Transition metal deposition method
Methods of depositing transition metal on a substrate. The disclosure further relates to a transition metal layer, to a structure and to a device comprising a transition metal layer. In the method, transition metal is deposited on a substrate by a cyclical deposition process, and the method comprises providing a substrate in a reaction chamber, providing a transition metal precursor to the reaction chamber in a vapor phase and providing a reactant to the reaction chamber in a vapor phase to form transition metal on the substrate. The transition metal precursor comprises a transition metal from any of groups 4 to 6, and the reactant comprises a group 14 element selected from Si, Ge or Sn.
1 . A method of depositing a transition metal on a substrate by a cyclical deposition process, the method comprising:
providing a substrate in a reaction chamber;
providing a transition metal precursor to the reaction chamber in a vapor phase; and
providing a reactant to the reaction chamber in a vapor phase to form the transition metal on the substrate; wherein:
the transition metal precursor comprises titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, or molybdenum,
the reactant comprises a group 14 element, and
at least 60% of the transition metal is deposited as elemental metal, and
the reactant has a general formula RaMXb or RcXdM-MRcXd, wherein a is 0-3, b is 4-a, c is 0, 1 or 2, d is 3-c, R is hydrocarbon, M is Ge or Sn, and each X is independently any ligand.
2 . The method according to claim 1 , wherein the reactant comprises silicon.
3 . The method according to claim 1 , wherein the reactant comprises carbon.
4 . The method according to claim 1 , wherein the transition metal comprises molybdenum.
5 . The method according to claim 1 , wherein the transition metal precursor comprises a metal-organic precursor.
6 . The method according to claim 5 , wherein the transition metal precursor comprises an additional ligand.
7 . The method according to claim 6 , wherein the additional ligand is a halide.
8 . The method according to claim 1 , wherein the transition metal precursor comprises a benzene or a cyclopentadienyl group.
9 . The method according to claim 1 , wherein the reactant comprises an organic group.
10 . The method according to claim 1 , wherein R is an alkyl or an aryl.
11 . The method according to claim 1 , wherein X is hydrogen, a substituted or an unsubstituted alkyl, a substituted or an unsubstituted aryl, or a halogen.
12 . The method according to claim 11 , wherein X is a substituted alkyl or the substituted aryl, and wherein the substituent is same as M.
13 . The method according to claim 1 , wherein the transition metal precursor is supplied in pulses, the reactant is supplied in pulses, and the reaction chamber is purged between consecutive pulses of the transition metal precursor and reactant.
14 . The method according to claim 1 , wherein the pressure in the reaction chamber is between 0.1 and 100 Torr.
15 . The method according to claim 1 , wherein the cyclical deposition process comprises a thermal deposition process.
16 . The method according to claim 1 , wherein the substrate comprises a dielectric surface and the transition metal is deposited on the dielectric surface.
17 . The method according to claim 1 , wherein the transition metal is a group 4 or a group 5 metal.