Semiconductor encapsulation method and semiconductor encapsulation structure
View Patent ↗A semiconductor encapsulation method, comprising: forming a protection layer on a front side of a chip to be encapsulated; arranging said chip, with the protection layer being formed on the front side thereof, on a carrier plate, wherein the front side of said chip faces upwards and a back side thereof faces the carrier plate; and encapsulating, on the carrier plate, said chip and the protection layer to form a plastic encapsulation layer. Further provided is a semiconductor encapsulation structure.
1 . A semiconductor packaging method, comprising:
forming a protective layer on a front side of a chip to be packaged, wherein the protective layer is made of an organic-inorganic composite material;
attaching the chip to be packaged, with the protective layer formed on the front side thereof, to a carrier substrate in such a manner that the front side of the chip to be packaged faces upward and a back side of the chip to be packaged faces the carrier substrate; and
forming a plastic encapsulation layer to entirely encapsulate the chip to be packaged and the protective layer on the carrier substrate,
wherein the plastic encapsulation layer is made of an organic-inorganic composite material, the organic-inorganic composite material of the protective layer and the organic-inorganic composite material of the plastic encapsulation layer each comprising an organic material and filler particles dispersed in the organic material, the organic-inorganic composite material of the protective layer is able to effectively mitigate discrepancies between the chip to be packaged and the protective layer in terms of material properties,
wherein the filler particles in the protective layer and the filler particles in the plastic encapsulation layer are each made of an inorganic material and are spherical, a particle size of the filler particles in the protective layer is smaller than a particle size of the filler particles in the plastic encapsulation layer,
wherein the filler particles in the protective layer are present at an amount ranging from 50 w.t. % to 95 w.t. %, which enables the protective layer to be closer to silicon in terms of the material properties.
2 . The semiconductor packaging method according to claim 1 , wherein the filler particles comprise at least one of SiO 2 particles and TiO 2 particles.
3 . The semiconductor packaging method according to claim 1 , further comprising, prior to attaching the chip to be packaged with the protective layer formed on the front side thereof to the carrier substrate:
grinding the back side of the chip to be packaged.
4 . The semiconductor packaging method according to claim 1 , further comprising, subsequent to forming the plastic encapsulation layer:
thinning the plastic encapsulation layer to expose the protective layer on the front side of the chip to be packaged,
forming protective layer openings to expose solder pads on the front side of the chip to be packaged, and
forming, on the front side of the chip to be packaged, a rewiring structure that is configured to lead out the solder pads on the front side of the chip to be packaged.
5 . The semiconductor packaging method according to claim 4 , further comprising, subsequent to forming the rewiring structure on the front side of the chip to be packaged:
forming an antioxidation layer on the rewiring structure, wherein the rewiring structure comprises an electrically conductive component and a dielectric layer covering a part of the electrically conductive component, and wherein the antioxidation layer covers a remaining part of the electrically conductive component that is not covered by the dielectric layer.
6 . The semiconductor packaging method according to claim 5 , wherein the antioxidation layer comprises any one of a tin layer, a bottom-up stack of a nickel layer and a gold layer, and a bottom-up stack of a nickel layer, a palladium layer and a gold layer.
7 . The semiconductor packaging method according to claim 4 , further comprising, subsequent to forming the rewiring structure on the front side of the chip to be packaged:
removing the carrier substrate to expose the back side of the chip to be packaged.
8 . The semiconductor packaging method according to claim 7 , further comprising an antioxidation layer, wherein the rewiring structure comprises an electrically conductive component and a dielectric layer covering a part of the electrically conductive component, and wherein the antioxidation layer covers a remaining part of the electrically conductive component that is not covered by the dielectric layer.
9 . The semiconductor packaging method according to claim 1 , wherein the particle size of the filler particles in the protective layer ranges from 0.8 μm to 1.2 μm.
10 . The semiconductor packaging method according to claim 1 , wherein the particle size of the filler particles in the plastic encapsulation layer ranges from 4 μm to 6 μm.
11 . The semiconductor packaging method according to claim 1 , wherein the filler particles in the protective layer are present at an amount ranging from 80 w.t. % to 90 w.t. %, which enables the protective layer to be closer to silicon in terms of the material properties.