IP Library Granted Patent US 8,304,296
Granted Patent B2
US 8,304,296 · App. 12/821,404 · Granted Nov 6, 2012

Semiconductor packaging system with multipart conductive pillars and method of manufacture thereof

Assignee: STATS ChipPAC Ltd.
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Quick Facts
Patent No.
US 8,304,296
App. No.
12/821,404
Granted
Nov 6, 2012
Kind
B2
Abstract

A method of manufacture of a semiconductor packaging system includes: providing a substrate; mounting a semiconductor chip to the substrate; mounting a pillar ball having a ball height electrically connected to the substrate; mounting an interposer above the semiconductor chip and electrically connected to the pillar ball; and wherein: mounting the interposer or mounting the substrate includes connecting the pillar ball to a pillar base having a base height substantially less than the ball height of the pillar ball and the pillar base having vertical sides not covered by the pillar ball.

Claims (72)

1. A method of manufacture of a semiconductor packaging system comprising:

providing a substrate;

mounting a semiconductor chip to the substrate;

mounting a pillar ball, having a ball height, electrically connected to the substrate;

mounting an interposer above the semiconductor chip and electrically connected to the pillar ball;

forming an encapsulation around the semiconductor chip and entirely covering a vertical side portion of the interposer; and

wherein:

mounting the interposer or mounting the substrate includes connecting the pillar ball to a pillar base having a base height substantially less than the ball height of the pillar ball and the pillar base having vertical sides not covered by the pillar ball.

2. The method as claimed in claim 1 wherein:

connecting the pillar ball to the pillar base includes mounting the pillar ball to a first pillar base between the pillar ball and the substrate; and

further comprising:

connecting the pillar ball to a second pillar base between the pillar ball and the interposer.

3. The method as claimed in claim 1 wherein:

mounting the pillar ball includes mounting the pillar ball in direct contact to the substrate and within a recess below a top surface of the substrate.

4. The method as claimed in claim 1 wherein:

connecting the pillar ball to the pillar base includes mounting the pillar ball to the pillar base with a pillar paste in between.

5. The method as claimed in claim 1 wherein:

mounting the semiconductor chip includes mounting a through silicon via die, a flip-chip, or a combination thereof.

6. A method of manufacture of a semiconductor packaging system comprising:

providing a substrate;

mounting a semiconductor chip to the substrate;

mounting a pillar ball, having a ball height, electrically connected to the substrate;

mounting an interposer above the semiconductor chip and electrically connected to the pillar ball;

encapsulating the semiconductor chip and the pillar ball with an encapsulation, the encapsulation entirely covering a vertical side portion of the interposer;

mounting an external package electrically connected to the interposer; and

wherein:

mounting the interposer or mounting the substrate includes connecting the pillar ball to a pillar base having a base height substantially less than the ball height of the pillar ball and the pillar base having vertical sides not covered by the pillar ball.

7. The method as claimed in claim 6 wherein:

mounting the pillar ball includes mounting the pillar ball having a ball height of substantially 200 μm and in direct contact to the substrate and within a recess below a top surface of the substrate.

8. The method as claimed in claim 6 wherein:

connecting the pillar ball to the pillar base includes connecting the pillar ball to the pillar base having a base height of substantially 50 μm or connecting the pillar ball to the pillar base and a pillar paste having a combined height of substantially 50 μm.

9. The method as claimed in claim 6 wherein:

connecting the pillar ball to the pillar base includes mounting the pillar ball to a first pillar base between the pillar ball and the substrate;

further comprising:

connecting the pillar ball to a second pillar base between the pillar ball and the interposer; and

wherein:

mounting the pillar ball includes mounting the pillar ball having a ball height of substantially 150 μm between the first pillar base and the second pillar base.

10. The method as claimed in claim 6 wherein:

mounting the pillar ball includes mounting the pillar ball not substantially spherical.

11. A semiconductor packaging system comprising:

a substrate;

a semiconductor chip mounted to the substrate;

a pillar ball, having a ball height, electrically connected to the substrate;

an interposer above the semiconductor chip and electrically connected to the pillar ball;

an encapsulation around the semiconductor chip and entirely covering a vertical side portion of the interposer; and

a pillar base, having a base height, electrically connected to the pillar ball mounted between the pillar ball and the substrate or between the pillar ball and the interposer, the base height of the pillar base is substantially less than the ball height of the pillar ball and the pillar base having vertical sides not covered by the pillar ball.

12. The system as claimed in claim 11 wherein:

the pillar base is a first pillar base between the pillar ball and the substrate; and

further comprising:

a second pillar base between the pillar ball and the interposer.

13. The system as claimed in claim 11 wherein:

the pillar ball is in direct contact with the substrate and within a recess below a top surface of the substrate.

14. The system as claimed in claim 11 wherein:

the pillar ball is mounted to the pillar base with a pillar paste in between.

15. The system as claimed in claim 11 wherein:

the semiconductor chip is a through silicon via die, a flip-chip, or a combination thereof.

16. The system as claimed in claim 11 wherein:

the encapsulation encapsulates the semiconductor chip and the pillar ball; and

further comprising:

an external package electrically connected to the interposer.

17. The system as claimed in claim 16 wherein:

the pillar ball has a ball height of substantially 200 μm and is in direct contact with the substrate and within a recess below a top surface of the substrate.

18. The system as claimed in claim 16 wherein:

the pillar base has a base height of substantially 50 μm or the pillar base and a pillar paste has a combined height of substantially 50 μm.

19. The system as claimed in claim 16 wherein:

the pillar base is a first pillar base between the pillar ball and the substrate;

further comprising:

a second pillar base between the pillar ball and the interposer; and

wherein:

the pillar ball has a ball height of substantially 150 μm between the first pillar base and the second pillar base.

20. The system as claimed in claim 16 wherein:

the pillar ball is not substantially spherical.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2025
From: STATS CHIPPAC PTE. LTD.
To: STATS CHIPPAC MANAGEMENT PTE. LTD.
Reel/Frame 072788/0917 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNEE'S NAME PREVIOUSLY RECORDED AT REEL: 038378 FRAME: 0252. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Aug 31, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 065236/0784 →
RELEASE OF SECURITY INTEREST Recorded Jun 5, 2020
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 052850/0237 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0252 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 29, 2010
From: KO, CHANHOON; MYUNG, JUNWOO; KWON, WONIL
To: STATS CHIPPAC LTD.
Reel/Frame 024609/0433 →
Continuity (1)
Related Publication 20110316155A1 · Dec 29, 2011