IP Library › Granted Patent US 12,467,733
Granted Patent B2
US 12,467,733 · App. 18/002,181 · Granted Nov 11, 2025

Chromatic confocal measuring device

Inventors: Christoph Dietz (Obertshausen, DE); Philipp Rohrmann (Neu-Isenburg, DE); Stephan Weiss (Rodgau, DE)
Assignee: Precitec Optronik GmbH
G01B9/02015
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Quick Facts
Patent No.
US 12,467,733
App. No.
18/002,181
Granted
Nov 11, 2025
Kind
B2
Abstract

An optical measuring device includes a measuring head with an imaging optical unit and an evaluation unit, wherein the measuring head is connected to the evaluation unit by way of two light-guiding fibers, wherein the evaluation unit includes a light source whose light is guided through the first light-guiding fiber into the measuring head and wherein light reflected by the measurement object is guided back through the measuring head and into a second light-guiding fiber by means of a beam splitter, in such a way that outgoing and returning light are separated, wherein the fiber ends are in mutually conjugate positions, wherein the beam splitter and the fiber ends are arranged together in a connector that is separably connected to the measuring head.

Claims (27)

1 . An optical measuring device, comprising:

a measuring head comprising imaging optics and an evaluation unit, the measuring head defining a recess,

wherein the measuring head is connected to the evaluation unit by two light-conducting fibers,

wherein the evaluation unit comprises a light source, the light of which is guided into the measuring head through a first light-conducting fiber of the two light-conducting fibers,

wherein light reflected from an object to be measured is guided back through the measuring head and into a second light-conducting fiber of the two light-conducting fibers by means of a beam splitter such that outgoing and return light are separated,

wherein the fiber ends are located in conjugate positions with respect to each other,

wherein the beam splitter and the fiber ends are arranged together in a connector that is separably connected to the measuring head, the connector being positioned within the recess, and

wherein the connector is configured to be detached from the measuring head and then, in the same condition, reattached to the measuring head.

2 . The optical measuring device according to claim 1 , wherein first and second fiber ends of the fiber ends respectively form confocal apertures.

3 . The optical measuring device according to claim 1 , wherein the connector comprises at least one aperture arrangement that forms a confocal aperture.

4 . The optical measuring device according to claim 3 , wherein the at least one aperture arrangement comprises a plurality of sub-apertures.

5 . The optical measuring device according to claim 3 , wherein the connector comprises a first aperture arrangement and a second aperture arrangement, wherein the first aperture arrangement and the second aperture arrangement are identically configured.

6 . The optical measuring device according to claim 1 , wherein the optical measuring device measures according to the chromatic-confocal principle.

7 . The optical measuring device according to claim 1 , wherein the optical measuring device measures according to the spectral interferometric principle.

8 . The optical measuring device according to claim 1 , wherein the connector is configured such that the fiber ends are positioned relative to the measuring head in a precisely repeatable manner.

9 . The optical measuring device according to claim 8 , wherein the connector has a cone shape or a truncated cone.

10 . The optical measuring device according to claim 1 , wherein the connector comprises a protective glass.

11 . The optical measuring device according to claim 1 , wherein the measuring head is connected to the evaluation unit by at least four light-conducting fibers, wherein the fibers are each arranged in conjugate pairs.

12 . The optical measuring device according to claim 1 , wherein the beam splitter and/or a protective glass of the device are provided with an anti-reflective coating.

13 . The optical measuring device according to claim 1 , wherein the evaluation unit comprises a spectrometer that images the measuring light emitted by the second light-conducting fiber spectrally resolved onto a detector row, wherein the imaging is configured to be anamorphic so that the imaging scale in the direction of the detector row differs from the imaging scale orthogonal to the direction of the detector row.

14 . The optical measuring device according to claim 8 , wherein the fiber ends are positioned relative to the measuring head in a precisely repeatable manner within predetermined tolerances.

15 . The optical measuring device according to claim 11 , wherein the fibers are each arranged in two lines.

16 . The optical measuring device according to claim 1 , wherein the connector is detachable from the measuring head and replaceable with a new connector without recalibration of the optical measuring device before operation.

17 . The optical measuring device according to claim 1 , wherein the connector is located at a defined lateral position with respect to an optical axis of the imaging optics.

18 . The optical measuring device according to claim 17 , wherein the connector is centered in the recess.

19 . The optical measuring device according to claim 1 , wherein the first connector is detachable from the measuring head and replaceable with a second connector that maintains the relative positioning of the confocal apertures with respect to the imaging optics.

20 . The optical measuring device according to claim 9 , wherein the recess is cone-shaped.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 20, 2022
From: DIETZ, CHRISTOPH; ROHRMANN, PHILIPP; WEISS, STEPHAN
To: PRECITEC OPTRONIK GMBH
Reel/Frame 062152/0050 →
Priority Claims (2)
DE 10 2020 116 215.4 · Jun 19, 2020 · national
DE 10 2021 104 190.2 · Feb 23, 2021 · national
Continuity (1)
Related Publication 20230417533A1 · Dec 28, 2023
References Cited (259)
US 4861131A · Bois et al. · 1989 [cited by applicant]
US 5276631A · Popovic et al. · 1994 [cited by applicant]
US 5392124A · Barbee · 1995 [cited by applicant]
US 5532815A · Kipman et al. · 1996 [cited by applicant]
US 5636027A · Spengler · 1997 [cited by examiner]
US 5691540A · Halle et al. · 1997 [cited by applicant]
US 5905572A · Li · 1999 [cited by applicant]
US 6057920A · Fercher et al. · 2000 [cited by applicant]
US 6098895A · Walzel et al. · 2000 [cited by applicant]
US 6099522A · Knopp et al. · 2000 [cited by applicant]
US 6396069B1 · Macpherson et al. · 2002 [cited by applicant]
US 6628397B1 · Nikoonahad et al. · 2003 [cited by applicant]
US 6672943B2 · Vogtmann et al. · 2004 [cited by applicant]
US 6673654B2 · Ohno et al. · 2004 [cited by applicant]
US 6686270B1 · Subramanian et al. · 2004 [cited by applicant]
US 6768552B2 · Takahashi et al. · 2004 [cited by applicant]
US 6806969B2 · Clifford, Jr. et al. · 2004 [cited by applicant]
US 6887126B2 · Brouillette et al. · 2005 [cited by applicant]
US 6897964B2 · Takahashi et al. · 2005 [cited by applicant]
US 7271916B2 · Jasapara et al. · 2007 [cited by applicant]
US 7306696B2 · Lian et al. · 2007 [cited by applicant]
US 7307735B2 · Hecht et al. · 2007 [cited by applicant]
US 7443517B2 · Sawabe et al. · 2008 [cited by applicant]
US 7477401B2 · Marx et al. · 2009 [cited by applicant]
US 7525732B2 · Uehara et al. · 2009 [cited by applicant]
US 7652774B2 · Lian et al. · 2010 [cited by applicant]
US 7705995B1 · Johs et al. · 2010 [cited by applicant]
US 7738113B1 · Marx et al. · 2010 [cited by applicant]
US 7826068B2 · Czerkas · 2010 [cited by applicant]
US 7853429B2 · Fettig et al. · 2010 [cited by applicant]
US 7935217B2 · Yashiki et al. · 2011 [cited by applicant]
US 8716039B2 · Dusemund · 2014 [cited by applicant]
US 8982339B2 · Schonleber et al. · 2015 [cited by applicant]
US 9295391B1 · Tearney · 2016 [cited by applicant]
US 9297645B2 · Schonleber · 2016 [cited by applicant]
US 9494409B2 · Schonleber · 2016 [cited by applicant]
US 9500471B2 · Michelt · 2016 [cited by applicant]
US 9677871B2 · Schonleber · 2017 [cited by applicant]
US 9982994B2 · Schonleber et al. · 2018 [cited by applicant]
US 10228551B1 · Dietz et al. · 2019 [cited by applicant]
US 10234265B2 · Schönleber et al. · 2019 [cited by applicant]
US 10466357B1 · Dietz · 2019 [cited by applicant]
US 10725178B2 · Dietz · 2020 [cited by applicant]
US 11460577B2 · Dietz · 2022 [cited by applicant]
US 20020001078A1 · Gobel · 2002 [cited by examiner]
US 20020148983A1 · Inoue et al. · 2002 [cited by applicant]
US 20020153500A1 · Fordahl et al. · 2002 [cited by applicant]
US 20030016353A1 · Detalle et al. · 2003 [cited by applicant]
US 20030090671A1 · Takahashi et al. · 2003 [cited by applicant]
US 20040021874A1 · Shimmick · 2004 [cited by applicant]
US 20040073081A1 · Schramm · 2004 [cited by examiner]
US 20040185582A1 · Kueny · 2004 [cited by applicant]
US 20040262529A1 · Yoshida et al. · 2004 [cited by applicant]
US 20050003642A1 · Hecht et al. · 2005 [cited by applicant]
US 20050073692A1 · De Groot · 2005 [cited by applicant]
US 20050140981A1 · Waelti · 2005 [cited by applicant]
US 20050237537A1 · Leizerson et al. · 2005 [cited by applicant]
US 20050248771A1 · Eussen et al. · 2005 [cited by applicant]
US 20060132790A1 · Gutin · 2006 [cited by applicant]
US 20060194419A1 · Araki · 2006 [cited by applicant]
US 20070030483A1 · Everett · 2007 [cited by examiner]
US 20070046948A1 · Podoleanu et al. · 2007 [cited by applicant]
US 20070086018A1 · Shih et al. · 2007 [cited by applicant]
US 20070148792A1 · Marx et al. · 2007 [cited by applicant]
US 20070188765A1 · Zhao et al. · 2007 [cited by applicant]
US 20070231717A1 · Rivers et al. · 2007 [cited by applicant]
US 20070258095A1 · Oliver et al. · 2007 [cited by applicant]
US 20080013078A1 · Podoleanu et al. · 2008 [cited by applicant]
US 20080013960A1 · Tearney et al. · 2008 [cited by applicant]
US 20080151237A1 · Lian et al. · 2008 [cited by applicant]
US 20090031792A1 · Fan et al. · 2009 [cited by applicant]
US 20090059239A1 · Hoffmann et al. · 2009 [cited by applicant]
US 20090078888A1 · Namba et al. · 2009 [cited by applicant]
US 20090097806A1 · Viellerobe et al. · 2009 [cited by applicant]
US 20090128824A1 · Leitgeb et al. · 2009 [cited by applicant]
US 20090250635A1 · Sykora et al. · 2009 [cited by applicant]
US 20090257065A1 · Hauger et al. · 2009 [cited by applicant]
US 20090262353A1 · Benvegnu et al. · 2009 [cited by applicant]
US 20090268020A1 · Buckland et al. · 2009 [cited by applicant]
US 20090268209A1 · Waelti et al. · 2009 [cited by applicant]
US 20090273782A1 · Yoo et al. · 2009 [cited by applicant]
US 20100007894A1 · Suehira · 2010 [cited by applicant]
US 20100051068A1 · Miyanari · 2010 [cited by applicant]
US 20100110376A1 · Everett et al. · 2010 [cited by applicant]
US 20100157308A1 · Xie · 2010 [cited by applicant]
US 20100265493A1 · Jiang et al. · 2010 [cited by applicant]
US 20100283842A1 · Guissin et al. · 2010 [cited by applicant]
US 20100321671A1 · Marx et al. · 2010 [cited by applicant]
US 20110085136A1 · Ferguson et al. · 2011 [cited by applicant]
US 20110180521A1 · Quitter et al. · 2011 [cited by applicant]
US 20110222070A1 · Nagai et al. · 2011 [cited by applicant]
US 20110292375A1 · Marx et al. · 2011 [cited by applicant]
US 20120050723A1 · Emtman et al. · 2012 [cited by applicant]
US 20120200859A1 · Breitenstein et al. · 2012 [cited by applicant]
US 20120206710A1 · Niemela et al. · 2012 [cited by applicant]
US 20120238869A1 · Schmitt et al. · 2012 [cited by applicant]
US 20120257207A1 · Marx et al. · 2012 [cited by applicant]
US 20120257213A1 · Schonleber · 2012 [cited by applicant]
US 20120320380A1 · Schonleber · 2012 [cited by applicant]
US 20130034918A1 · Dusemund et al. · 2013 [cited by applicant]
US 20130070732A1 · Noh et al. · 2013 [cited by applicant]
US 20130120740A1 · Schonleber · 2013 [cited by applicant]
US 20130162978A1 · Yazdanfar et al. · 2013 [cited by applicant]
US 20140368830A1 · Michelt · 2014 [cited by applicant]
US 20150260504A1 · Schonleber · 2015 [cited by applicant]
US 20170227350A1 · Sarunic et al. · 2017 [cited by applicant]
US 20170234678A1 · Schonleber et al. · 2017 [cited by applicant]
US 20170276544A1 · Gastaldo · 2017 [cited by examiner]
US 20170301751A1 · Agata et al. · 2017 [cited by applicant]
US 20180038680A1 · Reolon · 2018 [cited by examiner]
US 20180164089A1 · Schonleber et al. · 2018 [cited by applicant]
US 20190137626A1 · Dietz · 2019 [cited by applicant]
US 20200166327A1 · Hariyama et al. · 2020 [cited by applicant]
US 20200174127A1 · Dietz · 2020 [cited by applicant]
CN 101365375 · 2009 [cited by applicant]
CN 101393015 · 2009 [cited by applicant]
CN 205786373U · 2016 [cited by examiner]
DE 19525770 · 1996 [cited by applicant]
DE 69622943 · 2003 [cited by applicant]
DE 10319843 · 2004 [cited by applicant]
DE 102004011189 · 2005 [cited by applicant]
DE 102004052205 · 2006 [cited by applicant]
DE 102005036719 · 2007 [cited by applicant]
DE 60028709 · 2007 [cited by applicant]
DE 102005052743 · 2007 [cited by applicant]
DE 102006034244 · 2008 [cited by applicant]
DE 102007048295 · 2009 [cited by applicant]
DE 102008041062 · 2009 [cited by applicant]
DE 102010000079 · 2010 [cited by applicant]
DE 102008049821 · 2010 [cited by applicant]
DE 10325942 · 2010 [cited by applicant]
DE 102010015944 · 2011 [cited by applicant]
DE 1020100168629 · 2011 [cited by applicant]
DE 102011081596 · 2012 [cited by applicant]
DE 102011051146 · 2012 [cited by applicant]
DE 102011117523 · 2013 [cited by applicant]
DE 102011055735 · 2013 [cited by applicant]
DE 102012111008 · 2014 [cited by applicant]
DE 102013008269 · 2014 [cited by applicant]
DE 202008018535 · 2015 [cited by applicant]
DE 102019122866 · 2019 [cited by applicant]
EP 0547227 · 1993 [cited by applicant]
EP 0905476 · 1999 [cited by applicant]
EP 1018632 · 2000 [cited by applicant]
EP 1977850 · 2008 [cited by applicant]
EP 2159535 · 2010 [cited by applicant]
EP 2076733 · 2012 [cited by applicant]
EP 3228979 · 2017 [cited by applicant]
FR 2930334 · 2009 [cited by applicant]
FR 2950441 · 2011 [cited by applicant]
GB 1105819 · 1968 [cited by applicant]
GB 2497792 · 2013 [cited by applicant]
IN 102209878 · 2011 [cited by applicant]
JP 6065963 · 1988 [cited by applicant]
JP H07311019 · 1995 [cited by applicant]
JP H10335288 · 1998 [cited by applicant]
JP H11132736A · 1999 [cited by applicant]
JP 2001235311 · 2001 [cited by applicant]
JP 200259364 · 2002 [cited by applicant]
JP 2020085717A · 2020 [cited by applicant]
KR 1020080112436 · 2008 [cited by applicant]
TW 200712585 · 2007 [cited by applicant]
TW 200937005 · 2009 [cited by applicant]
WO 1997027613 · 1997 [cited by applicant]
WO 2006028926 · 2006 [cited by applicant]
WO 2006084279 · 2006 [cited by applicant]
WO 2007060441 · 2007 [cited by applicant]
WO 2008010996 · 2008 [cited by applicant]
WO 2011086490 · 2011 [cited by applicant]
WO 2011141867 · 2011 [cited by applicant]
WO 2013070732 · 2013 [cited by applicant]
WO 2014076649 · 2014 [cited by applicant]
English Translation of Chen et al. CN-205786373-U Description (Year: 2016). [cited by examiner]
Precitec Optronik GmbH; Office Action for Japanese patent application No. 2022-578565, mailed Mar. 21, 2024, 4 pgs. [cited by applicant]
Schoenleber; German Examination Report for serial No. DE102012102826, mailed Sep. 28, 2012, 14 pgs. [cited by applicant]
Schonleber, Martin; Corrected Notice of Allowability for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Mar. 1, 2016, 6 pgs. [cited by applicant]
Schonleber, Martin; Final Office Action for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Feb. 10, 2014, 20 pgs. [cited by applicant]
Schonleber, Martin; Issue Notification for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Mar. 9, 2016, 1 pg. [cited by applicant]
Schonleber, Martin; Non Final Office Action for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Oct. 14, 2014, 16 pgs. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Jun. 25, 2015, 21 pgs. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Sep. 24, 2013, 34 pgs. [cited by applicant]
Schonleber, Martin; Notice of Allowance for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Jan. 13, 2016, 11 pgs. [cited by applicant]
Schonleber, Martin; Notice of Allowance for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Dec. 12, 2015, 9 pgs. [cited by applicant]
Schonleber, Martin; Notice of Allowance for U.S. Appl. No. 13/440,434, filed Apr. 5, 2012, mailed Sep. 23, 2015, 11 pgs. [cited by applicant]
Schonleber; United Kingdom Search Report for serial No. GB1105819.5, filed Apr. 6, 2011, mailed Jul. 23, 2012, 4 pgs. [cited by applicant]
Dusemund, Claus; Issue Notification for U.S. Appl. No. 13/521,736, filed Jul. 11, 2012, mailed Apr. 16, 2014, 1 pg. [cited by applicant]
Dusemund, Claus; Non-Final Office Action for U.S. Appl. No. 13/521,736, filed Jul. 11, 2012, mailed Jul. 23, 2013, 18 pgs. [cited by applicant]
Dusemund, Claus; Notice of Allowance for U.S. Appl. No. 13/521,736, filed Jul. 11, 2012, mailed Dec. 27, 2013, 8 pgs. [cited by applicant]
Dusemund; International Search Report and Written Opinion for serial No. PCT/IB2011/050091, filed Jan. 10, 2011, mailed Apr. 12, 2011, 17 pgs. [cited by applicant]
Precitec Optronik GmbH; Extended European Search Report for serial No. EP12172165, mailed Oct. 24, 2012, 5 pgs. [cited by applicant]
Precitec Optronik GmbH; Korean Notice of Preliminary Rejection for serial No. 10-2012-0064923, filed Jun. 18, 2012, mailed Oct. 30, 2014, 11 pgs. [cited by applicant]
Schonleber, Martin; Applicant Interview Summary for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Oct. 27, 2015, 3 pgs. [cited by applicant]
Schonleber, Martin; Final Office Action for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Oct. 7, 2014, 17 pgs. [cited by applicant]
Schonleber, Martin; Final Office Action for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Jul. 28, 2015, 32 pgs. [cited by applicant]
Schonleber, Martin; Issue Notification for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Oct. 26, 2016, 1 pg. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Feb. 25, 2014, 16 pgs. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Feb. 19, 2015, 21 pgs. [cited by applicant]
Schonleber, Martin; Notice of Allowance for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Jul. 12, 2016, 21 pgs. [cited by applicant]
Schonleber; German Examination Report for serial No. DE102011051146, filed Oct. 4, 2012, mailed Jan. 19, 2012, 6 pgs. [cited by applicant]
Dusemund; International Preliminary Report on Patentability for serial No. PCT/IB2011/050091, filed Jan. 10, 2011, mailed Aug. 16, 2012, 14 pgs. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/525,184, filed Jun. 15, 2012, mailed Dec. 31, 2015, 21 pgs. [cited by applicant]
Schonleber, Martin; Final Office Action for U.S. Appl. No. 13/667,809, filed Nov. 2, 2012, mailed Sep. 16, 2013, 9 pgs. [cited by applicant]
Schonleber, Martin; Issue Notification for U.S. Appl. No. 13/667,809, filed Nov. 2, 2012, mailed Feb. 25, 2015, 1 pg. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/667,809, filed Nov. 2, 2012, mailed Apr. 15, 2013; 12 pgs. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 13/667,809, filed Nov. 2, 2012, mailed Apr. 24, 2014; 8 pgs. [cited by applicant]
Schonleber, Martin; Notice of Allowance for U.S. Appl. No. 13/667,809, filed Nov. 2, 2012, mailed Dec. 4, 2014, 10 pgs. [cited by applicant]
Schonleber; International Preliminary Report on Patentability for serial No. PCT/IB2011/052048 filed May 10, 2011, mailed Nov. 22, 2012, 7 pgs. [cited by applicant]
Michelt, Berthold; Applicant Initiated Interview Summary for U.S. Appl. No. 14/307,481, filed Jun. 17, 2014, mailed Jul. 1, 2016, 3 pgs. [cited by applicant]
Michelt, Berthold; Applicant Interview Summary for U.S. Appl. No. 14/307,481, filed Jun. 17, 2014, mailed Nov. 20, 2015, 3 pgs. [cited by applicant]
Michelt, Berthold; Issue Notification for U.S. Appl. No. 14/307,481, filed Jun. 17, 2014, mailed Nov. 2, 2016, 1 pg. [cited by applicant]
Michelt, Berthold; Non-Final Office Action for U.S. Appl. No. 14/307,481, filed Jun. 17, 2014, mailed Aug. 26, 2015, 41 pgs. [cited by applicant]
Michelt, Berthold; Notice of Allowance for U.S. Appl. No. 14/307,481, filed Jun. 17, 2014, mailed Jul. 25, 2016, 20 pgs. [cited by applicant]
Schonleber, Martin; Chinese Office Action for serial No. 201380059958.1, filed Nov. 14, 2013, mailed Oct. 9, 2016, 11 pgs. [cited by applicant]
Schonleber; International Search Report and Written Opinion for serial No. PCT/IB2011/052048 filed May 10, 2011, mailed Sep. 21, 2011, 12 pgs. [cited by applicant]
Michelt, Berthold; Final Office Action for U.S. Appl. No. 14/307,481, filed Jun. 17, 2014, mailed Feb. 12, 2016, 24 pgs. [cited by applicant]
Precitec Optronic GmbH; International Search Report and Written Opinion for serial No. PCT/IB2014/062290, filed Jun. 17, 2014, mailed Sep. 22, 2014, 20 pgs. [cited by applicant]
Schonleber, Martin; Notice of Allowance for U.S. Appl. No. 14/713,150, filed May 15, 2015, mailed Feb. 9, 2017, 16 pgs. [cited by applicant]
Schonleber, Martin; Issue Notification for U.S. Appl. No. 14/713,150, filed May 15, 2015, mailed May 24, 2017; 1 pg. [cited by applicant]
Schonleber, Martin; Non-Final Office Action for U.S. Appl. No. 14/713,150, filed May 15, 2015, mailed Sep. 6, 2016; 50 pgs. [cited by applicant]
Schonleber, Martin; Issue Notification for U.S. Appl. No. 15/588,021, filed May 5, 2017, mailed May 9, 2018, 1 pg. [cited by applicant]
Schönleber, Martin; Notice of Allowance for U.S. Appl. No. 15/588,021, filed May 5, 2017, mailed Feb. 15, 2018, 33 pgs. [cited by applicant]
Schönleber, Martin; Ex Parte Quayle Action for U.S. Appl. No. 15/433,173, filed Feb. 15, 2017, mailed Aug. 23, 2018, 30 pgs. [cited by applicant]
Schonleber, Martin; International Search Report and Written Opinion for PCT/IB2013/060127, filed Nov. 14, 2013, mailed Mar. 21, 2014, 27 pgs. [cited by applicant]
Schonleber, Martin; German Examination Report for serial No. 102012111008.5, filed Nov. 15, 2012 , mailed Jun. 19, 2013, 17 pgs. [cited by applicant]
Schonleber, Martin; Issue Notification for U.S. Appl. No. 15/433,173, filed Feb. 15, 2017, mailed Feb. 27, 2019, 1 pg. [cited by applicant]
Schönleber, Martin; Notice of Allowance for U.S. Appl. No. 15/433,173, filed Feb. 15, 2017, mailed Nov. 20, 2018, 15 pgs. [cited by applicant]
Dietz, Christoph; Final Office Action for U.S. Appl. No. 16/184,222, filed Nov. 8, 2018, mailed Apr. 15, 2022, 17 pgs. [cited by applicant]
Dietz, Christoph; German Examination Report for serial No. 10 2017 126 310.1, filed Nov. 9, 2017, mailed Jul. 13, 2018, 14 pgs. [cited by applicant]
Dietz, Christoph; Non-Final Office Action for U.S. Appl. No. 16/184,222, filed Nov. 8, 2018, mailed Dec. 15, 2021, 60 pgs. [cited by applicant]
Dietz, Christoph; Notice of Allowance for U.S. Appl. No. 16/184,222, filed Nov. 8, 20218, mailed Jul. 20, 2022, 8 pgs. [cited by applicant]
Precitec Optronik GmbH, Office Action for Chinese application No. 201811320266.9, filed Nov. 7, 2018, mailed Jul. 1, 2020, 11 pgs. [cited by applicant]
Precitec Optronik GmbH; Notice of Preliminary Rejection for Korean application No. 10-2018-0134156, mailed Jun. 19, 2019, 11 pgs. [cited by applicant]
Precitec Optronik GmbH; Office Action for Japanese patent application No. 2018-197191, mailed Nov. 26, 2019, 6 pgs. [cited by applicant]
Dietz, Christoph; Non-Final Office Action for U.S. Appl. No. 16/361,955, filed Mar. 22, 2019, mailed May 23, 2019, 43 pgs. [cited by applicant]
Dietz, Christoph; Notice of Allowance for U.S. Appl. No. 16/361,955, filed Mar. 22, 2019, mailed Sep. 3, 2019, 12 pgs. [cited by applicant]
Dietz, Christoph; Corrected Notice of Allowance for U.S. Appl. No. 16/550,708, filed Aug. 26, 2019, mailed Apr. 20, 2020, 2 pgs. [cited by applicant]
Dietz, Christoph; Corrected Notice of Allowance for U.S. Appl. No. 16/550,708, filed Aug. 26, 2019, mailed May 29, 2020, 6 pgs. [cited by applicant]
Dietz, Christoph; Non-Final Office Action for U.S. Appl. No. 16/550,708, filed Aug. 26, 2019, mailed Jan. 23, 2020, 13 pgs. [cited by applicant]
Dietz, Christoph; Notice of Allowance for U.S. Appl. No. 16/550,708, filed Aug. 26, 2019, mailed Apr. 15, 2020, 7 pgs. [cited by applicant]
Dietz, Christoph; International Preliminary Report on Patentability for PCT/IB2021/055084, filed Jun. 10, 2021, mailed Dec. 13, 2022, 12 pgs. [cited by applicant]
Dietz, Christoph; International Search Report and Written Opinion for PCT/IB2021/055084, filed Jun. 10, 2021, mailed Sep. 20, 2021, 18 pgs. [cited by applicant]
Owen, et al.; Article entitled: “New spectroscopic instrument based on volume holographic optical elements”, Proceedings of SPIE, US, vol. 2406, Apr. 12, 1995 (Apr. 12, 1995), pp. 260-267, 9 pgs. [cited by applicant]
ISIS Sentronics Gmbh Data Sheet, “StraDex a3 sensor” and “StraDex f2-80 sensor head”, publicly available prior to Oct. 11, 2012, 3 pgs. [cited by applicant]
Precitec Optronic GmbH; German Examination Report for German Application No. DE102013010030.5, filed Jun. 17, 2013, mailed Feb. 28, 2014, 12 pgs. [cited by applicant]
Huang et al.; “Optical coherence tomography”, Science, vol. 254, No. 5035, S. 1178-1181, published Nov. 22, 1991, 4 pgs. [cited by applicant]
Precitec Optronik GmbH; International Search Report and Written Opinion for PCT/DE2019/200123, filed Nov. 5, 2019, mailed Mar. 26, 2020, 61 pgs. [cited by applicant]
Jakob, Dr. G., “Koaxiale Interferometrische Schichtdickenmessung”, Optical Measuring, Sonderdruck aus Photonik Mar. 2000; 4 pgs. [cited by applicant]
Knuttel, Dr. Alexander; “Non-compact Roughness and 3D Topography Evaluation of grinded Wafers down to nm level”, Dec. 1, 2010, 25 pgs. [cited by applicant]
Malta, D. et al.; “Fabrication of TSV-Based Silicon Interposers”, RTI International, publicly available prior to Oct. 11, 2012, 6 pgs. [cited by applicant]
Niklaus, et al. “Adhesive Wafer Bonding”, Journal of Applied Physics, Applied Physics Reviews—Focused Review, 2006, vol. 99, No. 1, pp. 031101.1-031101.28, 29 pgs. [cited by applicant]
Precitec Optronik GmbH; French Preliminary Search Report and Written Opinion for serial No. FR1253225, mailed Nov. 13, 2013, 10 pgs. [cited by applicant]
Precitec Optronik GmbH; German Examination Report for serial No. 102014008584.8, mailed Apr. 21, 2016, 13 pgs. [cited by applicant]
Rowland, et al. “Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography”, Journal of Micromechanics and Microengineering, 2005, vol. 15… [cited by applicant]
Micro-Epsilon USA; Brochure for Confocal Chromatic Measurement System, cited in the German Examination Report for serial No. 10 2014 008 584.8, mailed on Apr. 21, 2016, 11 pgs. [cited by applicant]
Micro-Epsilon; Article entitled: “New Generation of Confocal Measurement Technology”, located at <http://www.microepsilon. com/press/release/PR231confocalDT/ index.html?sLang=us>, accessed on Jul. 7, 2016, 2 pgs. [cited by applicant]
Taiwan Office Action for serial No. 101121622, filed Jun. 15, 2012, mailed May 21, 2014, 15 pgs. [cited by applicant]
Vakhtin et al.; “Common-path interferometer for frequency-domain optical coherence tomography”; Applied Optics, vol. 42, No. 34, S. 6953-6957, published Dec. 1, 2003, 6 pgs. [cited by applicant]
Lucke, et al.; Article entitled: “Mikrooptische Sensoren nach dem chromatisch konfokalen Messprinzip”, Forschungszentrum Karlsruhe GmbH, Karlsruhe 2006, 23 pgs. [cited by applicant]
Precitec Optronik GmbH, Office Action and English Translation for corresponding Japanese Application No. 2022-578565, filed Jun. 10, 2021, mailed Sep. 26, 2024, 19 pages. [cited by applicant]