Granted Patent
Utility
US 6,784,418
· Confirmation No. 7109
SEMICONDUCTOR PROCESSING TOOL ALIGNMENT TECHNIQUE IMPLEMENTED IN A FIMS SYSTEM
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-04-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-23 | RUSH |
Printer Query form, used by the publications branch | 1 | View | |
| 2003-10-27 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-10-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-10-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-10-16 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-10-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-10-16 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-10-16 | FWCLM |
Index of Claims | 1 | View | |
| 2003-10-16 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-07-21 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-05-19 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 5 | View | |
| 2003-05-19 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-03-04 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-03-04 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-03-04 | SPEC |
Specification | 3 | View | |
| 2003-03-04 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-02-03 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2002-12-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-12-24 | SPEC |
Specification | 35 | View | |
| 2002-12-24 | CLM |
Claims | 3 | View | |
| 2002-12-24 | ABST |
Abstract | 1 | View | |
| 2002-12-24 | DRW |
Drawings-only black and white line drawings | 35 | View | |
| 2002-12-24 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-12-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-12-24 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Paul Bacchi
Ross, CA
Paul S. Filipski
Greenbrae, CA
Attorneys & Agents of Record
Classification
USPC
250/239
H10P72/1914
H10P72/50
H10D30/6731
H10D30/0323
H10D30/0321
H10D30/6745
H10D30/6744
H10D86/0223
H10D30/0314
H10D86/0251
H10P72/3406
H10P72/3408
H10P72/1918
H01J61/35
H01J65/046
Prosecution
- Examiner
- LE, QUE TAN
- Art Unit
- 2878
- Customer No.
- 3528
- Docket No.
- 40146/35:6
- Confirmation No.
- 7109
Publication
- Pub. No.
- US20030173510A1
- Pub. Date
- 2003-09-18
Patent Term Adjustment
-38days
Parent
is a Division of
→
App. 09/612,757
· US 6,501,070
Filed 2000-07-10
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/352,155
· US 6,281,516
Filed 1999-07-12
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/092,626
Filed 1998-07-13
· Provisional Application Expired
AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.),
AZENTA USA, INC. (F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
RELEASE OF SECURITY INTEREST RECORDED AT REEL/FRAME 038891/0765
Recorded 2025-11-04
AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.),
AZENTA US, INC. (F/K/A BROOKS LIFE SCIENCES, INC., F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
RELEASE OF SECURITY INTEREST RECORDED AT REEL/FRAME 044142/0258
Recorded 2025-11-04
SECOND LIEN PATENT SECURITY AGREEMENT
Recorded 2022-02-02
FIRST LIEN PATENT SECURITY AGREEMENT
Recorded 2022-02-02
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-12-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-12-09
SECURITY INTEREST
Recorded 2017-10-06
SECURITY AGREEMENT
Recorded 2016-05-31
from
NEWPORT CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-02-15
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Quick Facts
- Patent No.
- US 6,784,418
- App. No.
- 10/328,749
- Filed
- 2002-12-24
- Granted
- 2004-08-31
- Pub. No.
- US20030173510A1
- Examiner
- LE, QUE TAN
- Art Unit
- 2878
- PTA
- -38 days
External Links