IP Library Granted Patent US 12,453,099
Granted Patent B2
US 12,453,099 · App. 18/680,742 · Granted Oct 21, 2025

Integrated assemblies and methods of forming integrated assemblies

Inventors: Giorgio Servalli (Fara Gera d'Adda, IT); Marcello Mariani (Milan, IT)
Assignee: Micron Technology, Inc.
H10B51/50H01L25/0655H10D30/6728H10B53/30
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Quick Facts
Patent No.
US 12,453,099
App. No.
18/680,742
Granted
Oct 21, 2025
Kind
B2
Abstract

Some embodiments include an integrated assembly having first and second pillars of semiconductor material. The first pillar includes a first source/drain region, and the second pillar includes a second source/drain region. First and second bottom electrodes are coupled with the first and second source/drain regions, respectively. The first and second source/drain regions are spaced from one another by an intervening region. First and second leaker-device-structures extend into the intervening region from the first and second bottom electrodes, respectively. Top-electrode-material extends into the intervening region and contacts the first and second leaker-device-structures. Ferroelectric-insulative-material is between the top-electrode-material and the bottom electrodes. Some embodiments include methods of forming integrated assemblies.

Claims (42)

1. A capacitor, comprising:

a bottom electrode;

a top electrode;

an insulative material between the top electrode and the bottom electrode; and

a leaker device extending to the bottom electrode and to the top electrode, the entire structure of the leaker device is in a single plane.

2. The capacitor of claim 1 wherein the leaker device is along a lower portion of the bottom electrode.

3. The capacitor of claim 1 wherein the leaker device is along an upper portion of the bottom electrode.

4. The capacitor of claim 1 wherein the bottom electrode is configured as angle plates.

5. The capacitor of claim 1 wherein the bottom electrode is configured as L-shaped plates.

6. The capacitor of claim 1 wherein the bottom electrode comprises a vertically-extending leg joining to a horizontally-extending leg.

7. The capacitor of claim 6 wherein the vertically-extending leg is longer than the horizontally-extending leg.

8. The capacitor of claim 1 wherein the leaker device has a thickness within a range of from about 2 Å to about 20 Å.

9. The capacitor of claim 1 wherein the leaker device has a thickness within a range of from about 6 Å to about 15 Å.

10. The capacitor of claim 1 wherein the leaker device comprises one or more of Ti, Ni and Nb, in combination with one or more of Ge, Si, O, N and C.

11. The capacitor of claim 1 wherein the leaker device comprises one or more of Si, Ge, SiN, TiSiN, TiO, TiN, NiO, NiON and TiON, where the chemical formulas indicate primary constituents rather than particular stoichiometries.

12. The capacitor of claim 1 wherein the leaker device comprises titanium, oxygen and nitrogen.

13. A capacitor, comprising:

a bottom electrode;

a top electrode;

a ferroelectric-insulative-material between the top electrode and the bottom electrode; and

a leaker device extending to the bottom electrode and to the top electrode, and contacting opposite sides of the top electrode.

14. The capacitor of claim 13 wherein the ferroelectric-insulative-material comprises one or more of zirconium, zirconium oxide, niobium, niobium oxide, hafnium, hafnium oxide, lead zirconium titanate, and barium strontium titanate.

15. The capacitor of claim 13 wherein the ferroelectric-insulative-material comprises dopant comprising one or more of silicon, aluminum, lanthanum, yttrium, erbium, calcium, magnesium and strontium.

16. The capacitor of claim 13 wherein the bottom electrode is configured as angle plates.

17. The capacitor of claim 13 wherein the bottom electrode is configured as L-shaped plates.

18. The capacitor of claim 13 wherein the bottom electrode comprises a vertically-extending leg joining to a horizontally-extending leg.

19. The capacitor of claim 18 wherein the vertically-extending leg is longer than the horizontally-extending leg.

20. The capacitor of claim 18 wherein the leaker device contacts the vertically-extending leg of the bottom electrode.

21. A capacitor, comprising:

a bottom electrode;

a top electrode;

an insulative material between the top electrode and the bottom electrode; and

a leaker device extending to the bottom electrode and to the top electrode, and extending through the insulative material.

22. The capacitor of claim 21 wherein the leaker device contacts only one side of the bottom electrode.

23. The capacitor of claim 21 wherein the leaker device contacts opposite sides of the top electrode.

24. A capacitor, comprising:

a bottom electrode;

a top electrode;

an insulative material between the top electrode and the bottom electrode; and

a leaker device extending to the bottom electrode and to the top electrode, and contacting only one side of bottom electrode.

25. The capacitor of claim 24 wherein the entire structure of the leaker device is in a single plane.

26. The capacitor of claim 24 wherein the leaker device contacts opposite sides of the top electrode.

Continuity (2)
Continuation 17379012 · Jul 19, 2021
Related Publication 20240324236A1 · Sep 26, 2024
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