Semiconductor package with reduced adhesive fillets
A semiconductor package includes a base chip, a first semiconductor chip on the base chip, the first semiconductor chip including first through-vias, first bump structures on the first front surface of the first semiconductor chip, a plurality of second semiconductor chips sequentially stacked on the first semiconductor chip, the plurality of second semiconductor chips including second through-vias, adhesive layers respectively on the second front surfaces of the plurality of second semiconductor chips, and an encapsulant between the base chip and the first semiconductor chip, the encapsulant covering at least a portion of each of the first semiconductor chip and the plurality of second semiconductor chips. The adhesive layers respectively have a width equal to or less than a width of the first semiconductor chip and a width of each of the plurality of second semiconductor chips in a direction, parallel to the upper surface of the base chip.
1 . A semiconductor package comprising:
a base chip including lower pads on a lower surface, upper pads on an upper surface, and through-electrodes electrically connecting the lower pads and the upper pads to each other;
a first semiconductor chip on the base chip, the first semiconductor chip including first front pads on a first front surface, first back pads on a first back surface, and first through-vias electrically connecting the first front pads and the first back pads to each other;
first bump structures on the first front surface of the first semiconductor chip, the first bump structures electrically connecting the first front pads and the upper pads to each other;
a plurality of second semiconductor chips sequentially stacked on the first semiconductor chip, the plurality of second semiconductor chips each including second front pads on second front surfaces, second back pads on second back surfaces, and second through-vias electrically connecting the second front pads and the second back pads to each other;
second bump structures on a second front surface of each of the plurality of second semiconductor chips, the second bump structures electrically connecting at least some pads facing each other among the first back pads, the second front pads, and the second back pads;
adhesive layers respectively on the second front surfaces of the plurality of second semiconductor chips, the adhesive layers surrounding the second bump structures; and
an encapsulant surrounding the first bump structures between the base chip and the first semiconductor chip, the encapsulant covering at least a portion of each of the first semiconductor chip and the plurality of second semiconductor chips,
wherein the adhesive layers respectively have a width equal to or less than a width of the first semiconductor chip and a width of each of the plurality of second semiconductor chips in a direction, parallel to the upper surface of the base chip, and
wherein a first distance between the base chip and the first semiconductor chip is greater than a second distance between the first semiconductor chip and a lowermost second semiconductor chip, among the plurality of second semiconductor chips.
2 . The semiconductor package of claim 1 , wherein
the first distance is in a range from about 15 μm to about 25 μm, and
the second distance is in a range from about 5 μm to about 15 μm.
3 . The semiconductor package of claim 1 , wherein the encapsulant is in contact with side surfaces of the adhesive layers, a first side surface of the first semiconductor chip, and second side surfaces of the plurality of second semiconductor chips.
4 . The semiconductor package of claim 1 , wherein the adhesive layers include an insulating material layer and fillers in the insulating material layer.
5 . The semiconductor package of claim 4 , wherein at least one of the fillers protrude from side surfaces of the adhesive layers and is in contact with the encapsulant.
6 . The semiconductor package of claim 4 , wherein at least one of the fillers is removed from side surfaces of the adhesive layers, defining a recess in the insulating material layer contacting the encapsulant.
7 . The semiconductor package of claim 1 , wherein side surfaces of the adhesive layers have an inclination with respect to the first back surface of the first semiconductor chip.
8 . The semiconductor package of claim 7 , wherein an angle between the side surfaces of the adhesive layers and the first back surface of the first semiconductor chip is 90° or less.
9 . The semiconductor package of claim 7 , wherein an angle between the side surfaces of the adhesive layers and the first back surface of the first semiconductor chip is 90° or more.
10 . The semiconductor package of claim 1 , further comprising:
a third semiconductor chip on the plurality of second semiconductor chips, the third semiconductor chip including third front pads on a third front surface;
third bump structures on the third front surface of the third semiconductor chip, the third bump structures electrically connecting the third front pads and the second back pads to each other; and
an additional adhesive layer on the third front surface of the third semiconductor chip, the additional adhesive layer surrounding the third bump structures.
11 . The semiconductor package of claim 10 , wherein a third back surface of the third semiconductor chip is exposed from the encapsulant.
12 . The semiconductor package of claim 10 , wherein the third semiconductor chip has a thickness greater than a thickness of the first semiconductor chip and a thickness of each of the plurality of second semiconductor chips.
13 . The semiconductor package of claim 1 , wherein the base chip has a width wider than a width of the first semiconductor chip and a width of each of the plurality of second semiconductor chips in a direction parallel to the upper surface of the base chip.
14 . The semiconductor package of claim 1 , wherein lengths of the upper pads of the base chip in a vertical direction and lengths of the first front pads of the first semiconductor chip in the vertical direction are different from each other.
15 . A semiconductor package comprising:
a base chip;
a first semiconductor chip on the base chip;
first bump structures electrically connecting the base chip and the first semiconductor chip to each other;
a second semiconductor chip on the first semiconductor chip;
second bump structures electrically connecting the first semiconductor chip and the second semiconductor chip to each other;
a first adhesive layer surrounding the second bump structures below the second semiconductor chip; and
an encapsulant surrounding the first bump structures below the first semiconductor chip, the encapsulant covering a first side surface of the first semiconductor chip, a second side surface of the second semiconductor chip, and a side surface of the first adhesive layer,
wherein the first side surface of the first semiconductor chip, the second side surface of the second semiconductor chip, and the side surface of the first adhesive layer are coplanar with each other, and
wherein a first distance between the base chip and the first semiconductor chip is greater than a second distance between the first semiconductor chip and the second semiconductor chip.
16 . The semiconductor package of claim 15 , wherein the first adhesive layer entirely overlaps the first semiconductor chip and the second semiconductor chip in a vertical direction.
17 . The semiconductor package of claim 15 , further comprising:
a third semiconductor chip on the second semiconductor chip, the third semiconductor chip having a third side surface covered by the encapsulant;
third bump structures electrically connecting the second semiconductor chip and the third semiconductor chip to each other; and
a second adhesive layer surrounding the third bump structures below the third semiconductor chip,
wherein a side surface of the second adhesive layer is coplanar with the first side surface of the first semiconductor chip, the second side surface of the second semiconductor chip, the side surface of the first adhesive layer, and the third side surface of the third semiconductor chip.
18 . A semiconductor package comprising:
a base chip;
a plurality of semiconductor chips sequentially stacked on the base chip;
bump structures between the base chip and a lowermost semiconductor chip, among the plurality of semiconductor chips, the bump structures between the plurality of semiconductor chips;
at least one adhesive layer surrounding some bump structures, among the bump structures, between the plurality of semiconductor chips; and
an encapsulant surrounding some bump structures, among the bump structures, between the base chip and the lowermost semiconductor chip, the encapsulant in direct contact with a side surface of each of the plurality of semiconductor chips and a side surface of the at least one adhesive layer,
wherein a first distance between the base chip and the lowermost semiconductor chip is greater than a second distance between the lowermost semiconductor chip and a second semiconductor chip of the plurality of semiconductor chips on the lowermost semiconductor chip, the second semiconductor chip adjacent to the lowermost semiconductor chip in the plurality of semiconductor chips stacked on the base chip.
19 . The semiconductor package of claim 18 , wherein the side surface of each of the plurality of semiconductor chips and the side surface of the at least one adhesive layer are coplanar with each other.
20 . The semiconductor package of claim 1 , wherein the encapsulant extends between adjacent upper pads of the base chip.