric atmosphere before the substrate is processed in the process chamber while being held by the substrate support and maintaining a temperature of the surface of the substrate support at the predetermined first temperature for a predetermined time under the atmospheric atmosphere in the heat processing chamber.
2. The substrate processing apparatus of claim 1 , further comprising:
a controller configured to control the heater so as to heat the surface of the substrate support and the substrate such that the temperature of the surface of the substrate support reaches a predetermined second temperature while the substrate is being supported by the substrate support.
3. The substrate processing apparatus of claim 2 , wherein the predetermined first temperature is equal to or higher than the predetermined second temperature.
4. The substrate processing apparatus of claim 2 , wherein the predetermined second temperature is higher than 400° C.
5. The substrate processing apparatus of claim 1 , wherein the predetermined first temperature is 450° C. or higher.
6. The substrate processing apparatus of claim 1 , wherein the atmospheric atmosphere contains water vapor.
7. The substrate processing apparatus of claim 1 , wherein (b) is performed under an atmospheric pressure.
8. The substrate processing apparatus of claim 1 , wherein a thickness of the coating film of aluminum oxide is 1 μm or more.
9. The substrate processing apparatus of claim 1 , wherein the coating film of aluminum oxide is provided on at least an entire exposed portion of the surface of the substrate support exposed to the process chamber.
10. The substrate processing apparatus of claim 1 , wherein a magnesium content in the aluminum alloy is 2 wt % or more.
11. A method of manufacturing a semiconductor device, comprising:
(A) placing a substrate on a substrate support made of an aluminum alloy containing magnesium, wherein a surface of the substrate support contains magnesium oxide and is coated by a coating film of aluminum oxide, and the coating film of aluminum oxide is formed on the surface of the substrate support by performing:
(a) before the substrate is processed in a process chamber while being held by the substrate support, heating the surface of the substrate support in a heat processing chamber, which is different from the process chamber, to a predetermined first temperature under an atmospheric atmosphere; and
(b) maintaining a temperature of the surface of the substrate support at the predetermined first temperature for a predetermined time under the atmospheric atmosphere in the heat processing chamber; and
(B) heating the surface of the substrate support and the substrate such that the temperature of the surface of the substrate support reaches a predetermined second temperature while the substrate is being supported by the substrate support.
12. A method of processing a substrate support made of an aluminum alloy containing magnesium, the method comprising:
(a) before a substrate is processed in a process chamber while being held by the substrate support, heating a surface of the substrate support in a heat processing chamber, which is different from the process chamber, to a predetermined first temperature under an atmospheric atmosphere; and
(b) forming a coating film of aluminum oxide on the surface of the substrate support by maintaining a temperature of the surface of the substrate support at the predetermined first temperature for a predetermined time under the atmospheric atmosphere in the heat processing chamber.
13. The method of claim 12 , wherein the predetermined first temperature is 450° C. or higher.
14. The method of claim 12 , wherein a thickness of the coating film of aluminum oxide is 1 μm or more.
15. The method of claim 12 , wherein (b) is performed under an atmospheric pressure.
16. The method of claim 12 , wherein the coating film of aluminum oxide is provided on at least an entire exposed portion of the surface of the substrate support exposed to the process chamber in which the substrate is processed on the substrate support.
17. The method of claim 12 , wherein a magnesium content in the aluminum alloy is 2 wt % or more.