Transistor arrays with controllable gate voltage
Structures that include field-effect transistors and methods of forming such structures. The structure comprises a substrate, a dielectric layer on the substrate, a first field-effect transistor including a first semiconductor layer over the dielectric layer and a first gate electrode, and a second field-effect transistor including a second semiconductor layer over the dielectric layer and a second gate electrode adjacent to the first gate electrode. The second semiconductor layer is connected to the first semiconductor layer, and the first and second semiconductor layers are positioned between the first gate electrode and the second gate electrode.
1 . A structure comprising:
a substrate;
a dielectric layer on the substrate;
a first field-effect transistor including a first semiconductor layer over the dielectric layer and a first gate electrode;
a second field-effect transistor including a second semiconductor layer over the dielectric layer and a second gate electrode adjacent to the first gate electrode, the second semiconductor layer electrically connected to the first semiconductor layer; and
a well in the substrate beneath the first field-effect transistor and the second field-effect transistor,
wherein the first semiconductor layer and the second semiconductor layer are positioned between the first gate electrode and the second gate electrode, the dielectric layer is positioned between the well and the first semiconductor layer, and the dielectric layer is positioned between the well and the second semiconductor layer.
2 . The structure of claim 1 wherein the first semiconductor layer has p-type conductivity, the second semiconductor layer has n-type conductivity, and the well has p-type conductivity.
3 . The structure of claim 1 wherein the first semiconductor layer has p-type conductivity, the second semiconductor layer has n-type conductivity, and the well has n-type conductivity.
4 . A structure comprising:
a substrate;
a dielectric layer on the substrate;
a first field-effect transistor including a first semiconductor layer over the dielectric layer and a first gate electrode;
a second field-effect transistor including a second semiconductor layer over the dielectric layer and a second gate electrode adjacent to the first gate electrode, the second semiconductor layer adjoining the first semiconductor layer along an interface; and
a well in the substrate beneath the first field-effect transistor and the second field-effect transistor,
wherein the dielectric layer is positioned between the well and the first semiconductor layer, and the dielectric layer is positioned between the well and the second semiconductor layer.
5 . The structure of claim 4 further comprising:
a silicide layer on the first semiconductor layer and the second semiconductor layer, the silicide layer extending across the interface.
6 . The structure of claim 4 further comprising:
a memory element connected to the first semiconductor layer and the second semiconductor layer.
7 . The structure of claim 1 wherein the second semiconductor layer is spaced from the first semiconductor layer by a gap, and further comprising:
a third semiconductor layer extending across the gap from the first semiconductor layer to the second semiconductor layer.
8 . The structure of claim 7 further comprising:
a memory element connected to the third semiconductor layer.
9 . The structure of claim 1 further comprising:
an interconnect structure over the first field-effect transistor and the second field-effect transistor, the interconnect structure including a metal feature, a first contact connecting the first semiconductor layer to the metal feature, and a second contact connecting the second semiconductor layer to the metal feature.
10 . The structure of claim 9 further comprising:
a memory element connected to the metal feature.
11 . The structure of claim 1 further comprising:
a memory element connected to the first semiconductor layer and the second semiconductor layer.
12 . The structure of claim 11 further comprising:
an interconnect structure over the first field-effect transistor and the second field-effect transistor, the interconnect structure including a plurality of dielectric layers in a layer stack,
wherein the memory element is positioned in the interconnect structure.
13 . The structure of claim 11 wherein the memory element includes a first electrode connected to the first semiconductor layer and the second semiconductor layer, a second electrode, and a switching layer positioned between the first electrode and the second electrode.
14 . A structure comprising:
a substrate;
a dielectric layer on the substrate;
a first field-effect transistor including a first semiconductor layer over the dielectric layer and a first gate electrode;
a second field-effect transistor including a second semiconductor layer over the dielectric layer and a second gate electrode adjacent to the first gate electrode, the second semiconductor layer electrically connected to the first semiconductor layer; and
a well in the substrate beneath the first field-effect transistor and the second field-effect transistor,
wherein the dielectric layer is positioned between the well and the first semiconductor layer, and the dielectric layer is positioned between the well and the second semiconductor layer, the first field-effect transistor includes a third semiconductor layer between the first semiconductor layer and the dielectric layer, and the second field-effect transistor includes a fourth semiconductor layer between the second semiconductor layer and the dielectric layer.
15 . The structure of claim 14 wherein the third semiconductor layer comprises single-crystal silicon-germanium, and the fourth semiconductor layer comprises single-crystal silicon.
16 . The structure of claim 14 wherein the first semiconductor layer is positioned on a first portion of the third semiconductor layer, and the second semiconductor layer is positioned on a first portion of the fourth semiconductor layer.
17 . The structure of claim 14 wherein the first gate electrode overlaps with a second portion of the third semiconductor layer, and the second gate electrode overlaps with a second portion of the fourth semiconductor layer.
18 . The structure of claim 4 wherein the first field-effect transistor includes a third semiconductor layer between the first semiconductor layer and the dielectric layer, the second field-effect transistor includes a fourth semiconductor layer between the second semiconductor layer and the dielectric layer, the third semiconductor layer comprises single-crystal silicon-germanium, and the fourth semiconductor layer comprises single-crystal silicon.
19 . The structure of claim 4 wherein the first field-effect transistor includes a third semiconductor layer between the first semiconductor layer and the dielectric layer, the second field-effect transistor includes a fourth semiconductor layer between the second semiconductor layer and the dielectric layer, the third semiconductor layer comprises single-crystal silicon-germanium, and the fourth semiconductor layer comprises single-crystal silicon.