Granted Patent
Utility
US 6,734,439
· Confirmation No. 4910
WAFER PEDESTAL TILT MECHANISM AND COOLING SYSTEM
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-03-08 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-03-08 | C.AD |
Change of Address | 1 | View | |
| 2003-12-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-12-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-12-11 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-12-11 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-01 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-12-01 | FWCLM |
Index of Claims | 1 | View | |
| 2003-11-21 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2003-11-06 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-11-06 | CLM |
Claims | 3 | View | |
| 2003-11-06 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-11-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2003-11-06 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2003-08-01 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-08-01 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-08-01 | FOR |
Foreign Reference | 6 | View | |
| 2003-07-22 | SRNT |
Examiner's search strategy and results | 21 | View | |
| 2003-06-06 | C.AD |
Change of Address | 1 | View | |
| 2001-10-25 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-10-25 | SPEC |
Specification | 8 | View | |
| 2001-10-25 | CLM |
Claims | 3 | View | |
| 2001-10-25 | ABST |
Abstract | 1 | View | |
| 2001-10-25 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-10-25 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-10-25 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-10-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-10-25 | FWCLM |
Index of Claims | 1 | View | |
| 2001-10-25 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-10-25 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-10-25 | SPEC |
Specification | 8 | View | |
| 2001-10-25 | CLM |
Claims | 3 | View | |
| 2001-10-25 | ABST |
Abstract | 1 | View | |
| 2001-10-25 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-10-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-10-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-10-25 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Allan Weed
Marblehead, MA
Roger B. Fish
Bedford, MA
Attorneys & Agents of Record
Classification
USPC
250/443.1
H10P72/0434
H10P30/20
H01J37/3171
H01J2237/2001
H01J2237/20207
Prosecution
- Examiner
- HUGHES, JAMES P
- Art Unit
- 2881
- Docket No.
- 28001-04006
- Confirmation No.
- 4910
Publication
- Pub. No.
- US20030080300A1
- Pub. Date
- 2003-05-01
Patent Term Adjustment
-5days
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-25
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Quick Facts
- Patent No.
- US 6,734,439
- App. No.
- 10/054,325
- Filed
- 2001-10-25
- Granted
- 2004-05-11
- Pub. No.
- US20030080300A1
- Examiner
- HUGHES, JAMES P
- Art Unit
- 2881
- PTA
- -5 days
External Links