Semiconductor device and method of forming duplex plated bump-on-lead pad over substrate for finer pitch between adjacent traces
View Patent ↗A semiconductor device has a substrate. A conductive layer is formed over the substrate. A duplex plated bump on lead pad is formed over the substrate. An insulating layer is formed over the conductive layer and the substrate. A portion of the insulating over the duplex plated bump on lead pad is removed using a laser direct ablation process. The insulating layer is a lamination layer. The duplex plated bump on lead pad has a wide bump on lead pad. A semiconductor die is mounted over the substrate. The semiconductor die has a composite conductive interconnect structure. The semiconductor die has a first bump and a second bump with a pitch ranging from 90-150 micrometers between the first bump and the second bump. A duplex plated contact pad is formed on a surface of the substrate opposite the duplex plated bump-on-lead pad.
1. A method of making a semiconductor device, comprising:
providing a substrate;
forming a first patterning layer over the substrate;
forming a plurality of conductive segments over the substrate within a plurality of openings of the first patterning layer;
forming a second patterning layer over the first patterning layer and conductive segments;
forming a first conductive layer within an opening of the second patterning layer, wherein the opening of the second patterning layer is aligned with one of the openings in the first patterning layer and the first conductive layer includes a cross-sectional width equal to a cross-sectional width of a first one of the conductive segments and in contact with the first one of the conductive segments and vertically offset from a second one of the conductive segments; and
forming an insulating layer over the substrate, first conductive layer, and conductive segments after forming the first conductive layer, wherein the insulating layer is disposed between the first one of the conductive segments and the second one of the conductive segments and contacts a surface of the second one of the conductive segments opposite the substrate.
2. The method of claim 1 , further including removing a portion of the insulating layer to expose the first conductive layer.
3. The method of claim 1 , further including removing a portion of the insulating layer by a laser direct ablation.
4. The method of claim 1 , wherein forming the insulating layer over the substrate includes pressing the insulating layer over the first conductive layer and conductive segments.
5. The method of claim 1 , further including forming a contact pad over a surface of the substrate opposite the first conductive layer.
6. The method of claim 1 , further including disposing a semiconductor die over the substrate.
7. The method of claim 1 , wherein forming the conductive segments includes:
forming a second conductive layer over the substrate; and
forming a third conductive layer over the second conductive layer.
8. A method of making a semiconductor device, comprising:
providing a substrate;
forming a first conductive layer over the substrate;
forming a second conductive layer having a cross-sectional width equal to a cross-sectional width of a first portion of the first conductive layer, wherein the second conductive layer is disposed over the first portion of the first conductive layer and vertically offset from a second portion of the first conductive layer;
forming an insulating layer over the substrate, first conductive layer, and second conductive layer after forming the second conductive layer, wherein the insulating layer is disposed between the first portion of the first conductive layer and the second portion of the first conductive layer and contacts a surface of the second portion of the first conductive layer opposite the substrate; and
disposing an interconnect structure over the second conductive layer, wherein the interconnect structure extends to a surface of the insulating layer recessed below a surface of the second conductive layer.
9. The method of claim 8 , further including removing a portion of the insulating layer from over the second conductive layer.
10. The method of claim 8 , wherein forming the insulating layer includes disposing the insulating layer over the first conductive layer and pressing the insulating layer toward the substrate.