Metal removal method, dry etching method, and production method for semiconductor element
A metal removal method which includes: a reaction step of bringing a treatment gas containing a fluorine-containing interhalogen compound and a metal-containing material containing a metal element into contact with each other to generate metal fluoride which is a reaction product of the fluorine-containing interhalogen compound and the metal element; and a volatilization step of heating the metal fluoride under an inert gas atmosphere or in a vacuum environment for volatilization. The metal element is at least one kind selected from iron, cobalt, nickel, selenium, molybdenum, rhodium, palladium, tungsten, rhenium, iridium, and platinum. Also disclosed is a dry etching method using the metal removal method and a production method for a semiconductor element using the dry etching method.
1 . A metal removal method comprising:
a reaction step of bringing a treatment gas containing a fluorine-containing interhalogen compound and a metal-containing material containing a metal element into contact with each other to generate metal fluoride which is a reaction product of the fluorine-containing interhalogen compound and the metal element; and
a volatilization step of heating the metal fluoride under an inert gas atmosphere or in a vacuum environment for volatilization, wherein
the fluorine-containing interhalogen compound is at least one kind selected from the group consisting of bromine monofluoride and bromine pentafluoride;
the metal element is at least one kind selected from the group consisting of selenium, palladium, rhenium, and iridium; and
wherein the reaction step is performed not using plasma.
2 . The metal removal method according to claim 1 , wherein
the treatment gas contains at least one kind of inert gas selected from the group consisting of nitrogen gas, helium, neon, argon, krypton, and xenon.
3 . The metal removal method according to claim 2 , wherein
a reaction temperature of the fluorine-containing interhalogen compound and the metal element in the reaction step is 0° C. or more and 100° C. or less.
4 . The metal removal method according to claim 2 , wherein
a heating temperature of the metal fluoride in the volatilization step is higher than the reaction temperature of the fluorine-containing interhalogen compound and the metal element in the reaction step.
5 . The metal removal method according to claim 2 comprising
in the reaction step, bringing the treatment gas into contact with a silicon-containing material containing at least one of silicon oxide and silicon nitride and the metal-containing material.
6 . The metal removal method according to claim 1 , wherein
a reaction temperature of the fluorine-containing interhalogen compound and the metal element in the reaction step is 0° C. or more and 100° C. or less.
7 . The metal removal method according to claim 6 , wherein
a heating temperature of the metal fluoride in the volatilization step is higher than the reaction temperature of the fluorine-containing interhalogen compound and the metal element in the reaction step.
8 . The metal removal method according to claim 6 comprising
in the reaction step, bringing the treatment gas into contact with a silicon-containing material containing at least one of silicon oxide and silicon nitride and the metal-containing material.
9 . The metal removal method according to claim 1 , wherein
a heating temperature of the metal fluoride in the volatilization step is higher than the reaction temperature of the fluorine-containing interhalogen compound and the metal element in the reaction step.
10 . The metal removal method according to claim 9 , wherein
the heating temperature of the metal fluoride in the volatilization step is 50° C. or more and 400° C. or less.
11 . The metal removal method according to claim 10 comprising
in the reaction step, bringing the treatment gas into contact with a silicon-containing material containing at least one of silicon oxide and silicon nitride and the metal-containing material.
12 . The metal removal method according to claim 9 comprising
in the reaction step, bringing the treatment gas into contact with a silicon-containing material containing at least one of silicon oxide and silicon nitride and the metal-containing material.
13 . The metal removal method according to claim 1 comprising
in the reaction step, bringing the treatment gas into contact with a silicon-containing material containing at least one of silicon oxide and silicon nitride and the metal-containing material.
14 . A dry etching method, using the metal removal method according to claim 1 .
15 . A production method for a semiconductor element comprising:
a dry etching step of removing at least one portion of a metal-containing layer containing at least one kind of metal element selected from the group consisting of selenium, palladium, rhenium, and iridium, from a semiconductor substrate having the metal-containing layer using the dry etching method according to claim 14 .