Work function metal gate device
A work function metal gate device includes a gate, a drift region, a source, a drain and a first isolation structure. The gate includes a convex stair-shaped work function metal stack or a concave stair-shaped work function metal stack disposed on a substrate. The drift region is disposed in the substrate below a part of the gate. The source is located in the substrate and the drain is located in the drift region beside the gate. The first isolation structure is disposed in the drift region between the gate and the drain.
1 . A work function metal gate device, comprising:
a gate comprising a concave stair-shaped work function metal stack disposed on a substrate, wherein the concave stair-shaped work function metal stack has a symmetrical cross-sectional profile;
a drift region located in the substrate below a part of the gate;
a source located in the substrate and a drain located in the drift region beside the gate; and
a first isolation structure disposed in the drift region between the gate and the drain.
2 . The work function metal gate device according to claim 1 , wherein the concave stair-shaped work function metal stack has a plate stair-shaped cross-sectional profile.
3 . The work function metal gate device according to claim 2 , wherein the concave stair-shaped work function metal stack comprises a first stair-shaped work function metal stack and a second stair-shaped work function metal stack conformally covering the first stair-shaped work function metal stack.
4 . The work function metal gate device according to claim 3 , wherein the conductive type of the first stair-shaped work function metal stack is different from the conductive type of the second stair-shaped work function metal stack.
5 . The work function metal gate device according to claim 3 , wherein the first stair-shaped work function metal stack comprises a bottom work function metal layer having a first recess and a top work function metal layer having a second recess.
6 . The work function metal gate device according to claim 5 , wherein the second recess vertically overlaps the first recess.
7 . The work function metal gate device according to claim 6 , wherein the second recess and the first recess share a same central line.
8 . The work function metal gate device according to claim 7 , further comprising:
a second isolation structure disposed in the substrate between the gate and the source; and
a gate oxide layer located in the substrate between the first isolation structure and the second isolation structure.
9 . The work function metal gate device according to claim 8 , wherein the second recess of the top work function metal layer vertically overlaps a gap between the first isolation structure and the second isolation structure.
10 . The work function metal gate device according to claim 8 , further comprising:
a first drift region disposed in the substrate below a part of the gate, wherein the source and the second isolation structure located in the first drift region, and wherein the first recess of the bottom work function metal layer vertically overlaps a gap between the drift region and the first drift region.
11 . A work function metal gate device, comprising:
a gate comprising a concave stair-shaped work function metal stack disposed on a substrate, wherein the concave stair-shaped work function metal stack comprises a first stair-shaped work function metal stack and a second stair-shaped work function metal stack conformally covering the first stair-shaped work function metal stack;
a drift region located in the substrate below a part of the gate;
a source located in the substrate and a drain located in the drift region beside the gate; and
a first isolation structure disposed in the drift region between the gate and the drain.
12 . The work function metal gate device according to claim 11 , wherein the conductive type of the first stair-shaped work function metal stack is different from the conductive type of the second stair-shaped work function metal stack.
13 . The work function metal gate device according to claim 11 , wherein the first stair-shaped work function metal stack comprises a bottom work function metal layer having a first recess and a top work function metal layer having a second recess.
14 . The work function metal gate device according to claim 13 , wherein the second recess vertically overlaps the first recess.
15 . The work function metal gate device according to claim 14 , wherein the second recess and the first recess share a same central line.
16 . The work function metal gate device according to claim 15 , further comprising:
a second isolation structure disposed in the substrate between the gate and the source; and
a gate oxide layer located in the substrate between the first isolation structure and the second isolation structure.
17 . The work function metal gate device according to claim 16 , wherein the second recess of the top work function metal layer vertically overlaps a gap between the first isolation structure and the second isolation structure.
18 . The work function metal gate device according to claim 16 , further comprising:
a first drift region disposed in the substrate below a part of the gate, wherein the source and the second isolation structure located in the first drift region, and wherein the first recess of the bottom work function metal layer vertically overlaps a gap between the drift region and the first drift region.
19 . The work function metal gate device according to claim 11 , wherein the concave stair-shaped work function metal stack has a symmetrical cross-sectional profile.