Methods of forming a temperature-stable, low-dielectric constant material with an ultra-low loss tangent
Disclosed herein are embodiments of high Q, temperature stable materials with low dielectric constants. In particular, a two-phase material can form based on the rutile phase of titanium oxide along with a spinel structure of ZnAl 2 O 4 . This material can have a dielectric constant below 15 which is simultaneously temperature stable.
1 . A method of forming a temperature-stable, low-dielectric constant material, the method comprising:
mixing together a ZnO powder, a Al 2 O 3 powder, and a TiO 2 powder to form a mixed powder;
calcining the mixed powder;
forming the calcined mixed powder into a radiofrequency component; and
sintering the radiofrequency component, the radiofrequency component having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the radiofrequency component having a first phase and a second phase thermodynamically compatible with the first phase, the first phase being at least one spinel and the second phase being a rutile, the at least one spinel having a composition of Zn 1+x Al 2−2x Ti x O 4 , and 0<x<1.
2 . The method of claim 1 wherein the mixing further includes mixing a MnO 2 powder.
3 . The method of claim 1 wherein the mixed powder includes 0.3 to about 0.4 mole fraction ZnO, about 0.5 to about 0.65 mole fraction AlO 1.5 , and about 0.01 to about 0.5 mole fraction TiO 2 .
4 . The method of claim 1 wherein the at least one spinel has a composition of Zn 1+x Al 2−2x Ti x O 4 , x being between 0 and 0.5.
5 . The method of claim 1 wherein the radiofrequency component is a filter.
6 . The method of claim 1 wherein the radiofrequency component is an isolator.
7 . The method of claim 1 wherein the radiofrequency component is a circulator.
8 . The method of claim 1 wherein the radiofrequency component is a resonator.
9 . The method of claim 1 wherein the at least one spinel has a composition ZnAl 2 O 4 .
10 . The method of claim 1 wherein radiofrequency component has a firing temperature of between about 1250 and about 1400° C.
11 . The method of claim 1 wherein the at least one spinel includes a first spinel and a second spinel, the first spinel being different from the second spinel.
12 . A method of forming a temperature-stable, low-dielectric constant material, the method comprising:
mixing together a ZnO powder, a Al 2 O 3 powder, and a TiO 2 powder to form a mixed powder;
calcining the mixed powder;
forming the calcined mixed powder into a radiofrequency component; and
sintering the radiofrequency component, the radiofrequency component having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the radiofrequency component having a first phase and a second phase thermodynamically compatible with the first phase, the first phase being at least one spinel and the second phase being a rutile, the first phase and the second phase formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system including about 0.3 to about 0.4 mole fraction ZnO.
13 . The method of claim 12 wherein the first phase and the second phase are formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system including about 0.5 to about 0.65 mole fraction AlO 1.5 .
14 . The method of claim 12 wherein the first phase and the second phase are formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system including about 0.01 to about 0.5 mole fraction TiO 2 .
15 . A method of forming a temperature-stable, low-dielectric constant material, the method comprising:
mixing together a ZnO powder, a Al 2 O 3 powder, and a TiO 2 powder to form a mixed powder;
calcining the mixed powder; and
sintering the calcined mixed powder, the sintered calcined mixed powder including a temperature-stable, low-dielectric constant material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, and having a first phase and a second phase thermodynamically compatible with the first phase, the first phase being at least one spinel and the second phase being a rutile, the first phase and the second phase formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system including about 0.01 to about 0.5 mole fraction TiO 2 .
16 . The method of claim 15 wherein the at least one spinel has a composition of Zn 1+x Al 2−2x Ti x O 4 , and 0<x<1.
17 . The method of claim 15 wherein the at least one spinel has a composition of Zn 1+x Al 2−2x Ti x O 4 , x being between 0 and 0.5.
18 . The method of claim 15 wherein the first phase and the second phase are formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system including about 0.3 to about 0.4 mole fraction ZnO.
19 . The method of claim 15 wherein the first phase and the second phase are formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system including about 0.5 to about 0.65 mole fraction AlO 1.5 .